JP2015500785A5 - - Google Patents

Download PDF

Info

Publication number
JP2015500785A5
JP2015500785A5 JP2014542831A JP2014542831A JP2015500785A5 JP 2015500785 A5 JP2015500785 A5 JP 2015500785A5 JP 2014542831 A JP2014542831 A JP 2014542831A JP 2014542831 A JP2014542831 A JP 2014542831A JP 2015500785 A5 JP2015500785 A5 JP 2015500785A5
Authority
JP
Japan
Prior art keywords
sio
feed material
feed
feedstock
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014542831A
Other languages
English (en)
Japanese (ja)
Other versions
JP6133319B2 (ja
JP2015500785A (ja
Filing date
Publication date
Priority claimed from DE102011119339A external-priority patent/DE102011119339A1/de
Application filed filed Critical
Publication of JP2015500785A publication Critical patent/JP2015500785A/ja
Publication of JP2015500785A5 publication Critical patent/JP2015500785A5/ja
Application granted granted Critical
Publication of JP6133319B2 publication Critical patent/JP6133319B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2014542831A 2011-11-25 2012-11-22 気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法 Active JP6133319B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102011119339A DE102011119339A1 (de) 2011-11-25 2011-11-25 Zerstäubungsverfahren zur Herstellung von synthetischem Quarzglas
DE102011119339.5 2011-11-25
US201161569163P 2011-12-09 2011-12-09
US61/569,163 2011-12-09
PCT/EP2012/073345 WO2013076195A1 (de) 2011-11-25 2012-11-22 Verfahren zur herstellung von synthetischem quarzglas durch abscheidung aus der dampfphase und mittels zerstäubung des flüssigen siloxaneinsatzmaterials

Publications (3)

Publication Number Publication Date
JP2015500785A JP2015500785A (ja) 2015-01-08
JP2015500785A5 true JP2015500785A5 (https=) 2015-12-03
JP6133319B2 JP6133319B2 (ja) 2017-05-24

Family

ID=48287834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014542831A Active JP6133319B2 (ja) 2011-11-25 2012-11-22 気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法

Country Status (7)

Country Link
US (1) US8984911B2 (https=)
EP (1) EP2782877B1 (https=)
JP (1) JP6133319B2 (https=)
KR (1) KR101625843B1 (https=)
CN (1) CN103946168B (https=)
DE (1) DE102011119339A1 (https=)
WO (1) WO2013076195A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011121190A1 (de) * 2011-12-16 2013-06-20 Heraeus Quarzglas Gmbh & Co. Kg OMCTS-Verdampfungsverfahren
CN104969099A (zh) 2012-09-26 2015-10-07 8797625加拿大有限公司 多层光干涉滤片
DE102013202256B3 (de) 2013-02-12 2014-07-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von Titan-dotiertem synthetischen Quarzglas und dessen Verwendung
US10464838B2 (en) * 2015-01-13 2019-11-05 Asi/Silica Machinery, Llc Enhanced particle deposition system and method
EP3424883A1 (de) * 2017-07-05 2019-01-09 Evonik Degussa GmbH Sprühverdampfung eines flüssigen rohstoffes zur herstellung von siliciumdioxid und metalloxiden
JP6793676B2 (ja) * 2018-04-02 2020-12-02 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
CN109373196A (zh) * 2018-12-05 2019-02-22 上海正帆科技股份有限公司 一种八甲基环四硅氧烷的输送及汽化系统和方法
JP7058627B2 (ja) 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
CN112028466B (zh) * 2020-09-01 2021-08-31 长飞光纤光缆股份有限公司 一种用于制备光纤预制棒的有机硅原料蒸发装置
JP7428632B2 (ja) 2020-12-14 2024-02-06 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
CN115583791B (zh) * 2022-10-18 2023-12-01 长飞光纤光缆股份有限公司 一种适用于ovd工艺的d4快速气化装置
CN117645406B (zh) * 2023-12-22 2025-08-01 湖北菲利华石英玻璃股份有限公司 一种低膨胀系数石英玻璃锭的生产方法及生产装置

