JP2015529190A5 - - Google Patents
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- JP2015529190A5 JP2015529190A5 JP2015533041A JP2015533041A JP2015529190A5 JP 2015529190 A5 JP2015529190 A5 JP 2015529190A5 JP 2015533041 A JP2015533041 A JP 2015533041A JP 2015533041 A JP2015533041 A JP 2015533041A JP 2015529190 A5 JP2015529190 A5 JP 2015529190A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- group iii
- nitride
- seed
- iii nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 235000012431 wafers Nutrition 0.000 claims description 262
- 239000013078 crystal Substances 0.000 claims description 134
- 150000004767 nitrides Chemical class 0.000 claims description 122
- 238000000034 method Methods 0.000 claims description 102
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 40
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 38
- 229910002601 GaN Inorganic materials 0.000 claims description 37
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 230000001788 irregular Effects 0.000 claims description 14
- 229910021529 ammonia Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 130
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 19
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 13
- 229910052733 gallium Inorganic materials 0.000 description 13
- 239000011295 pitch Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 235000015097 nutrients Nutrition 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 241001101998 Galium Species 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N Nitrogen dioxide Chemical class O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000005136 cathodoluminescence Methods 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261705540P | 2012-09-25 | 2012-09-25 | |
| US61/705,540 | 2012-09-25 | ||
| PCT/US2013/032103 WO2014051692A1 (en) | 2012-09-25 | 2013-03-15 | Method of growing group iii nitride crystals |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017023920A Division JP6333427B2 (ja) | 2012-09-25 | 2017-02-13 | Ｉｉｉ族窒化物結晶を成長させる方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015529190A JP2015529190A (ja) | 2015-10-05 |
| JP2015529190A5 true JP2015529190A5 (https=) | 2017-03-23 |
| JP6169704B2 JP6169704B2 (ja) | 2017-07-26 |
Family
ID=48050287
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015533041A Active JP6169704B2 (ja) | 2012-09-25 | 2013-03-15 | Ｉｉｉ族窒化物結晶を成長させる方法 |
| JP2017023920A Active JP6333427B2 (ja) | 2012-09-25 | 2017-02-13 | Ｉｉｉ族窒化物結晶を成長させる方法 |
| JP2018019044A Withdrawn JP2018065751A (ja) | 2012-09-25 | 2018-02-06 | Ｉｉｉ族窒化物結晶を成長させる方法 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017023920A Active JP6333427B2 (ja) | 2012-09-25 | 2017-02-13 | Ｉｉｉ族窒化物結晶を成長させる方法 |
| JP2018019044A Withdrawn JP2018065751A (ja) | 2012-09-25 | 2018-02-06 | Ｉｉｉ族窒化物結晶を成長させる方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9202872B2 (https=) |
| EP (1) | EP2900851B1 (https=) |
| JP (3) | JP6169704B2 (https=) |
| KR (1) | KR102096421B1 (https=) |
| TW (1) | TWI602959B (https=) |
| WO (1) | WO2014051692A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9790616B2 (en) | 2006-04-07 | 2017-10-17 | Sixpoint Materials, Inc. | Method of fabricating bulk group III nitride crystals in supercritical ammonia |
| US9518340B2 (en) | 2006-04-07 | 2016-12-13 | Sixpoint Materials, Inc. | Method of growing group III nitride crystals |
| US9754782B2 (en) | 2006-04-07 | 2017-09-05 | Sixpoint Materials, Inc. | Group III nitride substrates and their fabrication method |
