JP2016085178A5 - - Google Patents

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Publication number
JP2016085178A5
JP2016085178A5 JP2014219771A JP2014219771A JP2016085178A5 JP 2016085178 A5 JP2016085178 A5 JP 2016085178A5 JP 2014219771 A JP2014219771 A JP 2014219771A JP 2014219771 A JP2014219771 A JP 2014219771A JP 2016085178 A5 JP2016085178 A5 JP 2016085178A5
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JP
Japan
Prior art keywords
physical quantity
element according
constant potential
detection
quantity detection
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JP2014219771A
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English (en)
Japanese (ja)
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JP2016085178A (ja
JP6464662B2 (ja
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Priority to JP2014219771A priority Critical patent/JP6464662B2/ja
Priority claimed from JP2014219771A external-priority patent/JP6464662B2/ja
Priority to US14/886,681 priority patent/US10295346B2/en
Publication of JP2016085178A publication Critical patent/JP2016085178A/ja
Publication of JP2016085178A5 publication Critical patent/JP2016085178A5/ja
Application granted granted Critical
Publication of JP6464662B2 publication Critical patent/JP6464662B2/ja
Priority to US16/378,967 priority patent/US10520312B2/en
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JP2014219771A 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体 Active JP6464662B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014219771A JP6464662B2 (ja) 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体
US14/886,681 US10295346B2 (en) 2014-10-28 2015-10-19 Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
US16/378,967 US10520312B2 (en) 2014-10-28 2019-04-09 Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014219771A JP6464662B2 (ja) 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016085178A JP2016085178A (ja) 2016-05-19
JP2016085178A5 true JP2016085178A5 (enExample) 2017-12-14
JP6464662B2 JP6464662B2 (ja) 2019-02-06

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JP2014219771A Active JP6464662B2 (ja) 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体

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JP (1) JP6464662B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6957921B2 (ja) 2017-03-23 2021-11-02 セイコーエプソン株式会社 振動デバイス、角速度センサー、電子機器および移動体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2851040B1 (fr) * 2003-02-06 2005-03-18 Sagem Resonateur hemispherique a electrode de garde divisee
JP2013181856A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器

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