Family Cites Families (93)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2552247A (en) 1949-04-08 1951-05-08 Gen Electric Preparation of organopolysiloxanes
US3629309A (en) 1956-10-12 1971-12-21 Union Carbide Corp Organosilicon compounds and processes for producing the same
US3493533A (en) 1956-10-12 1970-02-03 Union Carbide Corp Organosilicon compounds and processes for producing the same
US3274154A (en) 1962-08-02 1966-09-20 Midland Silicones Ltd Polymerization of cyclic siloxanes
US3332974A (en) 1964-01-23 1967-07-25 Gen Electric Purification of cyclic organopolysiloxanes with heat-activated metal hydrides
US4022152A (en) 1969-03-29 1977-05-10 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler Apparatus for making particulate materials, particularly oxides, hydrophobic
US3903047A (en) 1973-10-23 1975-09-02 Gen Electric Process for the production of silanol-stopped diorgano-polysiloxanes
US3978104A (en) 1974-04-24 1976-08-31 General Electric Company Process for producing diorganopolysiloxane oils
US4158092A (en) 1974-07-25 1979-06-12 Hoechst Aktiengesellschaft Process for the manufacture of vinyl chloride polymer dispersions with a low monomer content
DE2435704C3 (de) 1974-07-25 1987-06-19 Hoechst Ag, 6230 Frankfurt Verfahren und Vorrichtung zur kontinuierlichen Entfernung von Restgehalten an Monomeren aus wäßrigen Dispersionen von Polymerisaten des Vinylchlorids
US3998865A (en) 1975-03-12 1976-12-21 General Electric Company Process for the stabilization of hexamethyl-cyclotrisiloxane and the stabilized compositions resulting therefrom
US4096160A (en) 1976-04-21 1978-06-20 General Electric Company Continuous devolatilization of silanol-terminated silicone polymer
US4220460A (en) 1979-02-05 1980-09-02 Western Electric Company, Inc. Vapor delivery system and method
US5021221A (en) 1980-10-20 1991-06-04 Aero Chem Research Lab., Inc. Apparatus for producing high purity silicon from flames of sodium and silicon tetrachloride
USRE32107E (en) 1982-12-23 1986-04-08 Dow Corning Corporation Carbon-containing monolithic glasses and ceramics prepared by a sol-gel process
JPS6049033A (ja) 1983-08-29 1985-03-18 Shin Etsu Chem Co Ltd オルガノポリシロキサンの製造方法
US4704271A (en) 1984-04-03 1987-11-03 American Cyanamid Company Water-in-oil emulsion antiperspirant stick
US4892890A (en) 1984-11-01 1990-01-09 G. D. Searle And Company External analgesic compositions
CH665202A5 (de) 1985-01-03 1988-04-29 Troitsky Vladimir N Verfahren zur herstellung von feindispersem siliziumdioxid.
US4556726A (en) * 1985-01-09 1985-12-03 Union Carbide Corporation Process for converting octamethylcyclotetrasiloxane to decamethylcyclopentasiloxane
US4613380A (en) 1985-04-01 1986-09-23 Dow Corning Corporation Method for removing lipid deposits from contact lenses
US4889845A (en) 1986-06-09 1989-12-26 American Cyanamid Company Vehicle for topical application of pharmaceuticals
US4720353A (en) 1987-04-14 1988-01-19 Richardson-Vicks Inc. Stable pharmaceutical w/o emulsion composition
US4948578A (en) 1987-05-15 1990-08-14 Lever Brothers Company Transparent antiperspirant stick compositions
US5143661A (en) 1987-05-26 1992-09-01 American Cyanamid Company Silicone-hardened pharmaceutical microcapsules
US4824985A (en) 1987-06-11 1989-04-25 Dow Corning Corporation Novel route to Ca8 Si4 O12 Cl8, alkoxycyclotetrasiloxanes, aryloxycyclotetrasiloxanes, alkylcyclotetrasiloxanes and arylcyclotetrasiloxanes from wollastonite (Ca SiO3)
US4847069A (en) 1987-10-22 1989-07-11 The Procter & Gamble Company Photoprotection compositions comprising sorbohydroxamic acid and an anti-inflammatory agent
US4869897A (en) 1987-10-22 1989-09-26 The Procter & Gamble Company Photoprotection compositions comprising sorbohydroxamic acid
