JP2016516657A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016516657A5 JP2016516657A5 JP2016501874A JP2016501874A JP2016516657A5 JP 2016516657 A5 JP2016516657 A5 JP 2016516657A5 JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016516657 A5 JP2016516657 A5 JP 2016516657A5
- Authority
- JP
- Japan
- Prior art keywords
- glass
- glass sheet
- glass sheets
- interfaces
- modified layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 43
- 210000002381 Plasma Anatomy 0.000 claims description 7
- 229920002313 fluoropolymer Polymers 0.000 claims description 6
- 239000004811 fluoropolymer Substances 0.000 claims description 6
- 230000004048 modification Effects 0.000 claims description 4
- 238000006011 modification reaction Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims 9
- BLRPTPMANUNPDV-UHFFFAOYSA-N silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 8
- 229910000077 silane Inorganic materials 0.000 claims 8
- 238000000137 annealing Methods 0.000 claims 6
- 230000005484 gravity Effects 0.000 claims 3
- PARWUHTVGZSQPD-UHFFFAOYSA-N Phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 claims 2
- ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 2
- 238000006116 polymerization reaction Methods 0.000 claims 2
- 230000000717 retained Effects 0.000 claims 2
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 claims 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N Bis(trimethylsilyl)amine Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 claims 1
- 230000001351 cycling Effects 0.000 claims 1
- -1 polytetrafluoroethylene Polymers 0.000 claims 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
- 150000004756 silanes Chemical class 0.000 claims 1
- 239000000969 carrier Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 230000032798 delamination Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 201000001195 sepiapterin reductase deficiency Diseases 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361791418P | 2013-03-15 | 2013-03-15 | |
| US61/791,418 | 2013-03-15 | ||
| US14/047,251 US9340443B2 (en) | 2012-12-13 | 2013-10-07 | Bulk annealing of glass sheets |
| US14/047,251 | 2013-10-07 | ||
| PCT/US2014/025537 WO2014151353A1 (fr) | 2013-03-15 | 2014-03-13 | Recuit en masse de feuilles de verre |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147681A Division JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016516657A JP2016516657A (ja) | 2016-06-09 |
| JP2016516657A5 true JP2016516657A5 (fr) | 2017-03-16 |
| JP6186493B2 JP6186493B2 (ja) | 2017-08-23 |
Family
ID=51580938
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016501874A Expired - Fee Related JP6186493B2 (ja) | 2013-03-15 | 2014-03-13 | ガラスシートのバルクアニール |
| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2969997A1 (fr) |
| JP (2) | JP6186493B2 (fr) |
| KR (1) | KR102239613B1 (fr) |
| CN (1) | CN105658594B (fr) |
| TW (2) | TWI594960B (fr) |
| WO (1) | WO2014151353A1 (fr) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI617437B (zh) | 2012-12-13 | 2018-03-11 | 康寧公司 | 促進控制薄片與載體間接合之處理 |
| US10014177B2 (en) | 2012-12-13 | 2018-07-03 | Corning Incorporated | Methods for processing electronic devices |
| US9340443B2 (en) | 2012-12-13 | 2016-05-17 | Corning Incorporated | Bulk annealing of glass sheets |
| US10086584B2 (en) | 2012-12-13 | 2018-10-02 | Corning Incorporated | Glass articles and methods for controlled bonding of glass sheets with carriers |
| WO2014151353A1 (fr) * | 2013-03-15 | 2014-09-25 | Corning Incorporated | Recuit en masse de feuilles de verre |
| US10510576B2 (en) | 2013-10-14 | 2019-12-17 | Corning Incorporated | Carrier-bonding methods and articles for semiconductor and interposer processing |
| EP3099483B1 (fr) * | 2014-01-27 | 2022-06-01 | Corning Incorporated | Articles et procédés pour la liaison contrôlée de feuilles minces avec des supports |
| EP3129221A1 (fr) | 2014-04-09 | 2017-02-15 | Corning Incorporated | Article de substrat modifié de dispositif et procédés de fabrication |
| US11167532B2 (en) | 2015-05-19 | 2021-11-09 | Corning Incorporated | Articles and methods for bonding sheets with carriers |
| KR102524620B1 (ko) | 2015-06-26 | 2023-04-21 | 코닝 인코포레이티드 | 시트 및 캐리어를 포함하는 방법들 및 물품들 |
