JP2015518168A5 - - Google Patents

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Publication number
JP2015518168A5
JP2015518168A5 JP2015515019A JP2015515019A JP2015518168A5 JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5 JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5
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JP
Japan
Prior art keywords
humidity sensor
conductive electrode
sensor element
disposed
capacitance
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Application number
JP2015515019A
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English (en)
Japanese (ja)
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JP6129304B2 (ja
JP2015518168A (ja
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Priority claimed from PCT/US2013/040709 external-priority patent/WO2013180936A1/en
Publication of JP2015518168A publication Critical patent/JP2015518168A/ja
Publication of JP2015518168A5 publication Critical patent/JP2015518168A5/ja
Application granted granted Critical
Publication of JP6129304B2 publication Critical patent/JP6129304B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015515019A 2012-05-29 2013-05-13 湿度センサ及びセンサ素子 Active JP6129304B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261652496P 2012-05-29 2012-05-29
US61/652,496 2012-05-29
PCT/US2013/040709 WO2013180936A1 (en) 2012-05-29 2013-05-13 Humidity sensor and sensor element

Publications (3)

Publication Number Publication Date
JP2015518168A JP2015518168A (ja) 2015-06-25
JP2015518168A5 true JP2015518168A5 (enExample) 2016-06-30
JP6129304B2 JP6129304B2 (ja) 2017-05-17

Family

ID=48538062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515019A Active JP6129304B2 (ja) 2012-05-29 2013-05-13 湿度センサ及びセンサ素子

Country Status (5)

Country Link
US (1) US9562872B2 (enExample)
EP (1) EP2856128B1 (enExample)
JP (1) JP6129304B2 (enExample)
CN (1) CN104487831B (enExample)
WO (1) WO2013180936A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US11056365B2 (en) * 2017-09-27 2021-07-06 Taiwan Semiconductor Manufacturing Co., Ltd. Fault detection method in semiconductor fabrication facility
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP4027417A1 (en) 2021-01-07 2022-07-13 AVL List GmbH Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system
CN118706911B (zh) * 2024-08-29 2024-11-15 太原科技大学 一种平行板电容器式介电传感器及其应用

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WO2012170248A1 (en) 2011-06-08 2012-12-13 3M Innovative Properties Company Humidity sensor and sensor element therefor

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