JP2012198098A5 - - Google Patents

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Publication number
JP2012198098A5
JP2012198098A5 JP2011062267A JP2011062267A JP2012198098A5 JP 2012198098 A5 JP2012198098 A5 JP 2012198098A5 JP 2011062267 A JP2011062267 A JP 2011062267A JP 2011062267 A JP2011062267 A JP 2011062267A JP 2012198098 A5 JP2012198098 A5 JP 2012198098A5
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JP
Japan
Prior art keywords
semiconductor substrate
sensor element
overlap
viewed
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011062267A
Other languages
English (en)
Japanese (ja)
Other versions
JP5729551B2 (ja
JP2012198098A (ja
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Publication date
Application filed filed Critical
Priority to JP2011062267A priority Critical patent/JP5729551B2/ja
Priority claimed from JP2011062267A external-priority patent/JP5729551B2/ja
Publication of JP2012198098A publication Critical patent/JP2012198098A/ja
Publication of JP2012198098A5 publication Critical patent/JP2012198098A5/ja
Application granted granted Critical
Publication of JP5729551B2 publication Critical patent/JP5729551B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011062267A 2011-03-22 2011-03-22 慣性センサー Active JP5729551B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011062267A JP5729551B2 (ja) 2011-03-22 2011-03-22 慣性センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011062267A JP5729551B2 (ja) 2011-03-22 2011-03-22 慣性センサー

Publications (3)

Publication Number Publication Date
JP2012198098A JP2012198098A (ja) 2012-10-18
JP2012198098A5 true JP2012198098A5 (enExample) 2014-04-03
JP5729551B2 JP5729551B2 (ja) 2015-06-03

Family

ID=47180475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011062267A Active JP5729551B2 (ja) 2011-03-22 2011-03-22 慣性センサー

Country Status (1)

Country Link
JP (1) JP5729551B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2958393B2 (ja) 1993-10-06 1999-10-06 富士ゼロックス株式会社 高分子導電・抵抗体およびその製造方法
JP6957921B2 (ja) 2017-03-23 2021-11-02 セイコーエプソン株式会社 振動デバイス、角速度センサー、電子機器および移動体
JP7013991B2 (ja) * 2018-03-26 2022-02-01 セイコーエプソン株式会社 センサーユニット、移動体測位装置、携帯型電子機器、電子機器、移動体および表示装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0824218B2 (ja) * 1990-03-05 1996-03-06 株式会社ユニシアジェックス 配線基板
JPH07162123A (ja) * 1993-12-03 1995-06-23 Matsushita Electric Ind Co Ltd 回路モジュール
JPH11325908A (ja) * 1998-05-13 1999-11-26 Toyota Motor Corp 圧電式角速度センサ
JP4484548B2 (ja) * 2004-03-08 2010-06-16 株式会社リコー 半導体装置
JP2006078249A (ja) * 2004-09-08 2006-03-23 Denso Corp 容量型半導体センサ
JP2008014633A (ja) * 2006-06-07 2008-01-24 Sony Corp 振動型ジャイロセンサ
JP2008008733A (ja) * 2006-06-29 2008-01-17 Epson Toyocom Corp 角速度センサ
JP5186774B2 (ja) * 2007-02-15 2013-04-24 セイコーエプソン株式会社 電荷検出型センサおよびそれに用いるパッケージ容器
JP2008218744A (ja) * 2007-03-05 2008-09-18 Denso Corp 半導体装置の製造方法
JP2011017580A (ja) * 2009-07-08 2011-01-27 Seiko Epson Corp 物理量検出装置
JP5682361B2 (ja) * 2011-02-17 2015-03-11 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、モーションセンサー、および電子機器

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