JP2016021560A5 - - Google Patents

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Publication number
JP2016021560A5
JP2016021560A5 JP2015120790A JP2015120790A JP2016021560A5 JP 2016021560 A5 JP2016021560 A5 JP 2016021560A5 JP 2015120790 A JP2015120790 A JP 2015120790A JP 2015120790 A JP2015120790 A JP 2015120790A JP 2016021560 A5 JP2016021560 A5 JP 2016021560A5
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Japan
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support
convex surface
thru
along
supply unit
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JP2015120790A
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Japanese (ja)
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JP2016021560A (ja
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Publication of JP2016021560A5 publication Critical patent/JP2016021560A5/ja
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JP2015120790A 2014-06-20 2015-06-16 剥離装置 Withdrawn JP2016021560A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015120790A JP2016021560A (ja) 2014-06-20 2015-06-16 剥離装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014127355 2014-06-20
JP2014127355 2014-06-20
JP2015120790A JP2016021560A (ja) 2014-06-20 2015-06-16 剥離装置

Related Child Applications (1)

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JP2019144640A Division JP2020004979A (ja) 2014-06-20 2019-08-06 剥離装置

Publications (2)

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JP2016021560A JP2016021560A (ja) 2016-02-04
JP2016021560A5 true JP2016021560A5 (enExample) 2018-07-19

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JP2015120790A Withdrawn JP2016021560A (ja) 2014-06-20 2015-06-16 剥離装置
JP2019144640A Withdrawn JP2020004979A (ja) 2014-06-20 2019-08-06 剥離装置

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JP2019144640A Withdrawn JP2020004979A (ja) 2014-06-20 2019-08-06 剥離装置

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US (1) US9676175B2 (enExample)
JP (2) JP2016021560A (enExample)

Families Citing this family (27)

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US8137417B2 (en) * 2006-09-29 2012-03-20 Semiconductor Energy Laboratory Co., Ltd. Peeling apparatus and manufacturing apparatus of semiconductor device
KR102309244B1 (ko) 2013-02-20 2021-10-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI671141B (zh) * 2013-08-30 2019-09-11 半導體能源研究所股份有限公司 支撐體供應裝置及供應支撐體的方法
JP6815096B2 (ja) 2015-05-27 2021-01-20 株式会社半導体エネルギー研究所 剥離装置
WO2017115485A1 (ja) * 2015-12-29 2017-07-06 鴻海精密工業股▲ふん▼有限公司 樹脂フィルムの剥離方法、フレキシブル基板を有する電子デバイスの製造方法および有機ｅｌ表示装置の製造方法ならびに樹脂フィルムの剥離装置
EP3210725B1 (en) * 2016-02-23 2019-02-06 TE Connectivity Germany GmbH Hand-operated tool, ground contact mounting set and method for mounting a terminal onto a ground stud contact, in particular for a car body
US10804407B2 (en) 2016-05-12 2020-10-13 Semiconductor Energy Laboratory Co., Ltd. Laser processing apparatus and stack processing apparatus
US10759157B2 (en) * 2016-06-15 2020-09-01 Nanomedical Diagnostics, Inc. Systems and methods for transferring graphene
JP6652890B2 (ja) * 2016-07-04 2020-02-26 東京応化工業株式会社 基板洗浄装置、基板洗浄方法、搬送装置、及び、基板処理システム
JP2018005004A (ja) * 2016-07-04 2018-01-11 株式会社ジャパンディスプレイ 表示装置
JP6731301B2 (ja) * 2016-07-21 2020-07-29 株式会社沖データ 剥離装置
IT201600105300A1 (it) * 2016-10-19 2018-04-19 Manz Italy Srl Metodo e apparato di lavorazione
JP2018091986A (ja) * 2016-12-02 2018-06-14 凸版印刷株式会社 調光フィルム
TWI685905B (zh) * 2017-07-12 2020-02-21 日商新川股份有限公司 接合裝置和接合方法
KR102373995B1 (ko) * 2017-10-30 2022-03-11 엘지디스플레이 주식회사 터치 스크린 일체형 표시 장치
EP3506340B1 (en) * 2017-12-28 2020-10-21 Nexperia B.V. Bonding and indexing apparatus
NL2020364B1 (en) 2018-01-31 2019-08-07 Airborne Int B V Device and method for handling sheets of fiber reinforced material
NL2020362B1 (en) 2018-01-31 2019-08-07 Airborne Int B V Manufacturing layered products
NL2020361B1 (en) 2018-01-31 2019-08-07 Airborne Int B V Tape sectioning system and method of sectioning tape
CN109334204A (zh) * 2018-09-30 2019-02-15 成都领益科技有限公司 石墨片滚贴机
US11430677B2 (en) 2018-10-30 2022-08-30 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer taping apparatus and method
CN110561864B (zh) * 2019-08-23 2021-03-30 威海市鲁威塑业有限公司 一种畜牧养殖专用墙板的聚氨酯纤维板粘合装置
JP7057337B2 (ja) * 2019-10-29 2022-04-19 キヤノントッキ株式会社 基板剥離装置、基板処理装置、及び基板剥離方法
TWI708536B (zh) * 2019-11-25 2020-10-21 欣興電子股份有限公司 移除局部蓋體的裝置及移除局部蓋體的方法
US11889742B2 (en) * 2020-11-04 2024-01-30 Samsung Display Co., Ltd. Apparatus of manufacturing display device and method of manufacturing display device
JP2023048802A (ja) * 2021-09-28 2023-04-07 株式会社東京精密 シート剥離装置
CN119734905B (zh) * 2025-03-04 2025-05-13 成都敏匠智能科技有限公司 一种可调节式的模块化片料底膜剥离结构

