JP2016132590A - 単結晶製造装置 - Google Patents
単結晶製造装置 Download PDFInfo
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- JP2016132590A JP2016132590A JP2015007548A JP2015007548A JP2016132590A JP 2016132590 A JP2016132590 A JP 2016132590A JP 2015007548 A JP2015007548 A JP 2015007548A JP 2015007548 A JP2015007548 A JP 2015007548A JP 2016132590 A JP2016132590 A JP 2016132590A
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- Prior art keywords
- crucible
- chamber
- seed crystal
- support shaft
- base member
- Prior art date
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- 239000013078 crystal Substances 0.000 title claims abstract description 110
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000007789 sealing Methods 0.000 claims abstract description 27
- 230000003139 buffering effect Effects 0.000 claims description 26
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000002994 raw material Substances 0.000 description 12
- 229910010271 silicon carbide Inorganic materials 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229910018540 Si C Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B9/00—Single-crystal growth from melt solutions using molten solvents
- C30B9/04—Single-crystal growth from melt solutions using molten solvents by cooling of the solution
- C30B9/06—Single-crystal growth from melt solutions using molten solvents by cooling of the solution using as solvent a component of the crystal composition
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
〈1〉坩堝と、
前記坩堝の周囲を取り囲むヒータと、
前記坩堝の底部に連結される坩堝支持軸と、
前記坩堝に対向する種結晶支持軸と、
前記坩堝と前記ヒータが収納され、かつ前記ヒータの少なくとも一部が連結されるチャンバと、
前記チャンバを垂直方向に支持しつつ、水平方向に変位可能に、前記チャンバと連結される歪緩衝支持部材と、
前記坩堝支持軸及び前記種結晶支持軸が直接連結され、かつ前記チャンバが前記歪緩衝支持部材を介して連結される基部材と
を備え、
前記基部材の剛性は、前記歪緩衝支持部材の剛性よりも大きく、
前記チャンバは、貫通孔を有し、
前記坩堝支持軸と前記種結晶支持軸は、前記貫通孔に挿通され、かつ
前記坩堝支持軸と前記貫通孔との隙間、及び前記種結晶支持軸と前記貫通孔との隙間が密閉部材で封止されている、単結晶製造装置。
〈2〉前記坩堝支持軸が、坩堝回転軸と、前記坩堝回転軸の外周にベアリングを介して設置されるハウジング部材とを備える坩堝回転部である、〈1〉項に記載の装置。
〈3〉前記種結晶支持軸が、種結晶回転軸と、前記種結晶回転軸の外周にベアリングを介して設置されるハウジング部材とを備える種結晶回転部である、〈1〉項又は〈2〉項に記載の装置。
〈4〉前記密閉部材が、ベローズである、〈1〉〜〈3〉のいずれか1項に記載の装置。
12 種結晶
13 ヒータ
14 チャンバ
15a、15b 貫通孔
16 原料溶液
17a、17b、17c、17d 歪緩衝支持部材
18 第1基部材
31 種結晶回転軸
32、52 回転源
33a、33b、53a、53b ベアリング
34、54 ハウジング部材
35 第2基部材
36 ボールねじ
37 電気モータ
38、58 密閉部材
39 種結晶回転部(種結晶支持軸)
51 坩堝回転軸
55 第3基部材
59 坩堝回転部(坩堝支持軸)
61 第4基部材
71 基部材
100 単結晶製造装置
Claims (4)
- 坩堝と、
前記坩堝の周囲を取り囲むヒータと、
前記坩堝の底部に連結される坩堝支持軸と、
前記坩堝に対向する種結晶支持軸と、
前記坩堝と前記ヒータが収納され、かつ前記ヒータの少なくとも一部が連結されるチャンバと、
前記チャンバを垂直方向に支持しつつ、水平方向に変位可能に、前記チャンバと連結される歪緩衝支持部材と、
前記坩堝支持軸及び前記種結晶支持軸が直接連結され、かつ前記チャンバが前記歪緩衝支持部材を介して連結される基部材と
を備え、
前記基部材の剛性は、前記歪緩衝支持部材の剛性よりも大きく、
前記チャンバは、貫通孔を有し、
前記坩堝支持軸と前記種結晶支持軸は、前記貫通孔に挿通され、かつ
前記坩堝支持軸と前記貫通孔との隙間、及び前記種結晶支持軸と前記貫通孔との隙間が密閉部材で封止されている、単結晶製造装置。 - 前記坩堝支持軸が、坩堝回転軸と、前記坩堝回転軸の外周にベアリングを介して設置されるハウジング部材とを備える坩堝回転部である、請求項1に記載の装置。
- 前記種結晶支持軸が、種結晶回転軸と、前記種結晶回転軸の外周にベアリングを介して設置されるハウジング部材とを備える種結晶回転部である、請求項1又は2に記載の装置。
- 前記密閉部材が、ベローズである、請求項1〜3のいずれか1項に記載の装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015007548A JP6187486B2 (ja) | 2015-01-19 | 2015-01-19 | 単結晶製造装置 |
US15/000,883 US9982366B2 (en) | 2015-01-19 | 2016-01-19 | Single crystal production apparatus |
CN201610034404.1A CN105803530A (zh) | 2015-01-19 | 2016-01-19 | 单晶制造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015007548A JP6187486B2 (ja) | 2015-01-19 | 2015-01-19 | 単結晶製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016132590A true JP2016132590A (ja) | 2016-07-25 |
