JP2015518168A5 - - Google Patents

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Publication number
JP2015518168A5
JP2015518168A5 JP2015515019A JP2015515019A JP2015518168A5 JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5 JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5
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JP
Japan
Prior art keywords
humidity sensor
conductive electrode
sensor element
disposed
capacitance
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Application number
JP2015515019A
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English (en)
Japanese (ja)
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JP2015518168A (ja
JP6129304B2 (ja
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Priority claimed from PCT/US2013/040709 external-priority patent/WO2013180936A1/en
Publication of JP2015518168A publication Critical patent/JP2015518168A/ja
Publication of JP2015518168A5 publication Critical patent/JP2015518168A5/ja
Application granted granted Critical
Publication of JP6129304B2 publication Critical patent/JP6129304B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015515019A 2012-05-29 2013-05-13 湿度センサ及びセンサ素子 Active JP6129304B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261652496P 2012-05-29 2012-05-29
US61/652,496 2012-05-29
PCT/US2013/040709 WO2013180936A1 (en) 2012-05-29 2013-05-13 Humidity sensor and sensor element

Publications (3)

Publication Number Publication Date
JP2015518168A JP2015518168A (ja) 2015-06-25
JP2015518168A5 true JP2015518168A5 (enExample) 2016-06-30
JP6129304B2 JP6129304B2 (ja) 2017-05-17

Family

ID=48538062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515019A Active JP6129304B2 (ja) 2012-05-29 2013-05-13 湿度センサ及びセンサ素子

Country Status (5)

Country Link
US (1) US9562872B2 (enExample)
EP (1) EP2856128B1 (enExample)
JP (1) JP6129304B2 (enExample)
CN (1) CN104487831B (enExample)
WO (1) WO2013180936A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US11056365B2 (en) * 2017-09-27 2021-07-06 Taiwan Semiconductor Manufacturing Co., Ltd. Fault detection method in semiconductor fabrication facility
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP4027417A1 (en) 2021-01-07 2022-07-13 AVL List GmbH Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system
CN118706911B (zh) * 2024-08-29 2024-11-15 太原科技大学 一种平行板电容器式介电传感器及其应用

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KR20100065302A (ko) * 2007-07-27 2010-06-16 이 아이 듀폰 디 네모아 앤드 캄파니 무기 나노입자를 포함하는 전기 전도성 중합체의 수성 분산물
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JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
US9419300B2 (en) 2010-04-16 2016-08-16 3M Innovative Properties Company Proton conducting materials
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
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WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
US20140025326A1 (en) 2011-04-13 2014-01-23 3M Innovative Properties Company Electronic device including calibration information and method of using the same
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
JP5908069B2 (ja) * 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子

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