JP2016138935A - 固体撮像装置およびカメラ - Google Patents
固体撮像装置およびカメラ Download PDFInfo
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- H—ELECTRICITY
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
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- H—ELECTRICITY
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- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
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- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
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- H—ELECTRICITY
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- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
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- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/78—Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
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- Microelectronics & Electronic Packaging (AREA)
- Multimedia (AREA)
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- Solid State Image Pick-Up Elements (AREA)
- Focusing (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
【解決手段】固体撮像装置は、焦点検出のための複数の画素を有する。前記画素は、半導体基板に配置された光電変換部と、マイクロレンズと、前記半導体基板と前記マイクロレンズとの間に前記光電変換部の一部を覆うように配置された遮光部とを備え、前記画素における前記半導体基板の表面に平行で前記遮光部が配置された面は、前記遮光部の他に、第1開口部と、第2開口部とを含み、前記遮光部は、前記第1開口部と前記第2開口部との間に配置された遮光性の分離部を含む。
【選択図】図2
Description
図7(b)の123、124は、それぞれ、D1の角度領域における、A像、B像の重心位置(横軸:θx)を表している。125、126は、それぞれ、D2の角度領域における、A像、B像の重心位置(横軸:θx)を表している。また、図7(d)の127、128は、それぞれ、D1’の角度領域における、A像、B像の重心位置(横軸:θx)を表している。129、130は、それぞれ、D2’の角度領域における、A像、B像の重心位置(横軸:θx)を表している。
Claims (11)
- 焦点検出のための複数の画素を有する固体撮像装置であって、
前記画素は、半導体基板に配置された光電変換部と、マイクロレンズと、前記半導体基板と前記マイクロレンズとの間に前記光電変換部の一部を覆うように配置された遮光部とを備え、
前記画素における前記半導体基板の表面に平行で前記遮光部が配置された面は、前記遮光部の他に、第1開口部と、第2開口部とを含み、前記遮光部は、前記第1開口部と前記第2開口部との間に配置された遮光性の分離部を含む、
ことを特徴とする固体撮像装置。 - 前記第2開口部は、前記第1開口部の面積より大きい面積を有する、
ことを特徴とする請求項1に記載の固体撮像装置。 - 前記遮光部の面積は、前記第1開口部の面積より大きく、前記第2開口部の面積より小さい、
ことを特徴とする請求項1又は2に記載の固体撮像装置。 - 前記第1開口部と前記第2開口部との最短距離をd、前記マイクロレンズによって前記面に形成された集光スポットの幅をwとすると、w≦d≦3wが成り立つ、
ことを特徴とする請求項1又は2に記載の固体撮像装置。 - 前記マイクロレンズと前記半導体基板との間に配置された絶縁膜と、
前記絶縁膜と前記マイクロレンズとの間に配置されたカラーフィルタと、を更に備え、
前記遮光部は、前記絶縁膜の中に配置されている、
ことを特徴とする請求項1乃至4のいずれか1項に記載の固体撮像装置。 - 前記絶縁膜の中であって前記面と前記マイクロレンズとの間に配線層を更に備える、
ことを特徴とする請求項5に記載の固体撮像装置。 - 前記画素は、前記光電変換部で発生した電荷を転送するチャネルを形成する転送ゲートを更に備え、前記分離部は、前記転送ゲートの一部を覆うように配置されている、
ことを特徴とする請求項1乃至6のいずれか1項に記載の固体撮像装置。 - 前記第2開口部と前記遮光部との境界線と、前記チャネルの長さ方向とが直交する、
ことを特徴とする請求項7に記載の固体撮像装置。 - 前記複数の画素は、前記画素が配置された位置に応じて互いに異なる形状を有する前記遮光部を備える画素を含む、
ことを特徴とする請求項1乃至8のいずれか1項に記載の固体撮像装置。 - 前記第1開口部の中にコンタクトプラグが配置されている、
ことを特徴とする請求項1乃至8のいずれか1項に記載の固体撮像装置。 - 請求項1乃至7のいずれか1項に記載の固体撮像装置と、
前記固体撮像装置から出力される信号を処理する処理部と、
を備えることを特徴とするカメラ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2015012532A JP6518071B2 (ja) | 2015-01-26 | 2015-01-26 | 固体撮像装置およびカメラ |
EP16150024.4A EP3048645A1 (en) | 2015-01-26 | 2016-01-04 | Solid-state image sensor and camera |
US14/996,774 US9831278B2 (en) | 2015-01-26 | 2016-01-15 | Solid-state image sensor and camera with pixel openings |
CN201610040655.0A CN105828000B (zh) | 2015-01-26 | 2016-01-21 | 固态图像传感器和照相机 |
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JP2015012532A JP6518071B2 (ja) | 2015-01-26 | 2015-01-26 | 固体撮像装置およびカメラ |
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JP2016138935A true JP2016138935A (ja) | 2016-08-04 |
JP2016138935A5 JP2016138935A5 (ja) | 2018-03-01 |
JP6518071B2 JP6518071B2 (ja) | 2019-05-22 |
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US (1) | US9831278B2 (ja) |
EP (1) | EP3048645A1 (ja) |
JP (1) | JP6518071B2 (ja) |
CN (1) | CN105828000B (ja) |
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JP2018046336A (ja) * | 2016-09-12 | 2018-03-22 | キヤノン株式会社 | 撮像素子及び撮像装置 |
WO2018186329A1 (ja) * | 2017-04-06 | 2018-10-11 | パナソニックIpマネジメント株式会社 | 撮像装置、およびそれに用いられる固体撮像装置 |
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JP6732468B2 (ja) | 2016-02-16 | 2020-07-29 | キヤノン株式会社 | 光電変換装置及びその駆動方法 |
JP6738200B2 (ja) | 2016-05-26 | 2020-08-12 | キヤノン株式会社 | 撮像装置 |
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JP6518071B2 (ja) | 2019-05-22 |
US9831278B2 (en) | 2017-11-28 |
US20160218127A1 (en) | 2016-07-28 |
CN105828000A (zh) | 2016-08-03 |
EP3048645A1 (en) | 2016-07-27 |
CN105828000B (zh) | 2019-03-05 |
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