JP2016535457A - イオン注入によってドーピングし、外方拡散バリアを堆積することを含む太陽電池の製造方法 - Google Patents
イオン注入によってドーピングし、外方拡散バリアを堆積することを含む太陽電池の製造方法 Download PDFInfo
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 16
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
このプロセスステップにおいて、後続の浄化を伴う、工業上一般に行われるテクスチャー化が実施される。オプションとして、ウェハの裏側は平坦であってもよい。これを実現するために、従来技術にいくつかの方法があるが、本発明とは無関係である。
太陽電池表側へのホウ素の注入、たとえば、1−40keVのエネルギーで、0.5及び5e15 1/cm2の間のドーズ量、好ましくは、3−10keVのエネルギーで、1.5−3e15 1/cm2の間のドーズ量。ホウ素層の層抵抗は、回復後に30−300オームスクウェア(Ohm/square)、好ましくは60−100オームスクウェアである。さらなる実施形態においては、金属層領域下のドーズ量がより高くなるように、注入を選択的に実施することができる。
ここで、セルの裏側に燐が注入される(たとえば、1−40keVのエネルギーで、0.5及び5e15 1/cm2の間のドーズ量、好ましくは、10keVのエネルギーで、2.5−4e15 1/cm2の間のドーズ量)。燐層の層抵抗は、回復後に10−300オームスクウェア(Ohm/square)、好ましくは30−120オームスクウェアである。さらなる実施形態においては、金属層領域下のドーズ量がより高くなるように、注入を選択的に実施することができる。
裏側キャップは、燐の外方拡散、及びオプションとして酸素の内部拡散を防止する。図2Aによる変形実施形態においては、キャップは、セル上にとどまり、裏側パッシベーションとして使用される。
熱的後処理ステップは、注入の損傷を回復し、注入されたドーパントを活性化し、所望のエミッタ及びBSFの深さが得られるように、ホウ素及び燐をウェハの中へ拡散させる。アニーリングプロセスは、ホウ素を活性化する要求に適合されており、ホウ素の活性化は、燐の活性化よりも本質的に臨界的である。ホウ素の活性化は、通常、不活性雰囲気(N2、Ar)において、高温(900−1100℃)のアニーリングを必要とする。ある期間に、ウェハ表面に酸化物層を成長させ、OED効果によってホウ素拡散を促進させるために、酸素を流入させることができる。アニーリング時間は、5分から300分であり、好ましくは15分から60分である。アニーリングの間に成長した酸化物層は、後のパッシベーションに役立ち、1nmから150nm、好ましくは5nmから25nmの厚さである。拡散領域の深さは、30nmから2500nm、好ましくは400nmから1000nmである。
最も簡単な実施形態において、太陽電池の表側パッシベーションは、SiO/SiN積層構造によって実現される。その際に、ステップ4の熱的に成長させた酸化ケイ素(SiO2)が使用される。SiNはPECVDプロセスによって堆積される。この変形実施形態は、特に、低いプロセス費用のために魅力的である。SiNは通常、1.98から2.15の間(好ましくは、2.05)の屈折率を有し、10から150nmの間(好ましくは、60から90nm)の厚さで堆積される。
金属化は、工業上一般に行われる方法で実施することができ、本発明上重要ではない。表側金属化は、通常、銀グリッドによって実施され、裏側金属化は、同様に銀グリッド、または局所接点を使用した全面アルミニウム金属化によって実施される。該金属化は、たとえば、レーザ切除及びPVDによって製造される。
Claims (11)
- 結晶質半導体材料から太陽電池(1)を製造する方法であって、半導体基板(3)の第1の表面(3a)に、第1のドーパントのイオン注入(S2)によって、第1のドーピング領域(5)を形成し、該半導体基板の第2の表面(3b)に、第2のドーパントのイオン注入(S3)または熱的内部拡散によって、第2のドーピング領域(7)を形成し、該第2の表面のドーピングの後に、該第2のドーパントに対して外方拡散バリアとして作用するカバー層(9b)を生成し、その後、テンパーステップ(S4)を実施する方法。
- 該第2の表面(3b)に生成されるカバー層(9b)として、組成、性質、及び厚さに基づいて、酸素を通さないような層が形成されている請求項1に記載の方法。
- 該第2の表面(3b)に生成されるカバー層(9b)は、該太陽電池(1)の反射防止/パッシベーション層またはその一部として、該第2の表面にそのままにしておく請求項1または2に記載の方法。
- 該第2の表面(3b)に生成されるカバー層(9b)は、テンパーステップ(S4)の後にエッチバックされる請求項1または2に記載の方法。
- 該第2の表面(3b)に生成されるカバー層(9b)は、PECVD法(S4)によって堆積される請求項1から4のいずれかに記載の方法。
- 該第2の表面(3b)に生成されるカバー層(9b)は、酸化ケイ素層、及び/または窒化ケイ素層、及び/または酸窒化ケイ素層を含む請求項1から5のいずれかに記載の方法。
- 該カバー層(9b)は、複数のサブ層を含み、その中の少なくとも一つは、窒化ケイ素層として形成される請求項6に記載の方法。
- 該カバー層(9b)は、該第1の表面(3a)への第1のドーパントのイオン注入前に形成される請求項1から7のいずれかに記載の方法。
- 半導体材料としてシリコンが使用され、第1のドーパントとして、ホウ素、インジウム、ガリウム、アルミニウムを含むグループから一つの元素、特に、ホウ素が使用され、第2のドーパントとして、燐、ヒ素、アンチモンを含むグループから一つの元素、特に、燐が使用される請求項1から8のいずれかに記載の方法。
- 該第1のドーピング領域(5)が、n−シリコン基板(3)の表側表面(3a)におけるエミッタ領域として形成され、該第2のドーピング領域(7)が、n−シリコン基板の裏側表面(3b)における背面フィールド(7)として形成される請求項1から9のいずれかに記載の方法。
- 該テンパーステップ(S4)は、中性雰囲気または酸化性雰囲気における、850℃から1100℃の間の範囲の温度の回復ステップを含む請求項1から10のいずれかに記載の方法。
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Application Number | Priority Date | Filing Date | Title |
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DE102013218351.8 | 2013-09-13 | ||