US5039513A (en) 1987-10-22 1991-08-13 The Procter & Gamble Company Photoprotection compositions and methods comprising sorbohydroxamic acid
US4847071A (en) 1987-10-22 1989-07-11 The Procter & Gamble Company Photoprotection compositions comprising tocopherol sorbate and an anti-inflammatory agent
US4946671A (en) 1987-10-22 1990-08-07 The Procter & Gamble Company Photoprotection compositions comprising sorbohydroxamic acid and an anti-inflammatory agent
US4847072A (en) 1987-10-22 1989-07-11 The Procter & Gamble Company Photoprotection compositions comprising tocopherol sorbate
US4954332A (en) 1987-10-22 1990-09-04 The Procter & Gamble Company Photoprotection compositions comprising tocopherol sorbate and an anti-inflammatory agent
GB8817961D0 (en) 1988-07-28 1988-09-01 Dow Corning Ltd Compositions & process for treatment of textiles
JPH0288639A (ja) 1988-09-27 1990-03-28 Shin Etsu Chem Co Ltd オルガノポリシロキサン化合物
GB8905966D0 (en) * 1989-03-15 1989-04-26 Tsl Group Plc Improved vitreous silica products
US4954335A (en) 1989-05-31 1990-09-04 Helene Curtis, Inc. Clear conditioning composition and method to impart improved properties to the hair
US5292530A (en) 1991-06-02 1994-03-08 Helene Curtis, Inc. Stable anhydrous topically-active composition and suspending agent therefor
US5110335A (en) * 1990-06-25 1992-05-05 At&T Bell Laboratories Method of glass soot deposition using ultrasonic nozzle
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
FR2666347B1 (fr) 1990-08-31 1992-12-11 Oreal Compositions de lavage a base de silicones et procede de mise en óoeuvre.
DE4029071C2 (de) 1990-09-13 1994-03-31 Massah Sobhy Ahmed Dipl Ing El Vorrichtung zum Verdampfen von flüssigen Produkten, Verfahren zum Betreiben der Vorrichtung sowie Verwendung der Vorrichtung als Dampferzeuger oder Kondensator
US5211732A (en) 1990-09-20 1993-05-18 Corning Incorporated Method for forming a porous glass preform
US5232689A (en) 1990-12-21 1993-08-03 Dow Corning Corporation Translucent antiperspirant compositions
GB9105372D0 (en) 1991-03-14 1991-05-01 Dow Corning Sa Method of making siloxane compositions
US5250278A (en) 1991-06-19 1993-10-05 Phillips Petroleum Company Method for producing a ceramic product
US5154744A (en) 1991-08-26 1992-10-13 Corning Incorporated Method of making titania-doped fused silica
US5338535A (en) 1991-10-04 1994-08-16 The Safe & Dry Company, Inc. Non-aqueous liquid powder
DE4204406C2 (de) 1992-02-14 1995-04-06 Heraeus Quarzglas Verfahren zur Herstellung eines homogenen, schlierenfreien Körpers aus Quarzglas oder aus einem hochkieselsäurehaltigen Glas durch Umformen eines stabförmigen Ausgangskörpers
US5275761A (en) 1992-04-15 1994-01-04 Helene Curtis, Inc. Conditioning shampoo composition and method of preparing and using the same
ZA931613B (en) 1992-04-15 1993-11-15 Curtis Helene Ind Inc Conditioning shampoo composition and method of preparing and using the same
US5270036A (en) 1992-10-13 1993-12-14 Dow Corning Corporation Permanent waving with silicones
US5300285A (en) 1992-10-13 1994-04-05 Dow Corning Corporation Permanent waving with silicones
US5279818A (en) 1992-10-13 1994-01-18 Dow Corning Corporation Permanent waving with silicones
US5330747A (en) 1993-02-03 1994-07-19 Dow Corning Corporation Cosmetics with enhanced durability
JPH06240000A (ja) 1993-02-17 1994-08-30 Shin Etsu Chem Co Ltd 分岐状オルガノポリシロキサンの製造方法
US5326557A (en) 1993-04-06 1994-07-05 Dow Corning Corporation Moisturizing compositions containing organosilicon compounds
JP3274737B2 (ja) 1993-04-09 2002-04-15 オリンパス光学工業株式会社 洗浄方法および洗浄スプレー装置
EP0622452B1 (en) 1993-04-29 1999-05-26 Olympus Optical Co., Ltd. Cleaning process
JP2826939B2 (ja) 1993-05-28 1998-11-18 東レ・ダウコーニング・シリコーン株式会社 ジオルガノポリシロキサンの製造方法
US5302382A (en) 1993-06-03 1994-04-12 Dow Corning Corporation Silicone containing personal care products
