JP2015520938A5 - - Google Patents

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Publication number
JP2015520938A5
JP2015520938A5 JP2015504967A JP2015504967A JP2015520938A5 JP 2015520938 A5 JP2015520938 A5 JP 2015520938A5 JP 2015504967 A JP2015504967 A JP 2015504967A JP 2015504967 A JP2015504967 A JP 2015504967A JP 2015520938 A5 JP2015520938 A5 JP 2015520938A5
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JP
Japan
Prior art keywords
pulse
emitting
light
module
plasma
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JP2015504967A
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Japanese (ja)
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JP6224074B2 (ja
JP2015520938A (ja
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Priority claimed from FR1253404A external-priority patent/FR2989294B1/fr
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JP2015504967A 2012-04-13 2013-04-12 レーザナノ加工装置および方法 Active JP6224074B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1253404 2012-04-13
FR1253404A FR2989294B1 (fr) 2012-04-13 2012-04-13 Dispositif et methode de nano-usinage par laser
PCT/EP2013/057673 WO2013153195A1 (fr) 2012-04-13 2013-04-12 Dispositif et methode de nano-usinage par laser

Publications (3)

Publication Number Publication Date
JP2015520938A JP2015520938A (ja) 2015-07-23
JP2015520938A5 true JP2015520938A5 (enExample) 2016-04-07
JP6224074B2 JP6224074B2 (ja) 2017-11-01

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JP2015504967A Active JP6224074B2 (ja) 2012-04-13 2013-04-12 レーザナノ加工装置および方法

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US (1) US10131017B2 (enExample)
EP (1) EP2836332B1 (enExample)
JP (1) JP6224074B2 (enExample)
FR (1) FR2989294B1 (enExample)
LT (1) LT2836332T (enExample)
WO (1) WO2013153195A1 (enExample)

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