JP2016058507A - 裏面入射型固体撮像装置 - Google Patents
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- H01L27/144—Devices controlled by radiation
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- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/63—Control of cameras or camera modules by using electronic viewfinders
- H04N23/631—Graphical user interfaces [GUI] specially adapted for controlling image capture or setting capture parameters
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Abstract
【解決手段】裏面入射型固体撮像装置SIは、裏面側に光入射面を有すると共に、光入射に応じて電荷が発生する受光部13を有する半導体基板1と、半導体基板1の光入射面とは反対側の光検出面7側に設けられているシフトレジスタ19と、半導体基板1の光検出面7側に設けられている遮光膜57と、を備えている。遮光膜57は、光検出面7に対向する凹凸面57aを有している。
【選択図】図4
Description
Claims (8)
- 裏面入射型固体撮像装置であって、
裏面側に光入射面を有すると共に、光入射に応じて電荷が発生する受光部を有する半導体基板と、
前記半導体基板の前記光入射面とは反対側の光検出面側に設けられている電荷転送部と、
前記半導体基板の前記光検出面側に設けられている遮光膜と、を備え、
前記遮光膜は、前記光検出面に対向する凹凸面を有している、裏面入射型固体撮像装置。 - 前記半導体基板と前記遮光膜との間に位置し、前記遮光膜が設けられる絶縁膜を更に備え、
前記絶縁膜には、凹凸が形成されており、
前記遮光膜の前記凹凸面は、前記絶縁膜に形成されている前記凹凸に対応している、請求項1に記載の裏面入射型固体撮像装置。 - 前記絶縁膜内に位置し、前記光検出面に沿うように並んで配置されている複数の導体を更に備え、
前記絶縁膜の前記凹凸が、前記複数の導体に対応して形成されている、請求項2に記載の裏面入射型固体撮像装置。 - 前記遮光膜は、導電性金属材料からなり、
前記複数の導体のうち、所定の信号が入力される導体以外の導体は、前記遮光膜と電気的に接続されている、請求項3に記載の裏面入射型固体撮像装置。 - 前記複数の導体は、それぞれの端部が重なるように交互に配置されている複数の第一及び第二導体を含み、
前記絶縁膜の前記凹凸は、前記第一導体と前記第二導体との段差に対応して形成されている、請求項3又は4に記載の裏面入射型固体撮像装置。 - 前記受光部は、複数の画素を含み、
前記絶縁膜は、少なくとも前記複数の画素毎で離間するように形成されており、
前記遮光膜は、前記絶縁膜における離間している部分の間にも設けられている、請求項2に記載の裏面入射型固体撮像装置。 - 前記受光部は、第一方向に並んで配置されている複数の光感応領域を有し、
前記半導体基板の前記光検出面側には、前記第一方向に交差する第二方向に沿って高くされた電位勾配を各前記光感応領域に対して形成する複数の電位勾配形成部が設けられ、
前記電荷転送部は、前記複数の光感応領域から取得した電荷を前記第一方向に転送し、
前記遮光膜は、前記複数の電位勾配形成部及び前記電荷転送部を覆うように設けられている、請求項1〜6のいずれか一項に記載の裏面入射型固体撮像装置。 - 各前記光感応領域の平面形状は、前記第二方向を長辺方向とする矩形状であり、
前記遮光膜の前記凹凸面は、前記第二方向に沿って凹凸が繰り返して連続する面である、請求項7に記載の裏面入射型固体撮像装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014182973A JP6306989B2 (ja) | 2014-09-09 | 2014-09-09 | 裏面入射型固体撮像装置 |
EP15839949.3A EP3193367B1 (en) | 2014-09-09 | 2015-08-04 | Backside illuminated solid-state image pickup device |
CN201580048212.XA CN107078136B (zh) | 2014-09-09 | 2015-08-04 | 背面入射型固体摄像装置 |
PCT/JP2015/072096 WO2016039046A1 (ja) | 2014-09-09 | 2015-08-04 | 裏面入射型固体撮像装置 |
KR1020177009095A KR102388174B1 (ko) | 2014-09-09 | 2015-08-04 | 이면 입사형 고체 촬상 장치 |
US15/505,993 US10811459B2 (en) | 2014-09-09 | 2015-08-04 | Backside incidence type solid-state image pickup device |
TW104129183A TWI715538B (zh) | 2014-09-09 | 2015-09-03 | 背面入射型固體攝像裝置 |
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JP2014182973A JP6306989B2 (ja) | 2014-09-09 | 2014-09-09 | 裏面入射型固体撮像装置 |
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JP2016058507A true JP2016058507A (ja) | 2016-04-21 |
JP6306989B2 JP6306989B2 (ja) | 2018-04-04 |
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US (1) | US10811459B2 (ja) |
EP (1) | EP3193367B1 (ja) |
JP (1) | JP6306989B2 (ja) |
KR (1) | KR102388174B1 (ja) |
CN (1) | CN107078136B (ja) |
TW (1) | TWI715538B (ja) |
WO (1) | WO2016039046A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2018154627A1 (ja) | 2017-02-21 | 2018-08-30 | 株式会社島津製作所 | 固体光検出器 |
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- 2014-09-09 JP JP2014182973A patent/JP6306989B2/ja active Active
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2015
- 2015-08-04 US US15/505,993 patent/US10811459B2/en active Active
- 2015-08-04 EP EP15839949.3A patent/EP3193367B1/en active Active
- 2015-08-04 CN CN201580048212.XA patent/CN107078136B/zh active Active
- 2015-08-04 WO PCT/JP2015/072096 patent/WO2016039046A1/ja active Application Filing
- 2015-08-04 KR KR1020177009095A patent/KR102388174B1/ko active IP Right Grant
- 2015-09-03 TW TW104129183A patent/TWI715538B/zh active
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JP2004022560A (ja) * | 2002-06-12 | 2004-01-22 | Sony Corp | 電荷転送素子及び固体撮像装置、並びにこれらの動作方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2018154627A1 (ja) | 2017-02-21 | 2018-08-30 | 株式会社島津製作所 | 固体光検出器 |
KR20190099075A (ko) | 2017-02-21 | 2019-08-23 | 가부시키가이샤 시마즈세이사쿠쇼 | 고체 광 검출기 |
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US20170301722A1 (en) | 2017-10-19 |
KR20170049567A (ko) | 2017-05-10 |
EP3193367B1 (en) | 2021-08-04 |
TW201614822A (en) | 2016-04-16 |
US10811459B2 (en) | 2020-10-20 |
WO2016039046A1 (ja) | 2016-03-17 |
EP3193367A1 (en) | 2017-07-19 |
EP3193367A4 (en) | 2018-05-02 |
CN107078136A (zh) | 2017-08-18 |
KR102388174B1 (ko) | 2022-04-19 |
TWI715538B (zh) | 2021-01-11 |
CN107078136B (zh) | 2021-06-11 |
JP6306989B2 (ja) | 2018-04-04 |
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