JP6187486B2 JP6187486B2 (ja) | 2017-08-30 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2015007548A Expired - Fee Related JP6187486B2 (ja) | 2015-01-19 | 2015-01-19 | 単結晶製造装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9982366B2 (ja) |
JP (1) | JP6187486B2 (ja) |
CN (1) | CN105803530A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6558394B2 (ja) * | 2017-04-26 | 2019-08-14 | トヨタ自動車株式会社 | SiC単結晶の製造方法及び製造装置 |
CN114717649B (zh) * | 2022-02-25 | 2023-03-24 | 连城凯克斯科技有限公司 | 上提拉开放式单晶炉 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03183689A (ja) * | 1989-12-11 | 1991-08-09 | Mitsubishi Materials Corp | 単結晶引上装置および引上方法 |
JPH03199194A (ja) * | 1989-12-28 | 1991-08-30 | Toshiba Ceramics Co Ltd | 半導体単結晶引上装置 |
JPH03275587A (ja) * | 1990-03-23 | 1991-12-06 | Toshiba Ceramics Co Ltd | 半導体単結晶引上装置 |
JPH06219887A (ja) * | 1993-01-29 | 1994-08-09 | Shin Etsu Handotai Co Ltd | 単結晶引上装置 |
JPH06219889A (ja) * | 1993-01-27 | 1994-08-09 | Komatsu Electron Metals Co Ltd | 半導体単結晶引き上げ装置 |
JPH11106281A (ja) * | 1997-09-30 | 1999-04-20 | Super Silicon Kenkyusho:Kk | 単結晶引上げ装置 |
JPH11199366A (ja) * | 1998-01-20 | 1999-07-27 | Mitsubishi Electric Corp | 単結晶シリコン引き上げ装置 |
US6358314B1 (en) * | 1996-01-25 | 2002-03-19 | Spx Corporation | Czochralski crystal growth system with an independently supported pull head |
JP2012082087A (ja) * | 2010-10-08 | 2012-04-26 | Sumitomo Metal Fine Technology Co Ltd | 単結晶引上装置および坩堝支持装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2678383B2 (ja) * | 1989-05-30 | 1997-11-17 | 信越半導体 株式会社 | 単結晶上装置 |
US5968267A (en) * | 1996-01-25 | 1999-10-19 | General Signal Technology Corporation | Antivibration support for Czochralski crystal growing systems |
TW370580B (en) | 1997-09-22 | 1999-09-21 | Super Silicon Crystal Res | Monocrystal pulling device |
JP5067410B2 (ja) | 2009-10-02 | 2012-11-07 | 信越半導体株式会社 | 単結晶製造装置 |
CN202164386U (zh) * | 2011-06-30 | 2012-03-14 | 白尔隽 | 超高纯锗单晶炉 |
CN103374753A (zh) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | 一种大尺寸蓝宝石晶体生长炉 |
CN203569234U (zh) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | 一种用于蓝宝石炉的籽晶旋转提拉机构 |
-
2015
- 2015-01-19 JP JP2015007548A patent/JP6187486B2/ja not_active Expired - Fee Related
-
2016
- 2016-01-19 US US15/000,883 patent/US9982366B2/en active Active
- 2016-01-19 CN CN201610034404.1A patent/CN105803530A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03183689A (ja) * | 1989-12-11 | 1991-08-09 | Mitsubishi Materials Corp | 単結晶引上装置および引上方法 |
JPH03199194A (ja) * | 1989-12-28 | 1991-08-30 | Toshiba Ceramics Co Ltd | 半導体単結晶引上装置 |
JPH03275587A (ja) * | 1990-03-23 | 1991-12-06 | Toshiba Ceramics Co Ltd | 半導体単結晶引上装置 |
JPH06219889A (ja) * | 1993-01-27 | 1994-08-09 | Komatsu Electron Metals Co Ltd | 半導体単結晶引き上げ装置 |
JPH06219887A (ja) * | 1993-01-29 | 1994-08-09 | Shin Etsu Handotai Co Ltd | 単結晶引上装置 |
US6358314B1 (en) * | 1996-01-25 | 2002-03-19 | Spx Corporation | Czochralski crystal growth system with an independently supported pull head |
JPH11106281A (ja) * | 1997-09-30 | 1999-04-20 | Super Silicon Kenkyusho:Kk | 単結晶引上げ装置 |
JPH11199366A (ja) * | 1998-01-20 | 1999-07-27 | Mitsubishi Electric Corp | 単結晶シリコン引き上げ装置 |
JP2012082087A (ja) * | 2010-10-08 | 2012-04-26 | Sumitomo Metal Fine Technology Co Ltd | 単結晶引上装置および坩堝支持装置 |
Also Published As
Publication number | Publication date |
---|---|
US9982366B2 (en) | 2018-05-29 |
JP6187486B2 (ja) | 2017-08-30 |
CN105803530A (zh) | 2016-07-27 |
US20160208410A1 (en) | 2016-07-21 |
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