| EP2890537A1 (en) | 2012-08-28 | 2015-07-08 | Sixpoint Materials Inc. | Group iii nitride wafer and its production method |
| KR102096421B1 (ko) | 2012-09-25 | 2020-04-02 | 식스포인트 머터리얼즈 인코퍼레이티드 | Iii 족 질화물 결정의 성장 방법 |
| CN104781454A (zh) | 2012-09-26 | 2015-07-15 | 希波特公司 | 第iii族氮化物晶片和制造方法与测试方法 |
| WO2016090045A1 (en) * | 2014-12-02 | 2016-06-09 | Sixpoint Materials, Inc. | Group iii nitride crystals, their fabrication method, and method of fabricating bulk group iii nitride crystals in supercritical ammonia |
| JP6456502B2 (ja) * | 2014-12-04 | 2019-01-23 | シックスポイント マテリアルズ， インコーポレイテッド | Ｉｉｉ族窒化物基板およびそれらの製造方法 |
| US10355115B2 (en) | 2016-12-23 | 2019-07-16 | Sixpoint Materials, Inc. | Electronic device using group III nitride semiconductor and its fabrication method |
| JP2020535092A (ja) | 2017-09-26 | 2020-12-03 | シックスポイント マテリアルズ， インコーポレイテッド | 超臨界アンモニアの中での窒化ガリウムバルク結晶の成長のための種結晶および製造方法 |
| JP6899958B2 (ja) * | 2018-03-29 | 2021-07-07 | 日本碍子株式会社 | １３族元素窒化物層、自立基板、機能素子および１３族元素窒化物層の製造方法 |
| JP7158272B2 (ja) * | 2018-12-25 | 2022-10-21 | エア・ウォーター株式会社 | 化合物半導体基板 |
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| JPH1044142A (ja) * | 1996-08-01 | 1998-02-17 | Citizen Watch Co Ltd | マルチワイヤーソー |
| WO2002011947A2 (en) | 2000-08-07 | 2002-02-14 | Memc Electronic Materials, Inc. | Method for processing a semiconductor wafer using double-side polishing |
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| TWI277666B (en) | 2001-06-06 | 2007-04-01 | Ammono Sp Zoo | Process and apparatus for obtaining bulk mono-crystalline gallium-containing nitride |
| US6488767B1 (en) | 2001-06-08 | 2002-12-03 | Advanced Technology Materials, Inc. | High surface quality GaN wafer and method of fabricating same |
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| JP4693351B2 (ja) | 2001-10-26 | 2011-06-01 | アンモノ・スプウカ・ジ・オグラニチョノン・オドポヴィエドニアウノシツィオン | エピタキシャル成長用基板 |
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| US7098487B2 (en) | 2002-12-27 | 2006-08-29 | General Electric Company | Gallium nitride crystal and method of making same |
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| JP4849296B2 (ja) | 2005-04-11 | 2012-01-11 | 日立電線株式会社 | ＧａＮ基板 |
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| JP2011100860A (ja) | 2009-11-06 | 2011-05-19 | Sumitomo Electric Ind Ltd | イオン注入ｉｉｉ族窒化物半導体基板ならびにｉｉｉ族窒化物半導体層接合基板およびｉｉｉ族窒化物半導体デバイスの製造方法 |
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| EP2890537A1 (en) | 2012-08-28 | 2015-07-08 | Sixpoint Materials Inc. | Group iii nitride wafer and its production method |
| KR102096421B1 (ko) | 2012-09-25 | 2020-04-02 | 식스포인트 머터리얼즈 인코퍼레이티드 | Iii 족 질화물 결정의 성장 방법 |
| CN104781454A (zh) | 2012-09-26 | 2015-07-15 | 希波特公司 | 第iii族氮化物晶片和制造方法与测试方法 |
-
2013
- 2013-03-15 KR KR1020157010291A patent/KR102096421B1/ko not_active Expired - Fee Related
- 2013-03-15 EP EP13714781.5A patent/EP2900851B1/en active Active
- 2013-03-15 US US13/834,015 patent/US9202872B2/en active Active
- 2013-03-15 WO PCT/US2013/032103 patent/WO2014051692A1/en not_active Ceased
- 2013-03-15 JP JP2015533041A patent/JP6169704B2/ja active Active
- 2013-09-24 TW TW102134365A patent/TWI602959B/zh active
-
2015
- 2015-10-20 US US14/918,474 patent/US10316431B2/en active Active
-
2017
- 2017-02-13 JP JP2017023920A patent/JP6333427B2/ja active Active
-
2018
- 2018-02-06 JP JP2018019044A patent/JP2018065751A/ja not_active Withdrawn
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