JP2016085182A5 - - Google Patents

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Publication number
JP2016085182A5
JP2016085182A5 JP2014219775A JP2014219775A JP2016085182A5 JP 2016085182 A5 JP2016085182 A5 JP 2016085182A5 JP 2014219775 A JP2014219775 A JP 2014219775A JP 2014219775 A JP2014219775 A JP 2014219775A JP 2016085182 A5 JP2016085182 A5 JP 2016085182A5
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JP
Japan
Prior art keywords
detection
disposed
wiring
vibration
ground
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014219775A
Other languages
English (en)
Japanese (ja)
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JP6488640B2 (ja
JP2016085182A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014219775A priority Critical patent/JP6488640B2/ja
Priority claimed from JP2014219775A external-priority patent/JP6488640B2/ja
Priority to US14/886,591 priority patent/US9568313B2/en
Publication of JP2016085182A publication Critical patent/JP2016085182A/ja
Priority to US15/388,001 priority patent/US10302430B2/en
Publication of JP2016085182A5 publication Critical patent/JP2016085182A5/ja
Application granted granted Critical
Publication of JP6488640B2 publication Critical patent/JP6488640B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014219775A 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体 Active JP6488640B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014219775A JP6488640B2 (ja) 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体
US14/886,591 US9568313B2 (en) 2014-10-28 2015-10-19 Electronic device, electronic apparatus, and moving object
US15/388,001 US10302430B2 (en) 2014-10-28 2016-12-22 Electronic device, electronic apparatus, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014219775A JP6488640B2 (ja) 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016085182A JP2016085182A (ja) 2016-05-19
JP2016085182A5 true JP2016085182A5 (enExample) 2017-12-14
JP6488640B2 JP6488640B2 (ja) 2019-03-27

Family

ID=55972915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014219775A Active JP6488640B2 (ja) 2014-10-28 2014-10-28 電子デバイス、電子機器および移動体

Country Status (1)

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JP (1) JP6488640B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7251383B2 (ja) * 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005098359A1 (ja) * 2004-04-07 2005-10-20 Murata Manufacturing Co., Ltd. 角速度計測装置
FI119729B (fi) * 2005-11-23 2009-02-27 Vti Technologies Oy Menetelmä mikroelektromekaanisen komponentin valmistamiseksi ja mikroelektromekaaninen komponentti
JP2012198099A (ja) * 2011-03-22 2012-10-18 Seiko Epson Corp 慣性センサー
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体

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