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JPH08122521A (ja) * 1994-10-24 1996-05-17 Dainippon Printing Co Ltd 転写装置
JP4619462B2 (ja) 1996-08-27 2011-01-26 セイコーエプソン株式会社 薄膜素子の転写方法
JP2002148794A (ja) * 2000-11-15 2002-05-22 Fuji Photo Film Co Ltd 感光層転写装置及び方法
JP4027740B2 (ja) 2001-07-16 2007-12-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4215998B2 (ja) * 2002-04-30 2009-01-28 リンテック株式会社 半導体ウエハの処理方法およびそのための半導体ウエハの転写装置
KR20040002796A (ko) * 2002-06-28 2004-01-07 후지 샤신 필름 가부시기가이샤 편광판 점착방법 및 그 장치
KR101226260B1 (ko) 2004-06-02 2013-01-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치 제조방법
US7591863B2 (en) 2004-07-16 2009-09-22 Semiconductor Energy Laboratory Co., Ltd. Laminating system, IC sheet, roll of IC sheet, and method for manufacturing IC chip
WO2006011665A1 (en) 2004-07-30 2006-02-02 Semiconductor Energy Laboratory Co., Ltd. Laminating system, ic sheet, scroll of ic sheet, and method for manufacturing ic chip
JP4749074B2 (ja) * 2004-07-30 2011-08-17 株式会社半導体エネルギー研究所 Ｉｃチップの作製方法及び装置
US8040469B2 (en) * 2004-09-10 2011-10-18 Semiconductor Energy Laboratory Co., Ltd. Display device, method for manufacturing the same and apparatus for manufacturing the same
JP4954515B2 (ja) * 2004-09-10 2012-06-20 株式会社半導体エネルギー研究所 表示装置の作製方法
JP5335443B2 (ja) * 2006-03-01 2013-11-06 シン マテリアルズ アクチェンゲゼルシャフト ウエハ支持構造体及び該ウエハ支持構造体の製造に用いられる層システム
JP4459992B2 (ja) * 2006-09-29 2010-04-28 株式会社半導体エネルギー研究所 剥離装置
US8137417B2 (en) * 2006-09-29 2012-03-20 Semiconductor Energy Laboratory Co., Ltd. Peeling apparatus and manufacturing apparatus of semiconductor device
TWI433306B (zh) * 2006-09-29 2014-04-01 Semiconductor Energy Lab 半導體裝置的製造方法
JP4918539B2 (ja) * 2008-12-26 2012-04-18 日東電工株式会社 保護テープ剥離装置
JP2011208287A (ja) * 2010-03-26 2011-10-20 Nk Works Kk 捺染処理装置
KR102309244B1 (ko) 2013-02-20 2021-10-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI671141B (zh) 2013-08-30 2019-09-11 半導體能源研究所股份有限公司 支撐體供應裝置及供應支撐體的方法
TWI618131B (zh) 2013-08-30 2018-03-11 半導體能源研究所股份有限公司 剝離起點形成裝置及形成方法、疊層體製造裝置
WO2015029806A1 (en) 2013-08-30 2015-03-05 Semiconductor Energy Laboratory Co., Ltd. Processing apparatus and processing method of stack
US9925749B2 (en) 2013-09-06 2018-03-27 Semiconductor Energy Laboratory Co., Ltd. Bonding apparatus and stack body manufacturing apparatus
CN106597697A (zh) 2013-12-02 2017-04-26 株式会社半导体能源研究所 显示装置及其制造方法
US9427949B2 (en) 2013-12-03 2016-08-30 Semiconductor Energy Laboratory Co., Ltd. Peeling apparatus and stack manufacturing apparatus
WO2015087192A1 (en) 2013-12-12 2015-06-18 Semiconductor Energy Laboratory Co., Ltd. Peeling method and peeling apparatus

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