JP2016147359A - 研削砥石 - Google Patents
研削砥石 Download PDFInfo
- Publication number
- JP2016147359A JP2016147359A JP2015026762A JP2015026762A JP2016147359A JP 2016147359 A JP2016147359 A JP 2016147359A JP 2015026762 A JP2015026762 A JP 2015026762A JP 2015026762 A JP2015026762 A JP 2015026762A JP 2016147359 A JP2016147359 A JP 2016147359A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- wafer
- average particle
- abrasive grains
- diamond abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims abstract description 42
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 39
- 239000010432 diamond Substances 0.000 claims abstract description 39
- 239000006061 abrasive grain Substances 0.000 claims abstract description 38
- 150000001639 boron compounds Chemical class 0.000 claims abstract description 29
- 235000012431 wafers Nutrition 0.000 description 80
- 238000000034 method Methods 0.000 description 21
- 238000004140 cleaning Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000017525 heat dissipation Effects 0.000 description 4
- 229910052580 B4C Inorganic materials 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
Abstract
【解決手段】ダイヤモンド砥粒と、ホウ素化合物を含み、被加工物であるウェーハWを研削する研削砥石37,47であって、ダイヤモンド砥粒の平均粒径Yは、0μm<Y≦50μmであり、平均粒径Xのホウ素化合物のダイヤモンド砥粒に対する平均粒径比Z(=X/Y)が0.8≦Z≦3.0である。この研削砥石において、前記ウェーハWはSiウェーハであり、前記平均粒径比Zが0.8≦Z≦2.0であることが好ましい。
【選択図】図1
Description
図1は、実施形態に係る研削砥石が装着された研削装置の構成例を示す図である。なお、同図におけるX軸方向は、研削装置10の幅方向であり、Y軸方向は研削装置10の奥行き方向であり、Z軸方向は鉛直方向である。
11 第一のカセット
12 第二のカセット
13 搬出入手段
15,16 搬送手段
17〜19 チャックテーブル
20 ターンテーブル
30,40 研削手段
37,47 研削砥石
Claims (2)
- ダイヤモンド砥粒と、ホウ素化合物を含み、被加工物を研削する研削砥石であって、
前記ダイヤモンド砥粒の平均粒径Xは、0μm<Y≦50μmであり、
前記ホウ素化合物の前記ダイヤモンド砥粒に対する平均粒径比Zが0.8≦Z≦3.0である、
ことを特徴とする研削砥石。 - 請求項1に記載の研削砥石において、前記被加工物は、Siウェーハであり、前記平均粒径比Zが0.8≦Z≦2.0である、
研削砥石。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015026762A JP2016147359A (ja) | 2015-02-13 | 2015-02-13 | 研削砥石 |
TW105100541A TW201642334A (zh) | 2015-02-13 | 2016-01-08 | 研磨砥石 |
SG10201600749RA SG10201600749RA (en) | 2015-02-13 | 2016-02-01 | Abrasive grindstone |
CN201610079740.8A CN105881247A (zh) | 2015-02-13 | 2016-02-04 | 磨削磨具 |
KR1020160014829A KR20160100245A (ko) | 2015-02-13 | 2016-02-05 | 연삭 지석 |
FR1651140A FR3032643B1 (fr) | 2015-02-13 | 2016-02-12 | Meule abrasive |
US15/042,556 US20160236325A1 (en) | 2015-02-13 | 2016-02-12 | Abrasive grindstone |
DE102016202162.1A DE102016202162A1 (de) | 2015-02-13 | 2016-02-12 | Schleifstein |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015026762A JP2016147359A (ja) | 2015-02-13 | 2015-02-13 | 研削砥石 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2016147359A true JP2016147359A (ja) | 2016-08-18 |
Family
ID=56552547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015026762A Pending JP2016147359A (ja) | 2015-02-13 | 2015-02-13 | 研削砥石 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20160236325A1 (ja) |
JP (1) | JP2016147359A (ja) |
KR (1) | KR20160100245A (ja) |
CN (1) | CN105881247A (ja) |
DE (1) | DE102016202162A1 (ja) |
FR (1) | FR3032643B1 (ja) |
SG (1) | SG10201600749RA (ja) |
TW (1) | TW201642334A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6564624B2 (ja) * | 2015-06-10 | 2019-08-21 | 株式会社ディスコ | 研削砥石 |
JP7216613B2 (ja) * | 2019-05-16 | 2023-02-01 | 株式会社ディスコ | 加工装置 |
JP2022096834A (ja) * | 2020-12-18 | 2022-06-30 | 株式会社ディスコ | 研削ホイール |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4212137A (en) * | 1978-07-20 | 1980-07-15 | Norton Company | Segmental grinding wheel and composite abrading segments therefor |
JPH07124866A (ja) * | 1993-10-27 | 1995-05-16 | Showa Highpolymer Co Ltd | 耐熱性樹脂結合砥石 |
