JP2015518268A5 - - Google Patents

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Publication number
JP2015518268A5
JP2015518268A5 JP2015500917A JP2015500917A JP2015518268A5 JP 2015518268 A5 JP2015518268 A5 JP 2015518268A5 JP 2015500917 A JP2015500917 A JP 2015500917A JP 2015500917 A JP2015500917 A JP 2015500917A JP 2015518268 A5 JP2015518268 A5 JP 2015518268A5
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Japan
Prior art keywords
pressure regulator
electron beam
guide body
beam lithography
hollow guide
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JP2015500917A
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English (en)
Japanese (ja)
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JP2015518268A (ja
JP6239583B2 (ja
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Priority claimed from PCT/EP2013/055865 external-priority patent/WO2013139878A2/en
Publication of JP2015518268A publication Critical patent/JP2015518268A/ja
Publication of JP2015518268A5 publication Critical patent/JP2015518268A5/ja
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Publication of JP6239583B2 publication Critical patent/JP6239583B2/ja
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JP2015500917A 2012-03-20 2013-03-20 ラジカルを輸送するための装置および方法 Active JP6239583B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261613391P 2012-03-20 2012-03-20
US61/613,391 2012-03-20
PCT/EP2013/055865 WO2013139878A2 (en) 2012-03-20 2013-03-20 Arrangement and method for transporting radicals

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017210550A Division JP2018050061A (ja) 2012-03-20 2017-10-31 ラジカルを輸送するための装置および方法

Publications (3)

Publication Number Publication Date
JP2015518268A JP2015518268A (ja) 2015-06-25
JP2015518268A5 true JP2015518268A5 (https=) 2016-05-19
JP6239583B2 JP6239583B2 (ja) 2017-11-29

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Family Applications (4)

Application Number Title Priority Date Filing Date
JP2015500917A Active JP6239583B2 (ja) 2012-03-20 2013-03-20 ラジカルを輸送するための装置および方法
JP2017210550A Pending JP2018050061A (ja) 2012-03-20 2017-10-31 ラジカルを輸送するための装置および方法
JP2020135584A Active JP7166315B2 (ja) 2012-03-20 2020-08-11 ラジカルを輸送するための装置および方法
JP2022129814A Active JP7446374B2 (ja) 2012-03-20 2022-08-17 ラジカルを輸送するための装置および方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2017210550A Pending JP2018050061A (ja) 2012-03-20 2017-10-31 ラジカルを輸送するための装置および方法
JP2020135584A Active JP7166315B2 (ja) 2012-03-20 2020-08-11 ラジカルを輸送するための装置および方法
JP2022129814A Active JP7446374B2 (ja) 2012-03-20 2022-08-17 ラジカルを輸送するための装置および方法

Country Status (8)

Country Link
US (2) US9123507B2 (https=)
EP (1) EP2828708B1 (https=)
JP (4) JP6239583B2 (https=)
KR (4) KR102069183B1 (https=)
CN (2) CN106933063B (https=)
NL (3) NL2010488C2 (https=)
RU (2) RU2017146228A (https=)
WO (1) WO2013139878A2 (https=)

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WO2021097806A1 (en) * 2019-11-22 2021-05-27 Abb Schweiz Ag Conveyor, conveying system and manufacturing method of conveyor
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CN116324398A (zh) * 2020-11-02 2023-06-23 株式会社岛津制作所 离子分析装置
CN116408306A (zh) * 2023-05-05 2023-07-11 江苏科宁新材料有限公司 一种便于清理的离型膜除尘装置

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