GB9312634D0 (en) 1993-06-18 1993-08-04 Tsl Group Plc Improvements in vitreous silica manufacture
US5473037A (en) 1993-08-18 1995-12-05 Shin-Etsu Chemical Co. Ltd. Method of producing dimethylpolysiloxanes
JP2869304B2 (ja) 1993-08-18 1999-03-10 信越化学工業株式会社 シラノール基含有オルガノポリシロキサンの製造方法
US5356451A (en) 1993-12-20 1994-10-18 Corning Incorporated Method and apparatus for vaporization of liquid reactants
US5403402A (en) 1994-01-07 1995-04-04 Dow Corning Corporation Method of removing coating from surfaces
JP3194667B2 (ja) 1994-03-26 2001-07-30 信越石英株式会社 光学用合成石英ガラス成形体及びその製造方法
US5426168A (en) 1994-04-29 1995-06-20 Dow Corning Corporation Method of preparing an organically-modified, heat-curable silicone resin and the resin produced thereby
US5632797A (en) * 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
DE19501733C1 (de) 1995-01-20 1996-05-15 Heraeus Quarzglas Vorrichtung zur Aufteilung eines Gasstromes in mehrere Teilgasströme
DE69601749T3 (de) 1995-06-07 2004-04-29 Corning Inc. Verfahren zur thermischen Behandlung und zum Konsolidieren von Vorformen aus Siliciumdioxid zur Verminderung von durch Laser hervorgerufenen optischen Defekten
US5703191A (en) * 1995-09-01 1997-12-30 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US6312656B1 (en) * 1995-12-19 2001-11-06 Corning Incorporated Method for forming silica by combustion of liquid reactants using oxygen
US5879649A (en) * 1995-12-19 1999-03-09 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US6244575B1 (en) * 1996-10-02 2001-06-12 Micron Technology, Inc. Method and apparatus for vaporizing liquid precursors and system for using same
US5979185A (en) * 1997-07-16 1999-11-09 Corning Incorporated Method and apparatus for forming silica by combustion of liquid reactants using a heater
JPH11116247A (ja) * 1997-10-09 1999-04-27 Nikon Corp 合成石英ガラス製造方法
US6546757B1 (en) * 1998-07-28 2003-04-15 Brown University Research Foundation Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing
US6705127B1 (en) * 1998-10-30 2004-03-16 Corning Incorporated Methods of manufacturing soot for optical fiber preforms and preforms made by the methods
US6598425B1 (en) * 2000-03-08 2003-07-29 Corning Incorporated Method for collecting soot
KR20040004389A (ko) 2000-10-03 2004-01-13 코닝 인코포레이티드 포토리소그라피 방법 및 시스템
EP1451386A1 (en) * 2001-12-04 2004-09-01 Primaxx, Inc. Chemical vapor deposition vaporizer
JP4158009B2 (ja) 2001-12-11 2008-10-01 信越化学工業株式会社 合成石英ガラスインゴット及び合成石英ガラスの製造方法
DE10302914B4 (de) 2003-01-24 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
US7534733B2 (en) 2004-02-23 2009-05-19 Corning Incorporated Synthetic silica glass optical material having high resistance to laser induced damage
US7589039B2 (en) 2004-12-29 2009-09-15 Corning Incorporated Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same
US7506521B2 (en) 2004-12-29 2009-03-24 Corning Incorporated High transmission synthetic silica glass and method of making same
US7506522B2 (en) 2004-12-29 2009-03-24 Corning Incorporated High refractive index homogeneity fused silica glass and method of making same
JP2006299335A (ja) * 2005-04-19 2006-11-02 Fujimori Gijutsu Kenkyusho:Kk 成膜方法及びその方法に使用する成膜装置並びに気化装置
DE102007024725B4 (de) 2007-05-25 2011-09-29 Heraeus Quarzglas Gmbh & Co. Kg Abscheidebrenner und Verfahren für dessen Herstellung, dessen Verwendung in einer Brenneranordnung sowie Verfahren zur Herstellung eines Rohlings aus synthetischem Quarzglas unter Einsatz der Brenneranordnung
EP2072644A1 (en) 2007-12-21 2009-06-24 ETH Zürich, ETH Transfer Device and method for the electrochemical deposition of chemical compounds and alloys with controlled composition and or stoichiometry
US20120276291A1 (en) 2011-04-28 2012-11-01 Bird Chester D Methods and Apparatuses for Reducing Gelation of Glass Precursor Materials During Vaporization

