JP2016001156A5 - - Google Patents

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Publication number
JP2016001156A5
JP2016001156A5 JP2014121688A JP2014121688A JP2016001156A5 JP 2016001156 A5 JP2016001156 A5 JP 2016001156A5 JP 2014121688 A JP2014121688 A JP 2014121688A JP 2014121688 A JP2014121688 A JP 2014121688A JP 2016001156 A5 JP2016001156 A5 JP 2016001156A5
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JP
Japan
Prior art keywords
sensor
angular velocity
circuit board
acceleration
acceleration sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014121688A
Other languages
English (en)
Japanese (ja)
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JP2016001156A (ja
JP6311469B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2014121688A external-priority patent/JP6311469B2/ja
Priority to JP2014121688A priority Critical patent/JP6311469B2/ja
Priority to DE112015002777.7T priority patent/DE112015002777T5/de
Priority to MYPI2016704072A priority patent/MY186015A/en
Priority to PCT/JP2015/002921 priority patent/WO2015190105A1/ja
Priority to US15/308,866 priority patent/US20170074653A1/en
Priority to CN201580030809.1A priority patent/CN106662601A/zh
Publication of JP2016001156A publication Critical patent/JP2016001156A/ja
Publication of JP2016001156A5 publication Critical patent/JP2016001156A5/ja
Publication of JP6311469B2 publication Critical patent/JP6311469B2/ja
Application granted granted Critical
Priority to US16/444,160 priority patent/US20190301866A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014121688A 2014-06-12 2014-06-12 物理量センサ Active JP6311469B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2014121688A JP6311469B2 (ja) 2014-06-12 2014-06-12 物理量センサ
US15/308,866 US20170074653A1 (en) 2014-06-12 2015-06-11 Physical quantity sensor
MYPI2016704072A MY186015A (en) 2014-06-12 2015-06-11 Physical quantity sensor
PCT/JP2015/002921 WO2015190105A1 (ja) 2014-06-12 2015-06-11 物理量センサ
DE112015002777.7T DE112015002777T5 (de) 2014-06-12 2015-06-11 Sensor für eine physikalische Grösse
CN201580030809.1A CN106662601A (zh) 2014-06-12 2015-06-11 物理量传感器
US16/444,160 US20190301866A1 (en) 2014-06-12 2019-06-18 Physical quantity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014121688A JP6311469B2 (ja) 2014-06-12 2014-06-12 物理量センサ

Publications (3)

Publication Number Publication Date
JP2016001156A JP2016001156A (ja) 2016-01-07
JP2016001156A5 true JP2016001156A5 (enExample) 2016-06-16
JP6311469B2 JP6311469B2 (ja) 2018-04-18

Family

ID=54833216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014121688A Active JP6311469B2 (ja) 2014-06-12 2014-06-12 物理量センサ

Country Status (6)

Country Link
US (2) US20170074653A1 (enExample)
JP (1) JP6311469B2 (enExample)
CN (1) CN106662601A (enExample)
DE (1) DE112015002777T5 (enExample)
MY (1) MY186015A (enExample)
WO (1) WO2015190105A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6464749B2 (ja) * 2015-01-06 2019-02-06 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6641878B2 (ja) * 2015-10-21 2020-02-05 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
US10495663B2 (en) * 2016-02-19 2019-12-03 The Regents Of The University Of Michigan High aspect-ratio low noise multi-axis accelerometers
JP2019120559A (ja) * 2017-12-28 2019-07-22 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、物理量センサーデバイス、電子機器および移動体
US11493531B2 (en) * 2019-11-07 2022-11-08 Honeywell International Inc. Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4332944A1 (de) * 1993-09-28 1995-03-30 Bosch Gmbh Robert Sensor mit einer Quarz-Stimmgabel
CN101189489B (zh) * 2005-06-09 2011-12-07 松下电器产业株式会社 复合传感器
JP4534912B2 (ja) * 2005-08-30 2010-09-01 株式会社デンソー 角速度センサの取付構造
JP2007248328A (ja) * 2006-03-17 2007-09-27 Matsushita Electric Ind Co Ltd 複合センサ
JP2008082812A (ja) * 2006-09-27 2008-04-10 Denso Corp センサ装置およびその製造方法
US8646332B2 (en) * 2007-09-03 2014-02-11 Panasonic Corporation Inertia force sensor
JP2009092545A (ja) * 2007-10-10 2009-04-30 Panasonic Corp 角速度および加速度検出用複合センサ
JP4973443B2 (ja) * 2007-10-22 2012-07-11 株式会社デンソー センサ装置
JP2011117858A (ja) * 2009-12-04 2011-06-16 Seiko Epson Corp 物理量検出装置
DE112011103465B4 (de) * 2010-10-15 2015-07-09 Hitachi Automotive Systems, Ltd. Detektor für physikalische Größe
US9231119B2 (en) * 2011-03-11 2016-01-05 Panasonic Intellectual Property Management Co., Ltd. Sensor
JP2014021038A (ja) * 2012-07-23 2014-02-03 Seiko Epson Corp 振動片、振動片の製造方法、振動子、電子デバイス、電子機器、および移動体

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