DE102013218351.8A DE102013218351A1 (de) | 2013-09-13 | 2013-09-13 | Verfahren zur Herstellung einer Solarzelle |
PCT/EP2014/066856 WO2015036181A1 (de) | 2013-09-13 | 2014-08-05 | Verfahren zur herstellung einer solarzelle umfassend eine dotierung durch ionenimplantation und abscheiden einer ausdiffusionsbarriere |
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JP2016535457A true JP2016535457A (ja) | 2016-11-10 |
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CN (1) | CN106104755A (ja) |
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CN111640804A (zh) * | 2020-06-01 | 2020-09-08 | 国家电投集团西安太阳能电力有限公司 | 一种氧化硅/氮化硅叠层膜的n-pert双面电池结构 |
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KR101680036B1 (ko) * | 2015-07-07 | 2016-12-12 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
CN108352413B (zh) | 2015-10-25 | 2021-11-02 | 索拉昂德有限公司 | 双面电池制造方法 |
DE102016125316B4 (de) * | 2016-12-22 | 2021-07-22 | Infineon Technologies Austria Ag | Herstellen von rekombinationszentren in einem halbleiterbauelement |
CN107425086A (zh) * | 2017-05-18 | 2017-12-01 | 阳光中科(福建)能源股份有限公司 | 一种离子注入法制作n型pert双面太阳电池的制备工艺 |
DE102019104249A1 (de) * | 2019-02-20 | 2020-08-20 | Hanwha Q Cells Gmbh | Verfahren zur Herstellung einer PERC-Solarzelle und PERC-Solarzelle |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5363993A (en) * | 1976-11-19 | 1978-06-07 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
JP2003152205A (ja) * | 2001-11-12 | 2003-05-23 | Sharp Corp | 光電変換素子及びその製造方法 |
JP2005223080A (ja) * | 2004-02-04 | 2005-08-18 | Sharp Corp | 太陽電池の製造方法 |
WO2005076960A2 (en) * | 2004-02-05 | 2005-08-25 | Advent Solar, Inc. | Back-contact solar cells and methods for fabrication |
JP2006066765A (ja) * | 2004-08-30 | 2006-03-09 | Sharp Corp | 多接合型化合物太陽電池およびその製造方法 |
JP2006310389A (ja) * | 2005-04-26 | 2006-11-09 | Sharp Corp | 太陽電池の製造方法 |
JP2012199517A (ja) * | 2011-02-03 | 2012-10-18 | Imec | 太陽電池の製造方法 |
US20130171767A1 (en) * | 2009-05-05 | 2013-07-04 | Solexel, Inc. | Ion implantation and annealing for high efficiency back-contact back-junction solar cells |
JP2013165160A (ja) * | 2012-02-10 | 2013-08-22 | Shin Etsu Chem Co Ltd | 太陽電池の製造方法及び太陽電池 |
US20130224938A1 (en) * | 2012-02-24 | 2013-08-29 | Varian Semiconductor Equipment Associates, Inc. | Passivation layer for workpieces formed from a polymer |
US20140261666A1 (en) * | 2013-03-13 | 2014-09-18 | Applied Materials, Inc. | Methods of manufacturing a low cost solar cell device |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3340874A1 (de) * | 1983-11-11 | 1985-05-23 | Telefunken electronic GmbH, 7100 Heilbronn | Verfahren zum herstellen einer solarzelle |
JP2004193350A (ja) * | 2002-12-11 | 2004-07-08 | Sharp Corp | 太陽電池セルおよびその製造方法 |
US20060060238A1 (en) * | 2004-02-05 | 2006-03-23 | Advent Solar, Inc. | Process and fabrication methods for emitter wrap through back contact solar cells |
US20050172996A1 (en) * | 2004-02-05 | 2005-08-11 | Advent Solar, Inc. | Contact fabrication of emitter wrap-through back contact silicon solar cells |
