CN105372452B - 物理量传感器、物理量传感器装置、电子设备以及移动体 - Google Patents
物理量传感器、物理量传感器装置、电子设备以及移动体 Download PDFInfo
- Publication number
- CN105372452B CN105372452B CN201510497799.4A CN201510497799A CN105372452B CN 105372452 B CN105372452 B CN 105372452B CN 201510497799 A CN201510497799 A CN 201510497799A CN 105372452 B CN105372452 B CN 105372452B
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- CN
- China
- Prior art keywords
- physical quantity
- electrostatic capacitance
- fixed electrode
- quantity sensor
- forming portion
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- Expired - Fee Related
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-165430 | 2014-08-15 | ||
| JP2014165430A JP6413462B2 (ja) | 2014-08-15 | 2014-08-15 | 物理量センサー、物理量センサー装置、電子機器および移動体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105372452A CN105372452A (zh) | 2016-03-02 |
| CN105372452B true CN105372452B (zh) | 2019-09-20 |
Family
ID=55302007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510497799.4A Expired - Fee Related CN105372452B (zh) | 2014-08-15 | 2015-08-13 | 物理量传感器、物理量传感器装置、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10073114B2 (enExample) |
| JP (1) | JP6413462B2 (enExample) |
| CN (1) | CN105372452B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6485260B2 (ja) * | 2015-07-10 | 2019-03-20 | セイコーエプソン株式会社 | 物理量センサー、物理量センサー装置、電子機器および移動体 |
| DE102016209732B4 (de) | 2016-06-02 | 2025-02-06 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| JP6866624B2 (ja) * | 2016-12-07 | 2021-04-28 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、電子機器および移動体 |
| JP2023123155A (ja) * | 2022-02-24 | 2023-09-05 | 新東工業株式会社 | 力覚センサ及び力覚センサの製造方法 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000074939A (ja) * | 1998-08-28 | 2000-03-14 | Denso Corp | 容量式加速度センサ |
| CN1359007A (zh) * | 2002-01-29 | 2002-07-17 | 清华大学 | 梳齿式体硅加工微机械加速度计 |
| CN1576853A (zh) * | 2003-07-16 | 2005-02-09 | 三菱电机株式会社 | 半导体器件 |
| CN1842710A (zh) * | 2003-08-13 | 2006-10-04 | 舍塞尔公司 | 由于改进的回归移动而具有减少的额外振动的加速度计 |
| CN100362350C (zh) * | 2003-12-20 | 2008-01-16 | 三星电机株式会社 | 具有补偿电极的电容加速度计 |
| CN102954806A (zh) * | 2011-08-17 | 2013-03-06 | 精工爱普生株式会社 | 物理量传感器及电子设备 |
| JP2013127436A (ja) * | 2011-12-19 | 2013-06-27 | Seiko Epson Corp | 物理量センサー、物理量センサーの製造方法および電子機器 |
| CN103364586A (zh) * | 2012-04-02 | 2013-10-23 | 精工爱普生株式会社 | 物理量传感器以及电子设备 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4178574B2 (ja) * | 1998-02-02 | 2008-11-12 | 株式会社デンソー | 半導体力学量センサ及びその製造方法 |
| KR100501201B1 (ko) * | 2003-12-23 | 2005-07-18 | 삼성전기주식회사 | Ｍｅｍｓ 구조의 정전 용량 보정기를 갖는 차동형커패시티브 타입 ｍｅｍｓ 센서 장치 |
| JP4595862B2 (ja) * | 2006-03-28 | 2010-12-08 | パナソニック電工株式会社 | 静電容量式センサ |
| JP5556806B2 (ja) | 2009-03-10 | 2014-07-23 | パナソニック株式会社 | 角速度センサ |
| US8096179B2 (en) | 2009-04-09 | 2012-01-17 | Freescale Semiconductor, Inc. | Sensor device with reduced parasitic-induced error |
-
2014
- 2014-08-15 JP JP2014165430A patent/JP6413462B2/ja not_active Expired - Fee Related
-
2015
- 2015-08-10 US US14/822,008 patent/US10073114B2/en not_active Expired - Fee Related
- 2015-08-13 CN CN201510497799.4A patent/CN105372452B/zh not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000074939A (ja) * | 1998-08-28 | 2000-03-14 | Denso Corp | 容量式加速度センサ |
| CN1359007A (zh) * | 2002-01-29 | 2002-07-17 | 清华大学 | 梳齿式体硅加工微机械加速度计 |
| CN1576853A (zh) * | 2003-07-16 | 2005-02-09 | 三菱电机株式会社 | 半导体器件 |
| CN1842710A (zh) * | 2003-08-13 | 2006-10-04 | 舍塞尔公司 | 由于改进的回归移动而具有减少的额外振动的加速度计 |
| CN100362350C (zh) * | 2003-12-20 | 2008-01-16 | 三星电机株式会社 | 具有补偿电极的电容加速度计 |
| CN102954806A (zh) * | 2011-08-17 | 2013-03-06 | 精工爱普生株式会社 | 物理量传感器及电子设备 |
| JP2013127436A (ja) * | 2011-12-19 | 2013-06-27 | Seiko Epson Corp | 物理量センサー、物理量センサーの製造方法および電子機器 |
| CN103364586A (zh) * | 2012-04-02 | 2013-10-23 | 精工爱普生株式会社 | 物理量传感器以及电子设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6413462B2 (ja) | 2018-10-31 |
| US10073114B2 (en) | 2018-09-11 |
| JP2016042041A (ja) | 2016-03-31 |
| US20160047838A1 (en) | 2016-02-18 |
| CN105372452A (zh) | 2016-03-02 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190920 |