JP2015515738A5 - - Google Patents

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Publication number
JP2015515738A5
JP2015515738A5 JP2014550210A JP2014550210A JP2015515738A5 JP 2015515738 A5 JP2015515738 A5 JP 2015515738A5 JP 2014550210 A JP2014550210 A JP 2014550210A JP 2014550210 A JP2014550210 A JP 2014550210A JP 2015515738 A5 JP2015515738 A5 JP 2015515738A5
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JP
Japan
Prior art keywords
liquid
optical
immersion
movable below
immersion space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014550210A
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English (en)
Japanese (ja)
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JP2015515738A (ja
JP6245179B2 (ja
Filing date
Publication date
Priority claimed from US13/793,667 external-priority patent/US9323160B2/en
Application filed filed Critical
Publication of JP2015515738A publication Critical patent/JP2015515738A/ja
Publication of JP2015515738A5 publication Critical patent/JP2015515738A5/ja
Application granted granted Critical
Publication of JP6245179B2 publication Critical patent/JP6245179B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014550210A 2012-04-10 2013-03-15 露光装置、露光方法、及びデバイス製造方法 Active JP6245179B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261622235P 2012-04-10 2012-04-10
US61/622,235 2012-04-10
US13/793,667 2013-03-11
US13/793,667 US9323160B2 (en) 2012-04-10 2013-03-11 Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
PCT/JP2013/058454 WO2013153939A1 (en) 2012-04-10 2013-03-15 Liquid immersion member and exposure apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017218195A Division JP6569717B2 (ja) 2012-04-10 2017-11-13 液浸部材、露光装置、及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2015515738A JP2015515738A (ja) 2015-05-28
JP2015515738A5 true JP2015515738A5 (enExample) 2016-04-14
JP6245179B2 JP6245179B2 (ja) 2017-12-13

Family

ID=49292050

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2014550210A Active JP6245179B2 (ja) 2012-04-10 2013-03-15 露光装置、露光方法、及びデバイス製造方法
JP2017218195A Active JP6569717B2 (ja) 2012-04-10 2017-11-13 液浸部材、露光装置、及びデバイス製造方法
JP2019145187A Pending JP2019191613A (ja) 2012-04-10 2019-08-07 液浸部材、及び、露光装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2017218195A Active JP6569717B2 (ja) 2012-04-10 2017-11-13 液浸部材、露光装置、及びデバイス製造方法
JP2019145187A Pending JP2019191613A (ja) 2012-04-10 2019-08-07 液浸部材、及び、露光装置

Country Status (8)

Country Link
US (4) US9323160B2 (enExample)
EP (1) EP2836875B1 (enExample)
JP (3) JP6245179B2 (enExample)
KR (1) KR102158968B1 (enExample)
CN (2) CN104350425B (enExample)
HK (2) HK1204682A1 (enExample)
TW (3) TWI658335B (enExample)
WO (1) WO2013153939A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2009692A (en) 2011-12-07 2013-06-10 Asml Netherlands Bv A lithographic apparatus and a device manufacturing method.
US9268231B2 (en) 2012-04-10 2016-02-23 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
US9323160B2 (en) 2012-04-10 2016-04-26 Nikon Corporation Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
US9823580B2 (en) 2012-07-20 2017-11-21 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
US9568828B2 (en) 2012-10-12 2017-02-14 Nikon Corporation Exposure apparatus, exposing method, device manufacturing method, program, and recording medium
US9494870B2 (en) 2012-10-12 2016-11-15 Nikon Corporation Exposure apparatus, exposing method, device manufacturing method, program, and recording medium
US9651873B2 (en) 2012-12-27 2017-05-16 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium
US9720331B2 (en) * 2012-12-27 2017-08-01 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium
WO2015052781A1 (ja) 2013-10-08 2015-04-16 株式会社ニコン 液浸部材、露光装置及び露光方法、並びにデバイス製造方法
CN109690413B (zh) * 2016-09-12 2021-04-13 Asml荷兰有限公司 用于光刻设备的流体处理结构
WO2018141713A1 (en) * 2017-02-03 2018-08-09 Asml Netherlands B.V. Exposure apparatus
CN109856922B (zh) * 2017-11-30 2020-11-13 上海微电子装备（集团）股份有限公司 浸没流体控制装置、浸没式光刻系统与回收控制方法
US11156921B2 (en) 2017-12-15 2021-10-26 Asml Netherlands B.V. Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure
JP6575629B2 (ja) * 2018-04-04 2019-09-18 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
CN117742084A (zh) * 2020-12-25 2024-03-22 浙江启尔机电技术有限公司 一种改善浸没流场压力特性的浸液供给回收装置

