JP2016085181A5 - - Google Patents

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Publication number
JP2016085181A5
JP2016085181A5 JP2014219774A JP2014219774A JP2016085181A5 JP 2016085181 A5 JP2016085181 A5 JP 2016085181A5 JP 2014219774 A JP2014219774 A JP 2014219774A JP 2014219774 A JP2014219774 A JP 2014219774A JP 2016085181 A5 JP2016085181 A5 JP 2016085181A5
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JP
Japan
Prior art keywords
detection
wiring
disposed
wiring layer
shield
Prior art date
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Application number
JP2014219774A
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English (en)
Japanese (ja)
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JP6488639B2 (ja
JP2016085181A (ja
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Application filed filed Critical
Priority to JP2014219774A priority Critical patent/JP6488639B2/ja
Priority claimed from JP2014219774A external-priority patent/JP6488639B2/ja
Priority to US14/886,591 priority patent/US9568313B2/en
Publication of JP2016085181A publication Critical patent/JP2016085181A/ja
Priority to US15/388,001 priority patent/US10302430B2/en
Publication of JP2016085181A5 publication Critical patent/JP2016085181A5/ja
Application granted granted Critical
Publication of JP6488639B2 publication Critical patent/JP6488639B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014219774A 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体 Active JP6488639B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014219774A JP6488639B2 (ja) 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体
US14/886,591 US9568313B2 (en) 2014-10-28 2015-10-19 Electronic device, electronic apparatus, and moving object
US15/388,001 US10302430B2 (en) 2014-10-28 2016-12-22 Electronic device, electronic apparatus, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014219774A JP6488639B2 (ja) 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016085181A JP2016085181A (ja) 2016-05-19
JP2016085181A5 true JP2016085181A5 (enExample) 2017-12-07
JP6488639B2 JP6488639B2 (ja) 2019-03-27

Family

ID=55972920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014219774A Active JP6488639B2 (ja) 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体

Country Status (1)

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JP (1) JP6488639B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6922325B2 (ja) * 2017-03-28 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005098359A1 (ja) * 2004-04-07 2005-10-20 Murata Manufacturing Co., Ltd. 角速度計測装置
FI119729B (fi) * 2005-11-23 2009-02-27 Vti Technologies Oy Menetelmä mikroelektromekaanisen komponentin valmistamiseksi ja mikroelektromekaaninen komponentti
JP5810500B2 (ja) * 2010-09-30 2015-11-11 セイコーエプソン株式会社 センサーデバイス、モーションセンサー、電子機器
JP2012198099A (ja) * 2011-03-22 2012-10-18 Seiko Epson Corp 慣性センサー

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