JP2015527740A5 - - Google Patents

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JP2015527740A5
JP2015527740A5 JP2015525602A JP2015525602A JP2015527740A5 JP 2015527740 A5 JP2015527740 A5 JP 2015527740A5 JP 2015525602 A JP2015525602 A JP 2015525602A JP 2015525602 A JP2015525602 A JP 2015525602A JP 2015527740 A5 JP2015527740 A5 JP 2015527740A5
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dies
error
exposure
printed
focus
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JP2015525602A
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JP6282650B2 (ja
JP2015527740A (ja
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JP2015525602A 2012-08-01 2013-08-01 ウェーハの検査、及び／又はウェーハ上に形成されるデバイスの一つ若しくは複数の特性の予測 Active JP6282650B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261678576P 2012-08-01 2012-08-01
US61/678,576 2012-08-01
US13/783,291 US8948495B2 (en) 2012-08-01 2013-03-02 Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer
US13/783,291 2013-03-02
PCT/US2013/053252 WO2014022682A1 (en) 2012-08-01 2013-08-01 Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018009314A Division JP2018097376A (ja) 2012-08-01 2018-01-24 ウェーハの検査、及び／又はウェーハ上に形成されるデバイスの一つ若しくは複数の特性の予測

Publications (3)

Publication Number Publication Date
JP2015527740A JP2015527740A (ja) 2015-09-17
JP2015527740A5 true JP2015527740A5 (cg-RX-API-DMAC7.html) 2016-09-15
JP6282650B2 JP6282650B2 (ja) 2018-02-21

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Family Applications (4)

Application Number Title Priority Date Filing Date
JP2015525602A Active JP6282650B2 (ja) 2012-08-01 2013-08-01 ウェーハの検査、及び／又はウェーハ上に形成されるデバイスの一つ若しくは複数の特性の予測
JP2018009314A Pending JP2018097376A (ja) 2012-08-01 2018-01-24 ウェーハの検査、及び／又はウェーハ上に形成されるデバイスの一つ若しくは複数の特性の予測
JP2019224429A Pending JP2020057008A (ja) 2012-08-01 2019-12-12 デバイスの特性の予測方法及びシステム
JP2021132300A Pending JP2021182162A (ja) 2012-08-01 2021-08-16 デバイスの特性の予測方法及びシステム

Family Applications After (3)

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JP2018009314A Pending JP2018097376A (ja) 2012-08-01 2018-01-24 ウェーハの検査、及び／又はウェーハ上に形成されるデバイスの一つ若しくは複数の特性の予測
JP2019224429A Pending JP2020057008A (ja) 2012-08-01 2019-12-12 デバイスの特性の予測方法及びシステム
JP2021132300A Pending JP2021182162A (ja) 2012-08-01 2021-08-16 デバイスの特性の予測方法及びシステム

Country Status (8)

Country Link
US (1) US8948495B2 (cg-RX-API-DMAC7.html)
EP (1) EP2880427A1 (cg-RX-API-DMAC7.html)
JP (4) JP6282650B2 (cg-RX-API-DMAC7.html)
KR (2) KR102169564B1 (cg-RX-API-DMAC7.html)
CN (1) CN104620097B (cg-RX-API-DMAC7.html)
IL (2) IL236957B (cg-RX-API-DMAC7.html)
TW (1) TWI591326B (cg-RX-API-DMAC7.html)
WO (1) WO2014022682A1 (cg-RX-API-DMAC7.html)

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