JPH10296637A (ja) * | 1997-04-30 | 1998-11-10 | Osaka Diamond Ind Co Ltd | 超砥粒砥石 |
JPH11277440A (ja) * | 1998-03-31 | 1999-10-12 | Noritake Diamond Ind Co Ltd | 混合砥粒超砥粒砥石 |
JP2000094336A (ja) * | 1998-09-28 | 2000-04-04 | Seiko Epson Corp | 砥石および切断ブレード |
JP2000343438A (ja) * | 1999-06-01 | 2000-12-12 | Noritake Co Ltd | ビトリファイド砥石 |
JP2001009732A (ja) * | 1999-06-24 | 2001-01-16 | Noritake Co Ltd | ビトリファイドボンド砥石及びその製造方法 |
JP2004009195A (ja) * | 2002-06-05 | 2004-01-15 | Minebea Co Ltd | 超仕上用砥石 |
JP2012056013A (ja) * | 2010-09-08 | 2012-03-22 | Disco Corp | 研削ホイール |
JP2012200847A (ja) * | 2011-03-28 | 2012-10-22 | Noritake Co Ltd | ビトリファイド超砥粒砥石 |
JP2014217934A (ja) * | 2013-05-10 | 2014-11-20 | 株式会社ディスコ | 研削ホイール |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4220455A (en) * | 1978-10-24 | 1980-09-02 | General Electric Company | Polycrystalline diamond and/or cubic boron nitride body and process for making said body |
US4923490A (en) * | 1988-12-16 | 1990-05-08 | General Electric Company | Novel grinding wheels utilizing polycrystalline diamond or cubic boron nitride grit |
US6428587B1 (en) * | 2001-08-03 | 2002-08-06 | Noritake Co., Limited | Vitrified abrasive solid mass having pores filled with resin, and solid lubricant agent |
US20050210755A1 (en) * | 2003-09-05 | 2005-09-29 | Cho Hyun S | Doubled-sided and multi-layered PCBN and PCD abrasive articles |
CN101148037A (zh) * | 2007-11-07 | 2008-03-26 | 南京航空航天大学 | 具有自润滑功能的金属结合剂立方氮化硼砂轮的制作方法 |
CN103922747B (zh) * | 2014-04-30 | 2015-10-21 | 郑州磨料磨具磨削研究所有限公司 | 陶瓷结合剂超硬材料磨具注射成型料及注射成型方法 |
-
2015
- 2015-02-13 JP JP2015026762A patent/JP2016147359A/ja active Pending
-
2016
- 2016-01-08 TW TW105100541A patent/TW201642334A/zh unknown
- 2016-02-01 SG SG10201600749RA patent/SG10201600749RA/en unknown
- 2016-02-04 CN CN201610079740.8A patent/CN105881247A/zh active Pending
- 2016-02-05 KR KR1020160014829A patent/KR20160100245A/ko not_active Application Discontinuation
- 2016-02-12 US US15/042,556 patent/US20160236325A1/en not_active Abandoned
- 2016-02-12 DE DE102016202162.1A patent/DE102016202162A1/de active Pending
- 2016-02-12 FR FR1651140A patent/FR3032643B1/fr active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4212137A (en) * | 1978-07-20 | 1980-07-15 | Norton Company | Segmental grinding wheel and composite abrading segments therefor |
JPH07124866A (ja) * | 1993-10-27 | 1995-05-16 | Showa Highpolymer Co Ltd | 耐熱性樹脂結合砥石 |
JPH10296637A (ja) * | 1997-04-30 | 1998-11-10 | Osaka Diamond Ind Co Ltd | 超砥粒砥石 |
JPH11277440A (ja) * | 1998-03-31 | 1999-10-12 | Noritake Diamond Ind Co Ltd | 混合砥粒超砥粒砥石 |
JP2000094336A (ja) * | 1998-09-28 | 2000-04-04 | Seiko Epson Corp | 砥石および切断ブレード |
JP2000343438A (ja) * | 1999-06-01 | 2000-12-12 | Noritake Co Ltd | ビトリファイド砥石 |
JP2001009732A (ja) * | 1999-06-24 | 2001-01-16 | Noritake Co Ltd | ビトリファイドボンド砥石及びその製造方法 |
JP2004009195A (ja) * | 2002-06-05 | 2004-01-15 | Minebea Co Ltd | 超仕上用砥石 |
JP2012056013A (ja) * | 2010-09-08 | 2012-03-22 | Disco Corp | 研削ホイール |
JP2012200847A (ja) * | 2011-03-28 | 2012-10-22 | Noritake Co Ltd | ビトリファイド超砥粒砥石 |
JP2014217934A (ja) * | 2013-05-10 | 2014-11-20 | 株式会社ディスコ | 研削ホイール |
Also Published As
Publication number | Publication date |
---|---|
DE102016202162A1 (de) | 2016-08-18 |
FR3032643B1 (fr) | 2019-07-26 |
US20160236325A1 (en) | 2016-08-18 |
CN105881247A (zh) | 2016-08-24 |
TW201642334A (zh) | 2016-12-01 |
FR3032643A1 (fr) | 2016-08-19 |
KR20160100245A (ko) | 2016-08-23 |
SG10201600749RA (en) | 2016-09-29 |
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