CN103547915B - 湿度传感器及其传感器元件 - Google Patents

湿度传感器及其传感器元件 Download PDF

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Publication number
CN103547915B
CN103547915B CN201280024812.9A CN201280024812A CN103547915B CN 103547915 B CN103547915 B CN 103547915B CN 201280024812 A CN201280024812 A CN 201280024812A CN 103547915 B CN103547915 B CN 103547915B
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China
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humidity sensor
conductive electrode
sensor element
permeable
atresia
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Expired - Fee Related
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CN201280024812.9A
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English (en)
Chinese (zh)
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CN103547915A (zh
Inventor
S·H·吉尔斯卡
M·C·帕拉佐托
K·A·莱温斯基
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/048—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance for determining moisture content of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN201280024812.9A 2011-06-08 2012-05-30 湿度传感器及其传感器元件 Expired - Fee Related CN103547915B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161494578P 2011-06-08 2011-06-08
US61/494,578 2011-06-08
PCT/US2012/039996 WO2012170248A1 (en) 2011-06-08 2012-05-30 Humidity sensor and sensor element therefor

Publications (2)

Publication Number Publication Date
CN103547915A CN103547915A (zh) 2014-01-29
CN103547915B true CN103547915B (zh) 2015-11-25

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US (1) US9599583B2 (enExample)
EP (1) EP2718706B1 (enExample)
JP (1) JP5908069B2 (enExample)
KR (1) KR101922035B1 (enExample)
CN (1) CN103547915B (enExample)
WO (1) WO2012170248A1 (enExample)

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US9658198B2 (en) 2011-12-13 2017-05-23 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
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JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
US9506887B2 (en) * 2014-12-08 2016-11-29 Symbol Technologies, Llc Field replaceable desiccant cartridge and device, method and system therefor
US10677747B2 (en) * 2015-02-17 2020-06-09 Honeywell International Inc. Humidity sensor
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9983171B2 (en) * 2015-07-28 2018-05-29 Ppg Industries Ohio, Inc. Aerospace transparency having moisture sensors
WO2017165907A1 (en) * 2016-03-30 2017-10-05 University Of South Australia Humidity sensors and uses thereof
RU2647168C2 (ru) * 2016-07-19 2018-03-14 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашский государственный университет имени И.Н. Ульянова" Датчик влажности
EP3646016B1 (de) * 2017-06-28 2025-01-15 E+E Elektronik Ges.m.b.H. Sensorvorrichtung zur kapazitiven feuchtemessung
US10466201B2 (en) 2018-02-01 2019-11-05 FPG Industries Ohio, Inc. Complex impedance moisture sensor and sensing method
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
FR3098914B1 (fr) * 2019-07-19 2021-09-24 St Microelectronics Rousset Procede de detection d’humidite dans un circuit integre et circuit integre associe

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CN101447576A (zh) * 2007-11-27 2009-06-03 思柏科技股份有限公司 具湿度感测装置的燃料电池
CN101949878A (zh) * 2010-09-03 2011-01-19 兰州交通大学 一种聚酰亚胺膜微型快速响应湿度传感元件及其制作方法

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Also Published As

Publication number Publication date
EP2718706B1 (en) 2015-03-11
CN103547915A (zh) 2014-01-29
KR101922035B1 (ko) 2018-11-26
WO2012170248A1 (en) 2012-12-13
JP5908069B2 (ja) 2016-04-26
JP2014516165A (ja) 2014-07-07
US9599583B2 (en) 2017-03-21
KR20140040182A (ko) 2014-04-02
EP2718706A1 (en) 2014-04-16
US20140076048A1 (en) 2014-03-20

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