JP2016537820A - オプトエレクトロニクス半導体チップ - Google Patents
オプトエレクトロニクス半導体チップ Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 268
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 59
- 239000000463 material Substances 0.000 claims description 32
- 239000000654 additive Substances 0.000 claims description 8
- 229910010293 ceramic material Inorganic materials 0.000 claims description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 6
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 6
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 3
- 229910000410 antimony oxide Inorganic materials 0.000 claims description 3
- 229910000416 bismuth oxide Inorganic materials 0.000 claims description 3
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 3
- 229910000428 cobalt oxide Inorganic materials 0.000 claims description 3
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 claims description 3
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 3
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 3
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 claims description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000011787 zinc oxide Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 129
- 230000015556 catabolic process Effects 0.000 description 20
- 230000005855 radiation Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- -1 nitride compound Chemical class 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 150000002736 metal compounds Chemical class 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
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- H01L25/167—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
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- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
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- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
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- H01L33/387—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape with a plurality of electrode regions in direct contact with the semiconductor body and being electrically interconnected by another electrode layer
Abstract
Description
Claims (17)
- − 半導体材料を含有し、第1の導電性タイプの第1の半導体領域(3)と、第2の導電性タイプの第2の半導体領域(4)と、前記第1及び第2の半導体領域(3,4)の間に形成されている、pn接合部を有する活性ゾーン(5)とを備える、半導体積層体(2)と、
− 前記半導体積層体(2)が配置されているキャリア(6)と、
− 前記第1の半導体領域(3)を電気的に接続するために設けられている第1のコンタクト(7)と、
− 前記第1のコンタクト(7)とは異なり、前記第2の半導体領域(4)を電気的に接続するために設けられている第2のコンタクト(8)と、
− 前記半導体積層体(2)と並列又は逆並列に接続されている橋絡素子(9)であって、前記橋絡素子(9)の非線形電気抵抗が前記オプトエレクトロニクス半導体チップ(1)の順方向における動作電圧の場合に前記半導体積層体(2)の電気抵抗よりも高く、逆方向における過電圧の場合に前記半導体積層体(2)の前記電気抵抗よりも低いため、過電圧の場合に電荷が前記橋絡素子(9)を介して放電され、前記半導体積層体(2)の前記半導体材料の外側に配置されている少なくとも1つの橋絡層(9A)を備える、橋絡素子(9)と、
を備えるオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡層(9A)は、エピタキシャル層ではない、
請求項1に記載のオプトエレクトロニクス半導体チップ。 - 前記橋絡素子(9)及び/又は前記橋絡層(9A)は、多結晶性電子セラミックス材料を含有する、
請求項1又は2に記載のオプトエレクトロニクス半導体チップ。 - 前記橋絡素子(9)は、前記第1の半導体領域(3)と第2の半導体領域(4)とを接続し、及び/又は、1つの半導体領域(3,4)を、対応するコンタクト(7,8)に接続している、
請求項1〜3のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡素子(9)は、前記第1のコンタクトと第2のコンタクト(8)とを接続している、
請求項1〜4のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡素子(9)は、前記半導体積層体(2)に設けられている、
請求項1〜5のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記半導体積層体(2)は、前記キャリア(6)に対向する第1の主面(2A)と、前記キャリア(6)から遠い第2の主面(2B)と、前記第1及び第2の主面(2A,2B)に対して或る角度で延伸する1つの側面(2C)とを備え、
前記橋絡層(9A)は前記側面(2C)上に配置されている、
