JP2014516165A5 - - Google Patents

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Publication number
JP2014516165A5
JP2014516165A5 JP2014514495A JP2014514495A JP2014516165A5 JP 2014516165 A5 JP2014516165 A5 JP 2014516165A5 JP 2014514495 A JP2014514495 A JP 2014514495A JP 2014514495 A JP2014514495 A JP 2014514495A JP 2014516165 A5 JP2014516165 A5 JP 2014516165A5
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JP
Japan
Prior art keywords
conductive electrode
humidity sensor
sensor element
conductive
transmissive
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JP2014514495A
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English (en)
Japanese (ja)
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JP2014516165A (ja
JP5908069B2 (ja
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Priority claimed from PCT/US2012/039996 external-priority patent/WO2012170248A1/en
Publication of JP2014516165A publication Critical patent/JP2014516165A/ja
Publication of JP2014516165A5 publication Critical patent/JP2014516165A5/ja
Application granted granted Critical
Publication of JP5908069B2 publication Critical patent/JP5908069B2/ja
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JP2014514495A 2011-06-08 2012-05-30 湿度センサ及びそのためのセンサ素子 Active JP5908069B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161494578P 2011-06-08 2011-06-08
US61/494,578 2011-06-08
PCT/US2012/039996 WO2012170248A1 (en) 2011-06-08 2012-05-30 Humidity sensor and sensor element therefor

Publications (3)

Publication Number Publication Date
JP2014516165A JP2014516165A (ja) 2014-07-07
JP2014516165A5 true JP2014516165A5 (enExample) 2015-07-16
JP5908069B2 JP5908069B2 (ja) 2016-04-26

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ID=46298670

Family Applications (1)

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JP2014514495A Active JP5908069B2 (ja) 2011-06-08 2012-05-30 湿度センサ及びそのためのセンサ素子

Country Status (6)

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US (1) US9599583B2 (enExample)
EP (1) EP2718706B1 (enExample)
JP (1) JP5908069B2 (enExample)
KR (1) KR101922035B1 (enExample)
CN (1) CN103547915B (enExample)
WO (1) WO2012170248A1 (enExample)

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US10466201B2 (en) 2018-02-01 2019-11-05 FPG Industries Ohio, Inc. Complex impedance moisture sensor and sensing method
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
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KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서

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