JP2015526739A - 複数プローブの検出及び作動 - Google Patents

複数プローブの検出及び作動 Download PDF

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Publication number
JP2015526739A
JP2015526739A JP2015529119A JP2015529119A JP2015526739A JP 2015526739 A JP2015526739 A JP 2015526739A JP 2015529119 A JP2015529119 A JP 2015529119A JP 2015529119 A JP2015529119 A JP 2015529119A JP 2015526739 A JP2015526739 A JP 2015526739A
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Japan
Prior art keywords
probe
probes
working
optical device
rays
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JP2015529119A
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English (en)
Japanese (ja)
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JP2015526739A5 (enExample
Inventor
ハンフリス，アンドリュー
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インフィニテシマ リミテッド
インフィニテシマ リミテッド
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Publication of JP2015526739A5 publication Critical patent/JP2015526739A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/002—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2049—Exposure; Apparatus therefor using a cantilever
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G11B9/1445—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other switching at least one head in operating function; Controlling the relative spacing to keep the head operative, e.g. for allowing a tunnel current flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2015529119A 2012-08-31 2013-08-28 複数プローブの検出及び作動 Pending JP2015526739A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1215546.1 2012-08-31
GBGB1215546.1A GB201215546D0 (en) 2012-08-31 2012-08-31 Multiple probe detection and actuation
PCT/GB2013/052256 WO2014033451A1 (en) 2012-08-31 2013-08-28 Multiple probe detection and actuation

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020159976A Division JP2021001905A (ja) 2012-08-31 2020-09-24 複数プローブの検出及び作動

Publications (2)

Publication Number Publication Date
JP2015526739A true JP2015526739A (ja) 2015-09-10
JP2015526739A5 JP2015526739A5 (enExample) 2016-09-23

Family

ID=47075065

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015529119A Pending JP2015526739A (ja) 2012-08-31 2013-08-28 複数プローブの検出及び作動
JP2020159976A Pending JP2021001905A (ja) 2012-08-31 2020-09-24 複数プローブの検出及び作動

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2020159976A Pending JP2021001905A (ja) 2012-08-31 2020-09-24 複数プローブの検出及び作動

Country Status (5)

Country Link
US (1) US9739798B2 (enExample)
EP (1) EP2891117B1 (enExample)
JP (2) JP2015526739A (enExample)
GB (1) GB201215546D0 (enExample)
WO (1) WO2014033451A1 (enExample)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
JP2022070996A (ja) * 2017-03-31 2022-05-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 走査型プローブ顕微鏡のための装置および方法

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CN105008895B (zh) 2012-10-15 2019-02-15 纳诺赛莱克特生物医药股份有限公司 颗粒分选的系统、设备和方法
US9947118B2 (en) * 2014-05-28 2018-04-17 Indian Institute Of Technology Delhi Non-interferometric phase measurement
GB201610128D0 (en) 2016-06-10 2016-07-27 Infinitesima Ltd Scanning probe system with multiple probes
GB201710294D0 (en) 2017-06-28 2017-08-09 Infinitesima Ltd Scanning probe microscope
EP3450994B1 (en) * 2017-08-31 2025-04-02 Nanosurf AG Atomic force microscope with optical guiding mechanism
CN118033180A (zh) * 2018-01-22 2024-05-14 理海大学 测量样品的亚微米区域的光学特性的方法及原子力显微镜
US11257657B2 (en) * 2020-02-18 2022-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with interferometer for height measurement
US11519935B2 (en) * 2020-08-18 2022-12-06 Oxford Instruments Asylum Research, Inc. Atomic force microscope
GB202109549D0 (en) 2021-07-01 2021-08-18 Infinitesima Ltd Lighting system for multi-probe microscope

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JPH0365248A (ja) * 1989-05-08 1991-03-20 Amersham Internatl Plc 画像化装置および画像化法
WO2012059828A2 (en) * 2010-11-01 2012-05-10 Koc Universitesi Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array
JP2012093325A (ja) * 2010-10-29 2012-05-17 Murata Mfg Co Ltd 原子間力顕微鏡用のカンチレバー、原子間力顕微鏡、および、原子間力の測定方法

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Publication number Priority date Publication date Assignee Title
JP2022070996A (ja) * 2017-03-31 2022-05-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 走査型プローブ顕微鏡のための装置および方法
JP7333434B2 (ja) 2017-03-31 2023-08-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 走査型プローブ顕微鏡のための装置および方法
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Also Published As

Publication number Publication date
EP2891117B1 (en) 2023-09-20
EP2891117A1 (en) 2015-07-08
US9739798B2 (en) 2017-08-22
JP2021001905A (ja) 2021-01-07
US20150219686A1 (en) 2015-08-06
GB201215546D0 (en) 2012-10-17
WO2014033451A1 (en) 2014-03-06

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