JP2014516165A5 - - Google Patents

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Publication number
JP2014516165A5
JP2014516165A5 JP2014514495A JP2014514495A JP2014516165A5 JP 2014516165 A5 JP2014516165 A5 JP 2014516165A5 JP 2014514495 A JP2014514495 A JP 2014514495A JP 2014514495 A JP2014514495 A JP 2014514495A JP 2014516165 A5 JP2014516165 A5 JP 2014516165A5
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JP
Japan
Prior art keywords
conductive electrode
humidity sensor
sensor element
conductive
transmissive
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JP2014514495A
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English (en)
Japanese (ja)
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JP5908069B2 (ja
JP2014516165A (ja
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Priority claimed from PCT/US2012/039996 external-priority patent/WO2012170248A1/en
Publication of JP2014516165A publication Critical patent/JP2014516165A/ja
Publication of JP2014516165A5 publication Critical patent/JP2014516165A5/ja
Application granted granted Critical
Publication of JP5908069B2 publication Critical patent/JP5908069B2/ja
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JP2014514495A 2011-06-08 2012-05-30 湿度センサ及びそのためのセンサ素子 Active JP5908069B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161494578P 2011-06-08 2011-06-08
US61/494,578 2011-06-08
PCT/US2012/039996 WO2012170248A1 (en) 2011-06-08 2012-05-30 Humidity sensor and sensor element therefor

Publications (3)

Publication Number Publication Date
JP2014516165A JP2014516165A (ja) 2014-07-07
JP2014516165A5 true JP2014516165A5 (enExample) 2015-07-16
JP5908069B2 JP5908069B2 (ja) 2016-04-26

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Family Applications (1)

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JP2014514495A Active JP5908069B2 (ja) 2011-06-08 2012-05-30 湿度センサ及びそのためのセンサ素子

Country Status (6)

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US (1) US9599583B2 (enExample)
EP (1) EP2718706B1 (enExample)
JP (1) JP5908069B2 (enExample)
KR (1) KR101922035B1 (enExample)
CN (1) CN103547915B (enExample)
WO (1) WO2012170248A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
WO2012141883A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of using an absorptive sensor element
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
EP2856128B1 (en) 2012-05-29 2016-09-14 3M Innovative Properties Company Humidity sensor and sensor element
JP6289454B2 (ja) 2012-06-25 2018-03-07 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びその使用方法
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
US9506887B2 (en) 2014-12-08 2016-11-29 Symbol Technologies, Llc Field replaceable desiccant cartridge and device, method and system therefor
EP3259581B1 (en) * 2015-02-17 2020-01-29 Honeywell International Inc. Humidity sensor and method for manufacturing the sensor
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9983171B2 (en) * 2015-07-28 2018-05-29 Ppg Industries Ohio, Inc. Aerospace transparency having moisture sensors
CN109313120B (zh) * 2016-03-30 2021-11-19 吉林大学 湿度传感器及其用途
RU2647168C2 (ru) * 2016-07-19 2018-03-14 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашский государственный университет имени И.Н. Ульянова" Датчик влажности
EP3646016B1 (de) * 2017-06-28 2025-01-15 E+E Elektronik Ges.m.b.H. Sensorvorrichtung zur kapazitiven feuchtemessung
US10466201B2 (en) 2018-02-01 2019-11-05 FPG Industries Ohio, Inc. Complex impedance moisture sensor and sensing method
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
FR3098914B1 (fr) * 2019-07-19 2021-09-24 St Microelectronics Rousset Procede de detection d’humidite dans un circuit integre et circuit integre associe

