JP6129304B2 - 湿度センサ及びセンサ素子 - Google Patents

湿度センサ及びセンサ素子 Download PDF

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Publication number
JP6129304B2
JP6129304B2 JP2015515019A JP2015515019A JP6129304B2 JP 6129304 B2 JP6129304 B2 JP 6129304B2 JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015515019 A JP2015515019 A JP 2015515019A JP 6129304 B2 JP6129304 B2 JP 6129304B2
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conductive electrode
humidity sensor
sensor element
humidity
nonporous
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JP2015515019A
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English (en)
Japanese (ja)
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JP2015518168A5 (enExample
JP2015518168A (ja
Inventor
ステファン エイチ． グリスカ，
ステファン エイチ． グリスカ，
クシシュトフ エー． レウィンスキ，
クシシュトフ エー． レウィンスキ，
マイケル シー． パラツォット，
マイケル シー． パラツォット，
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2015518168A5 publication Critical patent/JP2015518168A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2015515019A 2012-05-29 2013-05-13 湿度センサ及びセンサ素子 Active JP6129304B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261652496P 2012-05-29 2012-05-29
US61/652,496 2012-05-29
PCT/US2013/040709 WO2013180936A1 (en) 2012-05-29 2013-05-13 Humidity sensor and sensor element

Publications (3)

Publication Number Publication Date
JP2015518168A JP2015518168A (ja) 2015-06-25
JP2015518168A5 JP2015518168A5 (enExample) 2016-06-30
JP6129304B2 true JP6129304B2 (ja) 2017-05-17

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ID=48538062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515019A Active JP6129304B2 (ja) 2012-05-29 2013-05-13 湿度センサ及びセンサ素子

Country Status (5)

Country Link
US (1) US9562872B2 (enExample)
EP (1) EP2856128B1 (enExample)
JP (1) JP6129304B2 (enExample)
CN (1) CN104487831B (enExample)
WO (1) WO2013180936A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US11056365B2 (en) * 2017-09-27 2021-07-06 Taiwan Semiconductor Manufacturing Co., Ltd. Fault detection method in semiconductor fabrication facility
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP4027417A1 (en) 2021-01-07 2022-07-13 AVL List GmbH Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system
CN118706911B (zh) * 2024-08-29 2024-11-15 太原科技大学 一种平行板电容器式介电传感器及其应用

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JPS57202405A (en) 1981-06-03 1982-12-11 Sharp Corp Wick raising device
US4520341A (en) * 1981-12-08 1985-05-28 Sharp Kabushiki Kaisha Moisture responsive element with crosslinked organic membrane and protective layering
JPS5991355A (ja) * 1982-11-16 1984-05-26 Murata Mfg Co Ltd 湿度センサ
JPS59202052A (ja) * 1983-04-30 1984-11-15 Sharp Corp 感湿素子
JPS6016451A (ja) 1983-07-08 1985-01-28 Matsushita Electronics Corp 樹脂封止型半導体装置の製造方法
JPH0640092B2 (ja) * 1983-08-09 1994-05-25 工業技術院長 湿度測定方法
JPS61176844A (ja) * 1985-02-01 1986-08-08 Nisshinbo Ind Inc 感湿素子
US4662220A (en) 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
JPH01213564A (ja) * 1988-02-23 1989-08-28 Japan Gore Tex Inc 感湿素子およびその製造法
JPH0212047A (ja) * 1988-06-30 1990-01-17 Toshiba Corp 容量変化型感湿素子およびその製造方法
JPH065216B2 (ja) 1988-07-26 1994-01-19 工業技術院長 静電容量変化型感湿素子の製造方法
DE3919864A1 (de) 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co Kapazitiver feuchtesensor
US5131990A (en) * 1989-07-27 1992-07-21 Texas Instruments Incorporated Fluoropolymer humidity sensors
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JP3630306B2 (ja) * 2001-02-23 2005-03-16 株式会社豊田中央研究所 多官能化電解質及びこれを用いた電気化学デバイス並びに多官能化電解質の製造方法
WO2004078830A1 (ja) 2003-03-04 2004-09-16 Eamex Corporation 変形性高強度ポリピロールフィルム
US7071271B2 (en) 2003-10-30 2006-07-04 3M Innovative Properties Company Aqueous emulsion polymerization of functionalized fluoromonomers
JP2006105628A (ja) * 2004-09-30 2006-04-20 Tdk Corp 湿度センサ素子
JP2007139447A (ja) * 2005-11-15 2007-06-07 Shinshu Univ 薄膜の透湿度測定装置および透湿度測定方法
CN100579996C (zh) 2007-01-12 2010-01-13 山东东岳神舟新材料有限公司 带有磺酰氟及醚端基侧基的氟树脂及其合成方法与应用
KR20100065302A (ko) * 2007-07-27 2010-06-16 이 아이 듀폰 디 네모아 앤드 캄파니 무기 나노입자를 포함하는 전기 전도성 중합체의 수성 분산물
WO2009045733A2 (en) * 2007-10-05 2009-04-09 3M Innovative Properties Company Organic chemical sensor comprising microporous polymer, and method of use
KR101476487B1 (ko) 2007-10-05 2014-12-24 쓰리엠 이노베이티브 프로퍼티즈 컴파니 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
US9419300B2 (en) 2010-04-16 2016-08-16 3M Innovative Properties Company Proton conducting materials
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
EP2622334B1 (en) 2010-09-30 2016-05-25 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
US20140025326A1 (en) 2011-04-13 2014-01-23 3M Innovative Properties Company Electronic device including calibration information and method of using the same
CN103477215B (zh) 2011-04-13 2015-07-29 3M创新有限公司 检测挥发性有机化合物的方法
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
JP5908069B2 (ja) * 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子

Also Published As

Publication number Publication date
CN104487831A (zh) 2015-04-01
US20150153296A1 (en) 2015-06-04
CN104487831B (zh) 2016-09-07
EP2856128B1 (en) 2016-09-14
JP2015518168A (ja) 2015-06-25
EP2856128A1 (en) 2015-04-08
US9562872B2 (en) 2017-02-07
WO2013180936A1 (en) 2013-12-05

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