JP2016114905A - リソグラフィ用ペリクル容器。 - Google Patents
リソグラフィ用ペリクル容器。 Download PDFInfo
- Publication number
- JP2016114905A JP2016114905A JP2014255838A JP2014255838A JP2016114905A JP 2016114905 A JP2016114905 A JP 2016114905A JP 2014255838 A JP2014255838 A JP 2014255838A JP 2014255838 A JP2014255838 A JP 2014255838A JP 2016114905 A JP2016114905 A JP 2016114905A
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- container
- flat plate
- flatness
- lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001459 lithography Methods 0.000 title claims abstract description 11
- 239000012790 adhesive layer Substances 0.000 claims abstract description 9
- 239000010453 quartz Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 239000010410 layer Substances 0.000 description 11
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 10
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000000428 dust Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000001746 injection moulding Methods 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001083 polybutene Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
Abstract
Description
実施例1では、図2に示すように、外形サイズが200mm角のポリカーボネート製ペリクル容器1を射出成型によって製作した。また、その中央には、150×116mm、厚み6.35mmの石英製平板7を設置して、ペリクル載置部6とした。この石英製平板7の平坦度は7μmであった。
実施例2でも、実施例1と同様のポリカーボネート製ペリクル容器を使用し、その中央には、同寸法の平坦度が10μの石英製平板7を設置して、ペリクル載置部6とした。この石英製平板7にセパレータ5を貼った粘着剤層4を載置してペリクルを一定期間保管した。その後、このペリクル容器1からペリクルを取り出して、粘着剤層4の表面の平坦度の変化を測定したところ、12μmであった。また、このペリクルを粘着剤層を介してマスクに貼り付けたところ、マスクに変形歪みは殆ど見られなかった。
比較例1では、図4に示すように、外形サイズが200mm角のポリカーボネート製ペリクル容器1を射出成型によって製作した。また、その中央のペリクル載置部6の凹凸を測定したところ、図6に示すように、最大約80μmの凹凸があり、平坦度は悪かった。
2 ペリクル膜
3 ペリクルフレーム
4 粘着剤層
5 セパレータ
6 ペリクル載置部
7 石英製平板
Claims (2)
- ペリクルフレームと、該ペリクルフレームの一の面に張設されたペリクル膜と、前記ペリクルフレームの前記ペリクル膜張設面と対向する他の面に塗布された接着剤層とで構成されるペリクルを収納するリソグラフィ用ペリクル容器であって、前記ペリクルを載置するペリクル載置部を有し、該ペリクル載置部に平坦度が10μm以下の平板を設けたことを特徴とするリソグラフィ用ペリクル容器。
- 前記平板が石英製平板であることを特徴とする請求項1に記載のリソグラフィ用ペリクル容器
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014255838A JP6308676B2 (ja) | 2014-12-18 | 2014-12-18 | リソグラフィ用ペリクル容器。 |
EP15197003.5A EP3043207B1 (en) | 2014-12-18 | 2015-11-30 | A container for storing a pellicle for lithography |
KR1020150175721A KR102619269B1 (ko) | 2014-12-18 | 2015-12-10 | 리소그래피용 펠리클 용기 |
TW104141613A TWI585517B (zh) | 2014-12-18 | 2015-12-11 | Dustproof film module containers for microfilm for incorporating dustproof film modules |
US14/969,226 US10634991B2 (en) | 2014-12-18 | 2015-12-15 | Container for storing a pellicle for lithography |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014255838A JP6308676B2 (ja) | 2014-12-18 | 2014-12-18 | リソグラフィ用ペリクル容器。 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016114905A true JP2016114905A (ja) | 2016-06-23 |
JP6308676B2 JP6308676B2 (ja) | 2018-04-11 |
Family
ID=54707701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014255838A Active JP6308676B2 (ja) | 2014-12-18 | 2014-12-18 | リソグラフィ用ペリクル容器。 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10634991B2 (ja) |
EP (1) | EP3043207B1 (ja) |
JP (1) | JP6308676B2 (ja) |
KR (1) | KR102619269B1 (ja) |
TW (1) | TWI585517B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102172218B1 (ko) | 2018-07-31 | 2020-10-30 | 주식회사 시엠테크놀로지 | 펠리클 수납용기 |
KR102172221B1 (ko) | 2018-07-31 | 2020-10-30 | 주식회사 시엠테크놀로지 | Dlc 코팅층을 구비한 펠리클 수납용기 |
KR102172217B1 (ko) | 2018-07-31 | 2020-10-30 | 주식회사 시엠테크놀로지 | 펠리클 수납용기 및 이를 이용한 파티클 제거 방법 |
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2014
- 2014-12-18 JP JP2014255838A patent/JP6308676B2/ja active Active
-
2015
- 2015-11-30 EP EP15197003.5A patent/EP3043207B1/en active Active
- 2015-12-10 KR KR1020150175721A patent/KR102619269B1/ko active IP Right Grant
- 2015-12-11 TW TW104141613A patent/TWI585517B/zh active
- 2015-12-15 US US14/969,226 patent/US10634991B2/en active Active
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Also Published As
Publication number | Publication date |
---|---|
TW201632987A (zh) | 2016-09-16 |
KR102619269B1 (ko) | 2023-12-28 |
TWI585517B (zh) | 2017-06-01 |
KR20160074402A (ko) | 2016-06-28 |
US20160178998A1 (en) | 2016-06-23 |
US10634991B2 (en) | 2020-04-28 |
EP3043207B1 (en) | 2017-02-15 |
EP3043207A1 (en) | 2016-07-13 |
JP6308676B2 (ja) | 2018-04-11 |
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