JP2011247768A5 - - Google Patents

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Publication number
JP2011247768A5
JP2011247768A5 JP2010121727A JP2010121727A JP2011247768A5 JP 2011247768 A5 JP2011247768 A5 JP 2011247768A5 JP 2010121727 A JP2010121727 A JP 2010121727A JP 2010121727 A JP2010121727 A JP 2010121727A JP 2011247768 A5 JP2011247768 A5 JP 2011247768A5
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JP
Japan
Prior art keywords
substrate
region
element structure
structure according
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010121727A
Other languages
English (en)
Japanese (ja)
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JP2011247768A (ja
JP5527017B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010121727A priority Critical patent/JP5527017B2/ja
Priority claimed from JP2010121727A external-priority patent/JP5527017B2/ja
Priority to US13/115,632 priority patent/US20110291208A1/en
Priority to CN2011101390881A priority patent/CN102331514A/zh
Publication of JP2011247768A publication Critical patent/JP2011247768A/ja
Publication of JP2011247768A5 publication Critical patent/JP2011247768A5/ja
Application granted granted Critical
Publication of JP5527017B2 publication Critical patent/JP5527017B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010121727A 2010-05-27 2010-05-27 素子構造体、慣性センサーおよび電子機器 Expired - Fee Related JP5527017B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010121727A JP5527017B2 (ja) 2010-05-27 2010-05-27 素子構造体、慣性センサーおよび電子機器
US13/115,632 US20110291208A1 (en) 2010-05-27 2011-05-25 Element structure, inertia sensor, and electronic device
CN2011101390881A CN102331514A (zh) 2010-05-27 2011-05-26 元件结构体、惯性传感器以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010121727A JP5527017B2 (ja) 2010-05-27 2010-05-27 素子構造体、慣性センサーおよび電子機器

Publications (3)

Publication Number Publication Date
JP2011247768A JP2011247768A (ja) 2011-12-08
JP2011247768A5 true JP2011247768A5 (enExample) 2013-06-27
JP5527017B2 JP5527017B2 (ja) 2014-06-18

Family

ID=45021384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010121727A Expired - Fee Related JP5527017B2 (ja) 2010-05-27 2010-05-27 素子構造体、慣性センサーおよび電子機器

Country Status (3)

Country Link
US (1) US20110291208A1 (enExample)
JP (1) JP5527017B2 (enExample)
CN (1) CN102331514A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250133A (ja) * 2012-05-31 2013-12-12 Seiko Epson Corp 電子デバイス及びその製造方法、並びに電子機器
US9505607B2 (en) * 2015-03-27 2016-11-29 Intel Corporation Methods of forming sensor integrated packages and structures formed thereby
WO2017061635A1 (ko) * 2015-10-06 2017-04-13 주식회사 스탠딩에그 Mems 장치 및 그 제조 방법
TWI599764B (zh) * 2015-10-19 2017-09-21 國立清華大學 多階感測元件
JP6594527B2 (ja) * 2016-04-21 2019-10-23 富士フイルム株式会社 複合センサ
JP6816603B2 (ja) * 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
US10643006B2 (en) * 2017-06-14 2020-05-05 International Business Machines Corporation Semiconductor chip including integrated security circuit
CN109946482A (zh) * 2019-04-02 2019-06-28 四川知微传感技术有限公司 一种高信噪比的三明治式微加速度计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5092174A (en) * 1989-10-19 1992-03-03 Texas Instruments Incorporated Capacitance accelerometer
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
JP2006078444A (ja) * 2004-09-13 2006-03-23 Hosiden Corp 加速度センサ
JP5117716B2 (ja) * 2006-02-14 2013-01-16 セイコーインスツル株式会社 力学量センサ

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