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1244018C (zh) 1996-11-28 2006-03-01 株式会社尼康 曝光方法和曝光装置
US6262796B1 (en) 1997-03-10 2001-07-17 Asm Lithography B.V. Positioning device having two object holders
US6897963B1 (en) 1997-12-18 2005-05-24 Nikon Corporation Stage device and exposure apparatus
US6208407B1 (en) 1997-12-22 2001-03-27 Asm Lithography B.V. Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement
WO2001035168A1 (en) 1999-11-10 2001-05-17 Massachusetts Institute Of Technology Interference lithography utilizing phase-locked scanning beams
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
WO2002069049A2 (en) 2001-02-27 2002-09-06 Asml Us, Inc. Simultaneous imaging of two reticles
TW529172B (en) 2001-07-24 2003-04-21 Asml Netherlands Bv Imaging apparatus
TWI249082B (en) 2002-08-23 2006-02-11 Nikon Corp Projection optical system and method for photolithography and exposure apparatus and method using same
JP4488004B2 (ja) * 2003-04-09 2010-06-23 株式会社ニコン 液浸リソグラフィ流体制御システム
KR20170070264A (ko) 2003-09-03 2017-06-21 가부시키가이샤 니콘 액침 리소그래피용 유체를 제공하기 위한 장치 및 방법
TWI361450B (en) * 2003-10-31 2012-04-01 Nikon Corp Platen, stage device, exposure device and exposure method
US7589822B2 (en) 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
CN1954408B (zh) * 2004-06-04 2012-07-04 尼康股份有限公司 曝光装置、曝光方法及元件制造方法
KR101119814B1 (ko) * 2004-06-07 2012-03-06 가부시키가이샤 니콘 스테이지 장치, 노광 장치 및 노광 방법
EP1788617B1 (en) 2004-06-09 2013-04-10 Nikon Corporation Substrate holding device, exposure apparatus having the same and method for producing a device
US7423720B2 (en) 2004-11-12 2008-09-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP5005226B2 (ja) * 2005-01-31 2012-08-22 株式会社ニコン 露光装置及びデバイス製造方法、液体保持方法
KR20160135859A (ko) * 2005-01-31 2016-11-28 가부시키가이샤 니콘 노광 장치 및 디바이스 제조 방법
TWI424260B (zh) 2005-03-18 2014-01-21 尼康股份有限公司 A board member, a substrate holding device, an exposure apparatus and an exposure method, and a device manufacturing method
TW200644079A (en) * 2005-03-31 2006-12-16 Nikon Corp Exposure apparatus, exposure method, and device production method
JP2007005571A (ja) * 2005-06-24 2007-01-11 Nikon Corp 露光装置及びデバイス製造方法
US7864292B2 (en) 2005-11-16 2011-01-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7656501B2 (en) 2005-11-16 2010-02-02 Asml Netherlands B.V. Lithographic apparatus
US7804577B2 (en) * 2005-11-16 2010-09-28 Asml Netherlands B.V. Lithographic apparatus
EP1983555B1 (en) 2006-01-19 2014-05-28 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus and device manufacturing method
JP2007335662A (ja) * 2006-06-15 2007-12-27 Canon Inc 露光装置
US8004651B2 (en) 2007-01-23 2011-08-23 Nikon Corporation Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
US8237911B2 (en) 2007-03-15 2012-08-07 Nikon Corporation Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
US8068209B2 (en) 2007-03-23 2011-11-29 Nikon Corporation Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool
US8134685B2 (en) 2007-03-23 2012-03-13 Nikon Corporation Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
US8300207B2 (en) * 2007-05-17 2012-10-30 Nikon Corporation Exposure apparatus, immersion system, exposing method, and device fabricating method
JP2009088037A (ja) * 2007-09-28 2009-04-23 Nikon Corp 露光方法及びデバイス製造方法、並びに露光装置
US8451425B2 (en) * 2007-12-28 2013-05-28 Nikon Corporation Exposure apparatus, exposure method, cleaning apparatus, and device manufacturing method
US8610873B2 (en) 2008-03-17 2013-12-17 Nikon Corporation Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
US8289497B2 (en) 2008-03-18 2012-10-16 Nikon Corporation Apparatus and methods for recovering fluid in immersion lithography
US8233139B2 (en) 2008-03-27 2012-07-31 Nikon Corporation Immersion system, exposure apparatus, exposing method, and device fabricating method
JP2011086804A (ja) * 2009-10-16 2011-04-28 Nikon Corp 液浸部材、露光装置、露光方法、及びデバイス製造方法
JP5232901B2 (ja) * 2011-07-22 2013-07-10 株式会社ニコン 露光装置及びデバイス製造方法
NL2009271A (en) 2011-09-15 2013-03-18 Asml Netherlands Bv A fluid handling structure, a lithographic apparatus and a device manufacturing method.
US9323160B2 (en) * 2012-04-10 2016-04-26 Nikon Corporation Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
US9268231B2 (en) 2012-04-10 2016-02-23 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
US9823580B2 (en) 2012-07-20 2017-11-21 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
US9494870B2 (en) 2012-10-12 2016-11-15 Nikon Corporation Exposure apparatus, exposing method, device manufacturing method, program, and recording medium
US9568828B2 (en) 2012-10-12 2017-02-14 Nikon Corporation Exposure apparatus, exposing method, device manufacturing method, program, and recording medium
US9720331B2 (en) 2012-12-27 2017-08-01 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium
US9651873B2 (en) 2012-12-27 2017-05-16 Nikon Corporation Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium

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