Similar Documents

Publication Publication Date Title
JP2015500785A5 (https=)
JP6138145B2 (ja) 合成石英ガラスの製造方法
JP6133319B2 (ja) 気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法
JP6080861B2 (ja) スート法に従って合成石英ガラスを製造する方法
JP5935882B2 (ja) ガラス微粒子堆積体の製造方法およびガラス母材の製造方法
JP2015505291A5 (https=)
JP2015504408A5 (https=)
US20050205215A1 (en) Apparatus for the evaporation of aqueous organic liquids and the production of powder pre-forms in flame hydrolysis processes
CN103946167B (zh) 通过将二氧化硅灰料体由蒸汽相沉积在基底上制造合成石英玻璃的方法
CN104066693B (zh) 通过将二氧化硅灰料体由蒸汽相沉积在基底上制造合成石英玻璃的方法
KR101818830B1 (ko) 티타늄-도핑된 합성 석영 유리의 생산방법
CN2539749Y (zh) 化学汽相沉积前质体的汽化器
CN112028466B (zh) 一种用于制备光纤预制棒的有机硅原料蒸发装置
JP2015093816A (ja) ガラス微粒子堆積体の製造方法およびガラス母材の製造方法
CN112547001B (zh) 一种用于气相合成纳米材料的供料系统
CN202290053U (zh) 热敏性液体汽化设备
CN203373423U (zh) 一种喷雾燃烧制备薄膜和喷涂图案的设备
JP2022094218A (ja) 多孔質ガラス母材の製造方法及び製造装置
JP6086168B2 (ja) ガラス微粒子堆積体の製造方法およびガラス母材の製造方法
JP3017724B1 (ja) シリカガラスの製造装置
JP2022073751A (ja) 多孔質ガラス母材の製造方法及び製造装置
WO2012039227A1 (ja) ガラス母材の製造方法