| TW202216444A (zh) | 2016-08-30 | 2022-05-01 | 美商康寧公司 | 用於片材接合的矽氧烷電漿聚合物 |
| TWI810161B (zh) | 2016-08-31 | 2023-08-01 | 美商康寧公司 | 具以可控制式黏結的薄片之製品及製作其之方法 |
| KR102346393B1 (ko) * | 2017-06-19 | 2022-01-03 | 동우 화인켐 주식회사 | 터치센서를 포함하는 플렉시블 표시장치의 제조방법 |
| US11331692B2 (en) | 2017-12-15 | 2022-05-17 | Corning Incorporated | Methods for treating a substrate and method for making articles comprising bonded sheets |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4397722A (en) * | 1981-12-31 | 1983-08-09 | International Business Machines Corporation | Polymers from aromatic silanes and process for their preparation |
| US6124154A (en) * | 1996-10-22 | 2000-09-26 | Seiko Epson Corporation | Fabrication process for thin film transistors in a display or electronic device |
| US20050001201A1 (en) * | 2003-07-03 | 2005-01-06 | Bocko Peter L. | Glass product for use in ultra-thin glass display applications |
| US20050069713A1 (en) * | 2003-09-30 | 2005-03-31 | Rahul Gupta | Capillary coating method |
| CN101437772B (zh) * | 2006-05-08 | 2011-09-07 | 旭硝子株式会社 | 薄板玻璃叠层体、使用了薄板玻璃叠层体的显示装置的制造方法及支持用玻璃基板 |
| JP5111620B2 (ja) * | 2008-01-24 | 2013-01-09 | ブルーワー サイエンス アイ エヌ シー． | デバイスウェーハーをキャリヤー基板に逆に装着する方法 |
| KR20110007134A (ko) * | 2008-04-17 | 2011-01-21 | 아사히 가라스 가부시키가이샤 | 유리 적층체, 지지체를 부착한 표시 장치용 패널 및 이들의 제조 방법 |
| JP5029523B2 (ja) * | 2008-07-14 | 2012-09-19 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法 |
| TW201033000A (en) * | 2009-01-09 | 2010-09-16 | Asahi Glass Co Ltd | Glass laminate and manufacturing method therefor |
| JP5514302B2 (ja) * | 2009-05-06 | 2014-06-04 | コーニング インコーポレイテッド | ガラス基板用の担体 |
| US9847243B2 (en) * | 2009-08-27 | 2017-12-19 | Corning Incorporated | Debonding a glass substrate from carrier using ultrasonic wave |
| CN102576106B (zh) * | 2009-10-20 | 2015-02-11 | 旭硝子株式会社 | 玻璃层叠体及其制造方法、显示面板的制造方法及利用该制造方法获得的显示面板 |
| EP2532625B1 (fr) * | 2010-02-03 | 2019-01-02 | AGC Inc. | Procédé et dispositif de refroidissement graduel de plaque de verre |
| US20110250346A1 (en) * | 2010-04-07 | 2011-10-13 | Remington Jr Michael P | Adhesion of organic coatings on glass |
| EP2733127A4 (fr) * | 2011-07-12 | 2015-09-09 | Asahi Glass Co Ltd | Procédé de fabrication d'un substrat de verre portant un film en couches |
| WO2014151353A1 (fr) * | 2013-03-15 | 2014-09-25 | Corning Incorporated | Recuit en masse de feuilles de verre |
-
2014
- 2014-03-13 WO PCT/US2014/025537 patent/WO2014151353A1/fr active Application Filing
- 2014-03-13 CN CN201480027673.4A patent/CN105658594B/zh not_active Expired - Fee Related
- 2014-03-13 TW TW103109136A patent/TWI594960B/zh active
- 2014-03-13 TW TW106121917A patent/TWI679175B/zh not_active IP Right Cessation
- 2014-03-13 KR KR1020157029187A patent/KR102239613B1/ko active IP Right Grant
- 2014-03-13 EP EP14728700.7A patent/EP2969997A1/fr not_active Withdrawn
- 2014-03-13 JP JP2016501874A patent/JP6186493B2/ja not_active Expired - Fee Related
-
2017
- 2017-07-31 JP JP2017147681A patent/JP6434096B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2016516657A5 (fr) | ||
| JP2014146793A5 (fr) | ||
| TWI363082B (en) | Release process film | |
| JP2016507449A5 (fr) | ||
| JP2015501356A5 (fr) | ||
| JP6666340B2 (ja) | 共形にコーティングされた物品を形成するための真空積層方法及び同方法から形成された関連する共形にコーティングされた物品 | |
| TW201429708A (zh) | 玻璃及製造玻璃物品的方法 | |
| TW201517175A (zh) | 用於半導體與中介層處理之載具接合方法與物件 | |
| JP2018511909A5 (ja) | フレキシブルヒータのための積層物およびアセンブリ、フレキシブルヒータ、ならびに製造方法 | |
| JP2015025125A5 (fr) | ||
| TW200951197A (en) | Removable processing film | |
| TW201529298A (zh) | 用於玻璃片與載具的受控接合的玻璃物件及方法 | |
| JP2008294417A5 (fr) | ||
| JP2011091297A5 (fr) | ||
| JP2011235532A5 (fr) | ||
| TW201736292A (zh) | 玻璃片之大量退火 | |
| MY196760A (en) | Resin composition, resin layer, permanent adhesive, adhesive for temporary bonding, laminated film, processed wafer and method for manufacturing electronic component or semiconductor device | |
| JP2014129431A5 (fr) | ||
| JP2015518270A5 (fr) | ||
| JP2014189727A (ja) | 熱伝導性シート | |
| JPWO2016194094A1 (ja) | 粘着シート | |
| JP6261386B2 (ja) | 多層型熱伝導性シート、多層型熱伝導性シートの製造方法 | |
| KR101942967B1 (ko) | 실록산계 단량체를 이용한 접합 기판 구조체 및 그 제조방법 | |
| JP6126436B2 (ja) | 基材レスシリコーン両面テープ | |
| JP2015012009A5 (fr) |