CN108132280B - 一种用于安装气体传感器的柔性衬底 - Google Patents
一种用于安装气体传感器的柔性衬底 Download PDFInfo
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- CN108132280B CN108132280B CN201711422459.0A CN201711422459A CN108132280B CN 108132280 B CN108132280 B CN 108132280B CN 201711422459 A CN201711422459 A CN 201711422459A CN 108132280 B CN108132280 B CN 108132280B
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- 239000000758 substrate Substances 0.000 title claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 70
- 239000002184 metal Substances 0.000 claims abstract description 70
- 239000000463 material Substances 0.000 claims abstract description 27
- 239000003990 capacitor Substances 0.000 claims abstract description 18
- 239000003989 dielectric material Substances 0.000 claims abstract description 12
- 239000002245 particle Substances 0.000 claims description 12
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 239000011777 magnesium Substances 0.000 claims description 3
- 238000011161 development Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
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- 238000012544 monitoring process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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CN201711422459.0A CN108132280B (zh) | 2017-12-25 | 2017-12-25 | 一种用于安装气体传感器的柔性衬底 |
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CN201711422459.0A CN108132280B (zh) | 2017-12-25 | 2017-12-25 | 一种用于安装气体传感器的柔性衬底 |
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CN108132280A CN108132280A (zh) | 2018-06-08 |
CN108132280B true CN108132280B (zh) | 2020-11-17 |
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Families Citing this family (2)
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CN111982392A (zh) * | 2020-08-12 | 2020-11-24 | 青岛歌尔智能传感器有限公司 | 组合传感器及其制作方法、以及电子设备 |
CN113855004A (zh) * | 2021-09-30 | 2021-12-31 | 山东科技大学 | 一种柔性压力传感器的制备方法及应用 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104535228A (zh) * | 2015-01-28 | 2015-04-22 | 厦门大学 | 一种无上下互连电极的lc无线无源压力传感器 |
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FR2848324B3 (fr) * | 2002-12-06 | 2005-01-21 | Lionel Prat | Dispositif de securite contre le vol a l'etalage, du type etiquette |
US7900518B2 (en) * | 2006-08-29 | 2011-03-08 | California Inst Of Techn | Microfabricated implantable wireless pressure sensor for use in biomedical applications and pressure measurement and sensor implantation methods |
CN103217461B (zh) * | 2013-04-08 | 2015-05-13 | 东南大学 | 一种无线无源电容式湿度传感器 |
CN104407034A (zh) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | 一种气体传感器芯片 |
CN105043581B (zh) * | 2015-05-25 | 2017-06-06 | 东南大学 | 一种无线无源mems温度传感器及其制备方法 |
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CN104535228A (zh) * | 2015-01-28 | 2015-04-22 | 厦门大学 | 一种无上下互连电极的lc无线无源压力传感器 |
Non-Patent Citations (1)
Title |
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Flexible planar concentric circular micro-supercapacitor arrays for wearable gas sensing application;La Li 等;《Nano Energy》;20170912;第41卷;第261-268页 * |
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