請求項1〜6のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記半導体積層体(2)は、前記半導体積層体(2)の内面(2D)によって範囲が定められている凹部(10)を備え、
前記橋絡層(9A)が前記内面(2D)上に配置されている、
請求項1〜7のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第2のコンタクト(8)は、前記凹部(10)内に配置されているコンタクト素子(8B)を備える、
請求項1〜8のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記コンタクト素子(8B)の周囲は、前記橋絡素子(9)によって囲まれている、
請求項9に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のコンタクト(7)は、前記コンタクト素子(8B)が延伸する開口部(13)によって中断されるコンタクト層(7A)を備える、
請求項9または10に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のコンタクト(7)はコンタクト層(7A)を備え、
前記第2のコンタクト(8)はコンタクト層(8A)を備え、
前記コンタクト層(7A)と前記コンタクト層(8A)とが前記橋絡素子(9)によって接続されている、
請求項1〜11のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡素子(9)は、酸化亜鉛、酸化ストロンチウム、チタン酸ストロンチウム、酸化チタン、炭化ケイ素のうちの少なくとも1つを含む、
請求項1〜12のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡素子(9)は、酸化ビスマス、酸化アンチモン、酸化コバルト、酸化マンガン、酸化ニッケル、酸化クロム、及び酸化シリコンの材料添加物のうちの少なくとも1つを含有する、
請求項1〜13のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡素子(9)は、バリスタ、ショットキーダイオード、又はツェナーダイオードである、
請求項1〜14のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記橋絡素子(9)は前記キャリア(6)に設けられ、
前記キャリア(6)は、基礎部(15)と、前記第1又は第2のコンタクト(7,8)に電気的に接続され、前記基礎部(15)内に少なくとも部分的に埋め込まれ、及び/又は前記基礎部(15)上に配置されている少なくとも1つの接続素子(16,17)とを備える、
請求項1〜15のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記キャリア(6)は、前記第1のコンタクト(7)に電気的に接続されている第1の接続素子(16)と、前記第2のコンタクト(8)に電気的に接続されている第2の接続素子(17)とを備え、
前記第1及び第2の接続素子(16,17)は、前記橋絡素子(9)によって接続されている、
請求項16に記載のオプトエレクトロニクス半導体チップ(1)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102013112881.5 | 2013-11-21 | ||
DE102013112881.5A DE102013112881A1 (de) | 2013-11-21 | 2013-11-21 | Optoelektronischer Halbleiterchip |
PCT/EP2014/074071 WO2015074900A1 (de) | 2013-11-21 | 2014-11-07 | Optoelektronischer halbleiterchip mit integriertem esd-schutz |
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JP2016537820A true JP2016537820A (ja) | 2016-12-01 |
JP6262856B2 JP6262856B2 (ja) | 2018-01-17 |
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US (1) | US10121775B2 (ja) |
JP (1) | JP6262856B2 (ja) |
CN (1) | CN105765723A (ja) |
DE (2) | DE102013112881A1 (ja) |
WO (1) | WO2015074900A1 (ja) |
Families Citing this family (6)
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TWI568026B (zh) * | 2014-11-04 | 2017-01-21 | 錼創科技股份有限公司 | 發光裝置 |
DE102015111485A1 (de) | 2015-07-15 | 2017-01-19 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauelement |
DE102015111487A1 (de) * | 2015-07-15 | 2017-01-19 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
DE102015119353B4 (de) | 2015-11-10 | 2024-01-25 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches Halbleiterbauteil und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils |
DE102017122111B4 (de) | 2017-09-25 | 2024-03-07 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Elektronisches Bauteil |
CN112134139B (zh) * | 2020-11-20 | 2021-02-09 | 武汉敏芯半导体股份有限公司 | 抵抗静电冲击的半导体激光器芯片及工艺 |
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JP2005136177A (ja) * | 2003-10-30 | 2005-05-26 | Toyoda Gosei Co Ltd | Iii−v族窒化物半導体素子 |
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Also Published As
Publication number | Publication date |
---|---|
JP6262856B2 (ja) | 2018-01-17 |
WO2015074900A1 (de) | 2015-05-28 |
DE112014005323A5 (de) | 2016-08-04 |
CN105765723A (zh) | 2016-07-13 |
DE102013112881A1 (de) | 2015-05-21 |
US10121775B2 (en) | 2018-11-06 |
DE112014005323B4 (de) | 2022-02-24 |
US20160300829A1 (en) | 2016-10-13 |
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