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2016699A (en) 1978-03-15 1979-09-26 Dow Chemical Co Determining quantitatively the concentration of chemical compounds in afluid
DE2848034A1 (de) * 1978-11-06 1980-05-14 Siemens Ag Kapazitiver feuchtefuehler
JPS61264247A (ja) 1985-05-17 1986-11-22 Agency Of Ind Science & Technol 感湿素子の製造法
US4662220A (en) * 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
US4681855A (en) * 1985-08-05 1987-07-21 The United States Of America As Represented By The Secretary Of Commerce Humidity sensing and measurement employing halogenated organic polymer membranes
US4858063A (en) 1987-12-31 1989-08-15 California Institute Of Technology Spiral configuration of electrodes and dielectric material for sensing an environmental property
US4920451A (en) * 1988-05-23 1990-04-24 Yamatake-Honeywell Co., Ltd. Moisture-sensitive element
DE3919864A1 (de) * 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co Kapazitiver feuchtesensor
US5014908A (en) 1989-11-27 1991-05-14 Emerson Electric Co. Control circuit using a sulphonated fluorocarbon humidity sensor
CN1016896B (zh) 1989-12-26 1992-06-03 华东师范大学 一种温湿双功能敏感薄膜元件及其制造方法
US5036704A (en) * 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
CN2080670U (zh) * 1990-11-27 1991-07-10 北京工业大学 电容式有机膜湿度传感器
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
JPH06281610A (ja) 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
US5408381A (en) * 1994-04-28 1995-04-18 Johnson Service Company Capacitance humidity sensor
DE10002707A1 (de) 2000-01-22 2001-08-02 Bosch Gmbh Robert Gassensor
EP1369683A4 (en) * 2001-03-13 2008-06-18 Tdk Corp MOISTURE SENSOR ELEMENT AND METHOD FOR THE PRODUCTION THEREOF
US6724612B2 (en) * 2002-07-09 2004-04-20 Honeywell International Inc. Relative humidity sensor with integrated signal conditioning
US20040036394A1 (en) * 2002-08-21 2004-02-26 3M Innovative Properties Company Process for preparing multi-layer proton exchange membranes and membrane electrode assemblies
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
US7348088B2 (en) 2002-12-19 2008-03-25 3M Innovative Properties Company Polymer electrolyte membrane
TWI242639B (en) * 2003-10-21 2005-11-01 Ind Tech Res Inst Humidity sensor element, device and method for manufacturing thereof
US7285349B2 (en) * 2003-10-30 2007-10-23 3M Innovative Properties Company Polymer electrolyte membrane and method of making
US7060738B2 (en) * 2003-12-11 2006-06-13 3M Innovative Properties Company Polymer electrolytes crosslinked by ultraviolet radiation
JP2006250579A (ja) 2005-03-08 2006-09-21 Denso Corp 湿度センサの検査装置及び特性調整方法
CN1327215C (zh) * 2005-03-08 2007-07-18 东南大学 Cmos工艺兼容的相对湿度传感器
JP2006071647A (ja) * 2005-09-26 2006-03-16 Nippon Soken Inc 湿度センサ用感湿素子
DE102006033251A1 (de) * 2006-07-18 2008-02-07 Testo Ag Schutzeinrichtung für einen Feuchtesensor in aggresiver Atmosphäre
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
US7906223B2 (en) 2006-09-11 2011-03-15 3M Innovative Properties Company Permeable nanoparticle reflector
US8378694B2 (en) 2007-10-05 2013-02-19 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
KR20100099105A (ko) 2007-10-05 2010-09-10 쓰리엠 이노베이티브 프로퍼티즈 컴파니 미공성 중합체를 포함하는 유기 화학적 센서, 및 사용 방법
CN101447576A (zh) * 2007-11-27 2009-06-03 思柏科技股份有限公司 具湿度感测装置的燃料电池
BRPI0918200A2 (pt) 2008-12-23 2015-12-08 3M Innovative Properties Co elemento de detecção e método de detecção de analitos químicos orgânicos
DE212010000021U1 (de) 2009-01-29 2011-10-24 3M Innovative Properties Company Überwachungsvorrichtung (Monitor) zur optischen Detektion von organischen Analyten
CN102460119B (zh) 2009-05-22 2015-01-28 3M创新有限公司 多层比色传感器
KR101777078B1 (ko) 2009-05-22 2017-09-08 쓰리엠 이노베이티브 프로퍼티즈 컴파니 다층 비색 센서 어레이
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
US9018060B2 (en) 2010-06-15 2015-04-28 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
CN101949878B (zh) * 2010-09-03 2013-05-01 兰州交通大学 一种聚酰亚胺膜微型快速响应湿度传感元件及其制作方法
WO2012044419A1 (en) 2010-09-30 2012-04-05 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
JP6016887B2 (ja) 2011-04-13 2016-10-26 スリーエム イノベイティブ プロパティズ カンパニー 校正情報を含む電子素子及びその使用方法
KR20140026469A (ko) 2011-04-13 2014-03-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서

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