JP2015118969A5 - - Google Patents
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- JP2015118969A5 JP2015118969A5 JP2013259848A JP2013259848A JP2015118969A5 JP 2015118969 A5 JP2015118969 A5 JP 2015118969A5 JP 2013259848 A JP2013259848 A JP 2013259848A JP 2013259848 A JP2013259848 A JP 2013259848A JP 2015118969 A5 JP2015118969 A5 JP 2015118969A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transport
- support block
- shaft
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 29
- 230000032258 transport Effects 0.000 claims description 28
- 230000001105 regulatory Effects 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 230000001680 brushing Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013259848A JP6315547B2 (ja) | 2013-12-17 | 2013-12-17 | 基板処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013259848A JP6315547B2 (ja) | 2013-12-17 | 2013-12-17 | 基板処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015118969A JP2015118969A (ja) | 2015-06-25 |
JP2015118969A5 true JP2015118969A5 (zh) | 2017-01-19 |
JP6315547B2 JP6315547B2 (ja) | 2018-04-25 |
Family
ID=53531485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013259848A Active JP6315547B2 (ja) | 2013-12-17 | 2013-12-17 | 基板処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6315547B2 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018108892A (ja) * | 2016-12-28 | 2018-07-12 | 芝浦メカトロニクス株式会社 | 浮上搬送装置および基板処理装置 |
KR101805357B1 (ko) * | 2017-05-02 | 2017-12-06 | 김문환 | 노즐을 구비한 세탁물 이송장치 |
KR102404501B1 (ko) * | 2019-07-25 | 2022-06-07 | 시바우라 메카트로닉스 가부시끼가이샤 | 기판 반송 장치 및 기판 처리 장치 |
JP7056972B2 (ja) * | 2020-06-04 | 2022-04-19 | 株式会社ケミトロン | 基板処理装置 |
JP7312738B2 (ja) * | 2020-12-11 | 2023-07-21 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
CN114823443A (zh) * | 2021-01-22 | 2022-07-29 | 芝浦机械电子装置株式会社 | 基板搬送装置以及基板处理装置 |
JP7324823B2 (ja) * | 2021-01-22 | 2023-08-10 | 芝浦メカトロニクス株式会社 | 基板搬送装置及び基板処理装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09132309A (ja) * | 1995-11-09 | 1997-05-20 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
JPH09232268A (ja) * | 1996-02-19 | 1997-09-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JPH10314635A (ja) * | 1997-05-19 | 1998-12-02 | Hitachi Ltd | 塗布装置 |
JP3926593B2 (ja) * | 2001-09-14 | 2007-06-06 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4476101B2 (ja) * | 2004-11-09 | 2010-06-09 | 東京エレクトロン株式会社 | 基板処理装置及び平流し型基板搬送装置 |
JP2006256768A (ja) * | 2005-03-16 | 2006-09-28 | Sharp Corp | 基板搬送装置、基板処理装置及び平面表示装置 |
JP5502443B2 (ja) * | 2009-12-05 | 2014-05-28 | 芝浦メカトロニクス株式会社 | 基板の搬送装置 |
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2013
- 2013-12-17 JP JP2013259848A patent/JP6315547B2/ja active Active
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