JP2016119285A5 - - Google Patents

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Publication number
JP2016119285A5
JP2016119285A5 JP2015121649A JP2015121649A JP2016119285A5 JP 2016119285 A5 JP2016119285 A5 JP 2016119285A5 JP 2015121649 A JP2015121649 A JP 2015121649A JP 2015121649 A JP2015121649 A JP 2015121649A JP 2016119285 A5 JP2016119285 A5 JP 2016119285A5
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JP
Japan
Prior art keywords
cavity
metal layer
pattern
metal
regions
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Application number
JP2015121649A
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English (en)
Japanese (ja)
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JP2016119285A (ja
JP6581401B2 (ja
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Priority claimed from JP2015121649A external-priority patent/JP6581401B2/ja
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Publication of JP2016119285A5 publication Critical patent/JP2016119285A5/ja
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JP2015121649A 2015-06-17 2015-06-17 イオン及びオゾンの風を発生する装置 Active JP6581401B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015121649A JP6581401B2 (ja) 2015-06-17 2015-06-17 イオン及びオゾンの風を発生する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015121649A JP6581401B2 (ja) 2015-06-17 2015-06-17 イオン及びオゾンの風を発生する装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2014267192A Division JP5773231B1 (ja) 2014-12-18 2014-12-18 イオン及びオゾン風発生装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2016119285A JP2016119285A (ja) 2016-06-30
JP2016119285A5 true JP2016119285A5 (enExample) 2018-02-01
JP6581401B2 JP6581401B2 (ja) 2019-09-25

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ID=56244476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015121649A Active JP6581401B2 (ja) 2015-06-17 2015-06-17 イオン及びオゾンの風を発生する装置

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JP (1) JP6581401B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019225017A1 (ja) * 2018-05-25 2019-11-28 株式会社Ｍｉｒａｉ イオン及びオゾンの少なくともいずれか一方を発生する装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0635433Y2 (ja) * 1990-07-18 1994-09-14 木曜電機株式会社 イオン風発生装置
SE9003156L (sv) * 1990-10-03 1992-04-04 Astra Vent Ab Anordning foer alstring av en luftstroemning och rening av densamma
JP2006302852A (ja) * 2005-04-18 2006-11-02 Ishiyama Seisakusho:Kk 除電方式及び除電器
JP6043944B2 (ja) * 2011-04-06 2016-12-14 パナソニックＩｐマネジメント株式会社 活性種発生ユニットおよびこれを用いた活性種発生装置
US9386678B2 (en) * 2011-06-16 2016-07-05 Kyocera Corporation Plasma generator and plasma generating device
JP5461736B1 (ja) * 2013-05-13 2014-04-02 株式会社 片野工業 イオン・オゾン風発生装置及び方法

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