JP2016042041A5 - - Google Patents

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Publication number
JP2016042041A5
JP2016042041A5 JP2014165430A JP2014165430A JP2016042041A5 JP 2016042041 A5 JP2016042041 A5 JP 2016042041A5 JP 2014165430 A JP2014165430 A JP 2014165430A JP 2014165430 A JP2014165430 A JP 2014165430A JP 2016042041 A5 JP2016042041 A5 JP 2016042041A5
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JP
Japan
Prior art keywords
physical quantity
quantity sensor
capacitance
capacitance forming
fixed electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014165430A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016042041A (ja
JP6413462B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014165430A priority Critical patent/JP6413462B2/ja
Priority claimed from JP2014165430A external-priority patent/JP6413462B2/ja
Priority to US14/822,008 priority patent/US10073114B2/en
Priority to CN201510497799.4A priority patent/CN105372452B/zh
Publication of JP2016042041A publication Critical patent/JP2016042041A/ja
Publication of JP2016042041A5 publication Critical patent/JP2016042041A5/ja
Application granted granted Critical
Publication of JP6413462B2 publication Critical patent/JP6413462B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014165430A 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体 Expired - Fee Related JP6413462B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014165430A JP6413462B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体
US14/822,008 US10073114B2 (en) 2014-08-15 2015-08-10 Physical quantity sensor, physical quantity sensor apparatus, electronic device, and mobile body
CN201510497799.4A CN105372452B (zh) 2014-08-15 2015-08-13 物理量传感器、物理量传感器装置、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014165430A JP6413462B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016042041A JP2016042041A (ja) 2016-03-31
JP2016042041A5 true JP2016042041A5 (enExample) 2017-09-21
JP6413462B2 JP6413462B2 (ja) 2018-10-31

Family

ID=55302007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014165430A Expired - Fee Related JP6413462B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体

Country Status (3)

Country Link
US (1) US10073114B2 (enExample)
JP (1) JP6413462B2 (enExample)
CN (1) CN105372452B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6485260B2 (ja) * 2015-07-10 2019-03-20 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
DE102016209732B4 (de) 2016-06-02 2025-02-06 Robert Bosch Gmbh Mikromechanisches Bauelement
JP6866624B2 (ja) * 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP2023123155A (ja) * 2022-02-24 2023-09-05 新東工業株式会社 力覚センサ及び力覚センサの製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4178574B2 (ja) * 1998-02-02 2008-11-12 株式会社デンソー 半導体力学量センサ及びその製造方法
JP2000074939A (ja) * 1998-08-28 2000-03-14 Denso Corp 容量式加速度センサ
CN1139815C (zh) * 2002-01-29 2004-02-25 清华大学 梳齿式体硅加工微机械加速度计
JP2005038911A (ja) * 2003-07-16 2005-02-10 Mitsubishi Electric Corp 半導体装置
FR2858854B1 (fr) * 2003-08-13 2005-12-16 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par rappel ameliore
KR100513346B1 (ko) * 2003-12-20 2005-09-07 삼성전기주식회사 보정전극을 갖는 정전용량형 가속도계
KR100501201B1 (ko) * 2003-12-23 2005-07-18 삼성전기주식회사 Ｍｅｍｓ 구조의 정전 용량 보정기를 갖는 차동형커패시티브 타입 ｍｅｍｓ 센서 장치
JP4595862B2 (ja) * 2006-03-28 2010-12-08 パナソニック電工株式会社 静電容量式センサ
JP5556806B2 (ja) 2009-03-10 2014-07-23 パナソニック株式会社 角速度センサ
US8096179B2 (en) 2009-04-09 2012-01-17 Freescale Semiconductor, Inc. Sensor device with reduced parasitic-induced error
JP5790297B2 (ja) * 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
JP6035733B2 (ja) * 2011-12-19 2016-11-30 セイコーエプソン株式会社 物理量センサーの製造方法
JP6020793B2 (ja) * 2012-04-02 2016-11-02 セイコーエプソン株式会社 物理量センサーおよび電子機器

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