DE102016202162A1 - Schleifstein - Google Patents

Schleifstein Download PDF

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Publication number
DE102016202162A1
DE102016202162A1 DE102016202162.1A DE102016202162A DE102016202162A1 DE 102016202162 A1 DE102016202162 A1 DE 102016202162A1 DE 102016202162 A DE102016202162 A DE 102016202162A DE 102016202162 A1 DE102016202162 A1 DE 102016202162A1
Authority
DE
Germany
Prior art keywords
grinding
wafer
abrasive grains
diamond abrasive
average grain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102016202162.1A
Other languages
German (de)
English (en)
Inventor
Ryuji Oshima
Ryogo Maji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of DE102016202162A1 publication Critical patent/DE102016202162A1/de
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
DE102016202162.1A 2015-02-13 2016-02-12 Schleifstein Pending DE102016202162A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015026762A JP2016147359A (ja) 2015-02-13 2015-02-13 研削砥石
JP2015-026762 2015-02-13

Publications (1)

Publication Number Publication Date
DE102016202162A1 true DE102016202162A1 (de) 2016-08-18

Family

ID=56552547

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102016202162.1A Pending DE102016202162A1 (de) 2015-02-13 2016-02-12 Schleifstein

Country Status (8)

Country Link
US (1) US20160236325A1 (ja)
JP (1) JP2016147359A (ja)
KR (1) KR20160100245A (ja)
CN (1) CN105881247A (ja)
DE (1) DE102016202162A1 (ja)
FR (1) FR3032643B1 (ja)
SG (1) SG10201600749RA (ja)
TW (1) TW201642334A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6564624B2 (ja) * 2015-06-10 2019-08-21 株式会社ディスコ 研削砥石
JP7216613B2 (ja) * 2019-05-16 2023-02-01 株式会社ディスコ 加工装置
JP2022096834A (ja) * 2020-12-18 2022-06-30 株式会社ディスコ 研削ホイール

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012056013A (ja) 2010-09-08 2012-03-22 Disco Corp 研削ホイール

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4212137A (en) * 1978-07-20 1980-07-15 Norton Company Segmental grinding wheel and composite abrading segments therefor
US4220455A (en) * 1978-10-24 1980-09-02 General Electric Company Polycrystalline diamond and/or cubic boron nitride body and process for making said body
US4923490A (en) * 1988-12-16 1990-05-08 General Electric Company Novel grinding wheels utilizing polycrystalline diamond or cubic boron nitride grit
JPH07124866A (ja) * 1993-10-27 1995-05-16 Showa Highpolymer Co Ltd 耐熱性樹脂結合砥石
JP3086667B2 (ja) * 1997-04-30 2000-09-11 大阪ダイヤモンド工業株式会社 超砥粒砥石
JPH11277440A (ja) * 1998-03-31 1999-10-12 Noritake Diamond Ind Co Ltd 混合砥粒超砥粒砥石
JP2000094336A (ja) * 1998-09-28 2000-04-04 Seiko Epson Corp 砥石および切断ブレード
JP3542520B2 (ja) * 1999-06-01 2004-07-14 株式会社ノリタケカンパニーリミテド ビトリファイド砥石
JP2001009732A (ja) * 1999-06-24 2001-01-16 Noritake Co Ltd ビトリファイドボンド砥石及びその製造方法
US6428587B1 (en) * 2001-08-03 2002-08-06 Noritake Co., Limited Vitrified abrasive solid mass having pores filled with resin, and solid lubricant agent
JP4116333B2 (ja) * 2002-06-05 2008-07-09 ミネベア株式会社 超仕上用砥石
US20050210755A1 (en) * 2003-09-05 2005-09-29 Cho Hyun S Doubled-sided and multi-layered PCBN and PCD abrasive articles
CN101148037A (zh) * 2007-11-07 2008-03-26 南京航空航天大学 具有自润滑功能的金属结合剂立方氮化硼砂轮的制作方法
JP2012200847A (ja) * 2011-03-28 2012-10-22 Noritake Co Ltd ビトリファイド超砥粒砥石
JP2014217934A (ja) * 2013-05-10 2014-11-20 株式会社ディスコ 研削ホイール
CN103922747B (zh) * 2014-04-30 2015-10-21 郑州磨料磨具磨削研究所有限公司 陶瓷结合剂超硬材料磨具注射成型料及注射成型方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012056013A (ja) 2010-09-08 2012-03-22 Disco Corp 研削ホイール

Also Published As

Publication number Publication date
TW201642334A (zh) 2016-12-01
FR3032643B1 (fr) 2019-07-26
FR3032643A1 (fr) 2016-08-19
JP2016147359A (ja) 2016-08-18
SG10201600749RA (en) 2016-09-29
US20160236325A1 (en) 2016-08-18
KR20160100245A (ko) 2016-08-23
CN105881247A (zh) 2016-08-24

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Legal Events

Date Code Title Description
R012 Request for examination validly filed