CN104487831B - 湿度传感器和传感器元件 - Google Patents

湿度传感器和传感器元件 Download PDF

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Publication number
CN104487831B
CN104487831B CN201380027971.9A CN201380027971A CN104487831B CN 104487831 B CN104487831 B CN 104487831B CN 201380027971 A CN201380027971 A CN 201380027971A CN 104487831 B CN104487831 B CN 104487831B
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CN
China
Prior art keywords
humidity sensor
sensor element
conductive electrode
permeable
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201380027971.9A
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English (en)
Chinese (zh)
Other versions
CN104487831A (zh
Inventor
S·H·格里斯卡
K·A·莱温斯基
M·C·帕拉佐托
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN104487831A publication Critical patent/CN104487831A/zh
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Publication of CN104487831B publication Critical patent/CN104487831B/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN201380027971.9A 2012-05-29 2013-05-13 湿度传感器和传感器元件 Expired - Fee Related CN104487831B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261652496P 2012-05-29 2012-05-29
US61/652,496 2012-05-29
PCT/US2013/040709 WO2013180936A1 (en) 2012-05-29 2013-05-13 Humidity sensor and sensor element

Publications (2)

Publication Number Publication Date
CN104487831A CN104487831A (zh) 2015-04-01
CN104487831B true CN104487831B (zh) 2016-09-07

Family

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CN201380027971.9A Expired - Fee Related CN104487831B (zh) 2012-05-29 2013-05-13 湿度传感器和传感器元件

Country Status (5)

Country Link
US (1) US9562872B2 (enExample)
EP (1) EP2856128B1 (enExample)
JP (1) JP6129304B2 (enExample)
CN (1) CN104487831B (enExample)
WO (1) WO2013180936A1 (enExample)

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US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US11056365B2 (en) * 2017-09-27 2021-07-06 Taiwan Semiconductor Manufacturing Co., Ltd. Fault detection method in semiconductor fabrication facility
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP4027417A1 (en) 2021-01-07 2022-07-13 AVL List GmbH Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system
CN118706911B (zh) * 2024-08-29 2024-11-15 太原科技大学 一种平行板电容器式介电传感器及其应用

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KR20100065302A (ko) * 2007-07-27 2010-06-16 이 아이 듀폰 디 네모아 앤드 캄파니 무기 나노입자를 포함하는 전기 전도성 중합체의 수성 분산물
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JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
US9419300B2 (en) 2010-04-16 2016-08-16 3M Innovative Properties Company Proton conducting materials
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
EP2622334B1 (en) 2010-09-30 2016-05-25 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
US20140025326A1 (en) 2011-04-13 2014-01-23 3M Innovative Properties Company Electronic device including calibration information and method of using the same
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
JP5908069B2 (ja) * 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子

Also Published As

Publication number Publication date
CN104487831A (zh) 2015-04-01
US20150153296A1 (en) 2015-06-04
EP2856128B1 (en) 2016-09-14
JP2015518168A (ja) 2015-06-25
EP2856128A1 (en) 2015-04-08
US9562872B2 (en) 2017-02-07
JP6129304B2 (ja) 2017-05-17
WO2013180936A1 (en) 2013-12-05

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