DE102010003784A1 (de) * | 2010-04-09 | 2011-10-13 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Solarzelle |
US20150007881A1 (en) | 2012-01-16 | 2015-01-08 | Heraeus Precious Metals North America Conshohocken Llc | Aluminum conductor paste for back surface passivated cells with locally opened vias |
KR101872786B1 (ko) | 2012-06-22 | 2018-06-29 | 엘지전자 주식회사 | 태양 전지의 불순물층 형성 방법 및 태양 전지의 제조 방법 |
CN102856436A (zh) * | 2012-09-05 | 2013-01-02 | 友达光电股份有限公司 | 太阳能电池及其制作方法 |
DE102012217078B4 (de) * | 2012-09-21 | 2015-03-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer photovoltaischen Solarzelle |
US9515217B2 (en) * | 2012-11-05 | 2016-12-06 | Solexel, Inc. | Monolithically isled back contact back junction solar cells |
-
2013
- 2013-09-13 DE DE102013218351.8A patent/DE102013218351A1/de not_active Withdrawn
-
2014
- 2014-08-05 CN CN201480058077.2A patent/CN106104755A/zh active Pending
- 2014-08-05 WO PCT/EP2014/066856 patent/WO2015036181A1/de active Application Filing
- 2014-08-05 JP JP2016541855A patent/JP2016535457A/ja active Pending
- 2014-08-05 EP EP14753037.2A patent/EP3044813A1/de not_active Withdrawn
- 2014-08-05 KR KR1020167008592A patent/KR20160071373A/ko not_active Application Discontinuation
- 2014-08-05 US US15/021,077 patent/US10263135B2/en active Active
- 2014-08-05 MY MYPI2016700869A patent/MY173528A/en unknown
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5363993A (en) * | 1976-11-19 | 1978-06-07 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
JP2003152205A (ja) * | 2001-11-12 | 2003-05-23 | Sharp Corp | 光電変換素子及びその製造方法 |
JP2005223080A (ja) * | 2004-02-04 | 2005-08-18 | Sharp Corp | 太陽電池の製造方法 |
WO2005076960A2 (en) * | 2004-02-05 | 2005-08-25 | Advent Solar, Inc. | Back-contact solar cells and methods for fabrication |
JP2006066765A (ja) * | 2004-08-30 | 2006-03-09 | Sharp Corp | 多接合型化合物太陽電池およびその製造方法 |
JP2006310389A (ja) * | 2005-04-26 | 2006-11-09 | Sharp Corp | 太陽電池の製造方法 |
US20130171767A1 (en) * | 2009-05-05 | 2013-07-04 | Solexel, Inc. | Ion implantation and annealing for high efficiency back-contact back-junction solar cells |
JP2012199517A (ja) * | 2011-02-03 | 2012-10-18 | Imec | 太陽電池の製造方法 |
JP2013165160A (ja) * | 2012-02-10 | 2013-08-22 | Shin Etsu Chem Co Ltd | 太陽電池の製造方法及び太陽電池 |
US20130224938A1 (en) * | 2012-02-24 | 2013-08-29 | Varian Semiconductor Equipment Associates, Inc. | Passivation layer for workpieces formed from a polymer |
US20140261666A1 (en) * | 2013-03-13 | 2014-09-18 | Applied Materials, Inc. | Methods of manufacturing a low cost solar cell device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111640804A (zh) * | 2020-06-01 | 2020-09-08 | 国家电投集团西安太阳能电力有限公司 | 一种氧化硅/氮化硅叠层膜的n-pert双面电池结构 |
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KR20160071373A (ko) | 2016-06-21 |
MY173528A (en) | 2020-01-31 |
US20160233372A1 (en) | 2016-08-11 |
CN106104755A (zh) | 2016-11-09 |
DE102013218351A1 (de) | 2015-03-19 |
US10263135B2 (en) | 2019-04-16 |
EP3044813A1 (de) | 2016-07-20 |
WO2015036181A1 (de) | 2015-03-19 |
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