JP2015526739A5 - - Google Patents

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Publication number
JP2015526739A5
JP2015526739A5 JP2015529119A JP2015529119A JP2015526739A5 JP 2015526739 A5 JP2015526739 A5 JP 2015526739A5 JP 2015529119 A JP2015529119 A JP 2015529119A JP 2015529119 A JP2015529119 A JP 2015529119A JP 2015526739 A5 JP2015526739 A5 JP 2015526739A5
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JP
Japan
Prior art keywords
optical device
probes
ray
input
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015529119A
Other languages
English (en)
Japanese (ja)
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JP2015526739A (ja
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Publication date
Priority claimed from GBGB1215546.1A external-priority patent/GB201215546D0/en
Application filed filed Critical
Publication of JP2015526739A publication Critical patent/JP2015526739A/ja
Publication of JP2015526739A5 publication Critical patent/JP2015526739A5/ja
Pending legal-status Critical Current

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JP2015529119A 2012-08-31 2013-08-28 複数プローブの検出及び作動 Pending JP2015526739A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1215546.1 2012-08-31
GBGB1215546.1A GB201215546D0 (en) 2012-08-31 2012-08-31 Multiple probe detection and actuation
PCT/GB2013/052256 WO2014033451A1 (en) 2012-08-31 2013-08-28 Multiple probe detection and actuation

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020159976A Division JP2021001905A (ja) 2012-08-31 2020-09-24 複数プローブの検出及び作動

Publications (2)

Publication Number Publication Date
JP2015526739A JP2015526739A (ja) 2015-09-10
JP2015526739A5 true JP2015526739A5 (enExample) 2016-09-23

Family

ID=47075065

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015529119A Pending JP2015526739A (ja) 2012-08-31 2013-08-28 複数プローブの検出及び作動
JP2020159976A Pending JP2021001905A (ja) 2012-08-31 2020-09-24 複数プローブの検出及び作動

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2020159976A Pending JP2021001905A (ja) 2012-08-31 2020-09-24 複数プローブの検出及び作動

Country Status (5)

Country Link
US (1) US9739798B2 (enExample)
EP (1) EP2891117B1 (enExample)
JP (2) JP2015526739A (enExample)
GB (1) GB201215546D0 (enExample)
WO (1) WO2014033451A1 (enExample)

Families Citing this family (10)

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Publication number Priority date Publication date Assignee Title
JP6396911B2 (ja) 2012-10-15 2018-09-26 ナノセレクト バイオメディカル， インコーポレイテッド 粒子を選別するためのシステム、装置、および、方法
US9947118B2 (en) * 2014-05-28 2018-04-17 Indian Institute Of Technology Delhi Non-interferometric phase measurement
GB201610128D0 (en) 2016-06-10 2016-07-27 Infinitesima Ltd Scanning probe system with multiple probes
DE102017205528B4 (de) * 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
GB201710294D0 (en) * 2017-06-28 2017-08-09 Infinitesima Ltd Scanning probe microscope
EP3450994B1 (en) * 2017-08-31 2025-04-02 Nanosurf AG Atomic force microscope with optical guiding mechanism
US11415597B2 (en) * 2018-01-22 2022-08-16 Lehigh University System and method for a non-tapping mode scattering-type scanning near-field optical microscopy
US11257657B2 (en) * 2020-02-18 2022-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with interferometer for height measurement
US11519935B2 (en) * 2020-08-18 2022-12-06 Oxford Instruments Asylum Research, Inc. Atomic force microscope
GB202109549D0 (en) 2021-07-01 2021-08-18 Infinitesima Ltd Lighting system for multi-probe microscope

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JPS63222208A (ja) * 1987-03-11 1988-09-16 Japan Spectroscopic Co 凹部深さ測定装置
US5260824A (en) * 1989-04-24 1993-11-09 Olympus Optical Co., Ltd. Atomic force microscope
GB8910566D0 (en) * 1989-05-08 1989-06-21 Amersham Int Plc Imaging apparatus and method
JP2661314B2 (ja) 1990-03-07 1997-10-08 松下電器産業株式会社 形状測定装置及び形状測定方法
US8087288B1 (en) * 1993-08-17 2012-01-03 Bruker Nano, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
US5485231A (en) * 1994-01-31 1996-01-16 Nidek Co., Ltd. Apparatus for visual acuity test having an adjustable mirror
US5883387A (en) * 1994-11-15 1999-03-16 Olympus Optical Co., Ltd. SPM cantilever and a method for manufacturing the same
US5760755A (en) * 1995-08-16 1998-06-02 Engle; Craig D. Electrostatic light valve system configurations
US6330824B1 (en) * 1999-02-19 2001-12-18 The University Of North Carolina At Chapel Hill Photothermal modulation for oscillating mode atomic force microscopy in solution
JP2000266658A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc マルチプローブ及び走査型プローブ顕微鏡
GB2365142B (en) 2000-07-27 2002-06-19 Michael John Downs Jamin-type interferometers and components therefor
JP2003091873A (ja) * 2001-07-12 2003-03-28 Matsushita Electric Ind Co Ltd 光学的情報記録媒体およびそれを用いた記録方法
US6779387B2 (en) * 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
EP1428058A4 (en) 2001-08-23 2009-01-07 Asylum Research Corp OPTICAL DETECTOR WITH DIFFRACTION POSITION
EP1520292B1 (en) 2002-07-08 2013-10-09 Multiprobe, Inc. Software synchronization of multiple scanning probes
US6936981B2 (en) * 2002-11-08 2005-08-30 Applied Materials, Inc. Retarding electron beams in multiple electron beam pattern generation
WO2005015570A1 (ja) * 2003-08-11 2005-02-17 Japan Science And Technology Agency 透明基板を用いるプローブ顕微鏡のプローブ、その製造方法およびプローブ顕微鏡装置
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system
JP2005331509A (ja) * 2004-04-19 2005-12-02 Japan Science & Technology Agency 固有振動可変型のカンチレバーによる測定対象物の計測方法および装置
US7280078B2 (en) 2004-11-20 2007-10-09 Scenterra, Inc. Sensor for detecting high frequency signals
WO2006129561A1 (ja) * 2005-05-31 2006-12-07 National University Corporation Kanazawa University 走査型プローブ顕微鏡およびカンチレバー駆動装置
JP5122775B2 (ja) 2006-08-23 2013-01-16 株式会社ミツトヨ 測定装置
GB0621560D0 (en) * 2006-10-31 2006-12-06 Infinitesima Ltd Probe assembly for a scanning probe microscope
TWI364540B (en) * 2007-12-28 2012-05-21 Ind Tech Res Inst Cantilever sensor system and profilers and biosensors using the same
CA2727118A1 (en) * 2008-06-06 2009-12-10 Infinitesima Ltd. Probe detection system
US8479310B2 (en) 2008-12-11 2013-07-02 Infinitesima Ltd. Dynamic probe detection system
GB0900705D0 (en) * 2009-01-16 2009-03-04 Univ Huddersfield Surface measurement system
JP2012093325A (ja) * 2010-10-29 2012-05-17 Murata Mfg Co Ltd 原子間力顕微鏡用のカンチレバー、原子間力顕微鏡、および、原子間力の測定方法
RU2565351C2 (ru) * 2010-11-01 2015-10-20 Кодж Университеси Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems)
JP6117705B2 (ja) * 2011-01-31 2017-04-19 インフィニテシマ リミテッド 適応モード走査型プローブ顕微鏡
GB201215547D0 (en) * 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe actuation

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