JP2015114381A - 反射防止機能を有する部材およびその製造方法 - Google Patents

反射防止機能を有する部材およびその製造方法 Download PDF

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Publication number
JP2015114381A
JP2015114381A JP2013254257A JP2013254257A JP2015114381A JP 2015114381 A JP2015114381 A JP 2015114381A JP 2013254257 A JP2013254257 A JP 2013254257A JP 2013254257 A JP2013254257 A JP 2013254257A JP 2015114381 A JP2015114381 A JP 2015114381A
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JP
Japan
Prior art keywords
aluminum oxide
film
antireflection function
base material
antireflection
Prior art date
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Pending
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JP2013254257A
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English (en)
Japanese (ja)
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JP2015114381A5 (enExample
Inventor
昌平 仙波
Shohei Semba
昌平 仙波
末木　英人
Hideto Sueki
英人 末木
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2013254257A priority Critical patent/JP2015114381A/ja
Priority to TW103141593A priority patent/TWI632392B/zh
Priority to KR1020140174955A priority patent/KR101833586B1/ko
Priority to CN201410743609.8A priority patent/CN104698512B/zh
Publication of JP2015114381A publication Critical patent/JP2015114381A/ja
Publication of JP2015114381A5 publication Critical patent/JP2015114381A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Laminated Bodies (AREA)
JP2013254257A 2013-12-09 2013-12-09 反射防止機能を有する部材およびその製造方法 Pending JP2015114381A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013254257A JP2015114381A (ja) 2013-12-09 2013-12-09 反射防止機能を有する部材およびその製造方法
TW103141593A TWI632392B (zh) 2013-12-09 2014-12-01 具有反射防止功能之構件及其製造方法
KR1020140174955A KR101833586B1 (ko) 2013-12-09 2014-12-08 반사 방지 기능을 갖는 부재 및 그 제조 방법
CN201410743609.8A CN104698512B (zh) 2013-12-09 2014-12-08 具有防反射功能的部件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013254257A JP2015114381A (ja) 2013-12-09 2013-12-09 反射防止機能を有する部材およびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018001859A Division JP2018106173A (ja) 2018-01-10 2018-01-10 反射防止機能を有する部材の製造方法

Publications (2)

Publication Number Publication Date
JP2015114381A true JP2015114381A (ja) 2015-06-22
JP2015114381A5 JP2015114381A5 (enExample) 2016-12-15

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Family Applications (1)

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JP2013254257A Pending JP2015114381A (ja) 2013-12-09 2013-12-09 反射防止機能を有する部材およびその製造方法

Country Status (4)

Country Link
JP (1) JP2015114381A (enExample)
KR (1) KR101833586B1 (enExample)
CN (1) CN104698512B (enExample)
TW (1) TWI632392B (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019043006A (ja) * 2017-08-31 2019-03-22 富士フイルム株式会社 導電性基材、導電性基材の製造方法、積層体およびタッチパネル
WO2019225518A1 (ja) * 2018-05-22 2019-11-28 富士フイルム株式会社 凹凸構造付き基体の製造方法
JP2020537188A (ja) * 2017-10-11 2020-12-17 アールト ユニバーシティ ファンデーション エスアール 物体の被膜
CN113985504A (zh) * 2021-12-27 2022-01-28 诚瑞光学(苏州)有限公司 光学镜片
US11714212B1 (en) * 2020-09-14 2023-08-01 Apple Inc. Conformal optical coatings for non-planar substrates
US12460789B2 (en) 2023-09-20 2025-11-04 Nichia Corporation Light transmissive member, light source device, method of producing light transmissive member, and method of producing light source device
US12619015B2 (en) 2022-08-18 2026-05-05 Nichia Corporation Method of manufacturing optical member

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102388422B1 (ko) * 2017-08-30 2022-04-20 현대자동차주식회사 차량용 투명 기판 및 그 제조방법
CN107793041A (zh) * 2017-09-29 2018-03-13 广东星弛光电科技有限公司 具有耐磨氧化铝镀膜层的钢化玻璃的制备方法
CN110600567A (zh) * 2018-05-25 2019-12-20 中国电子科技集团公司第十八研究所 一种空间太阳电池用全反射玻璃盖片及其制备方法
WO2020196620A1 (ja) * 2019-03-27 2020-10-01 株式会社クラレ 微細凹凸パターンフィルムおよびヘッドアップディスプレイ装置
CN114578462A (zh) * 2021-03-22 2022-06-03 浙江舜宇光学有限公司 光学成像镜头
FI20245571A1 (en) * 2024-05-08 2025-11-09 Beneq Oy An anti-reflective coating on a surface of a substrate

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JP2002343790A (ja) * 2001-05-21 2002-11-29 Nec Corp 金属化合物薄膜の気相堆積方法及び半導体装置の製造方法
JP2011523444A (ja) * 2008-05-27 2011-08-11 ピコサン オーワイ 堆積反応炉のための方法および装置
JP2011241421A (ja) * 2010-05-17 2011-12-01 Toppan Printing Co Ltd ガスバリア性積層体の製造方法およびガスバリア性積層体
JP2011251890A (ja) * 2010-05-07 2011-12-15 Canon Inc 酸化アルミニウム前駆体ゾル、光学用部材および光学用部材の製造方法
JP2012198330A (ja) * 2011-03-18 2012-10-18 Fujifilm Corp 光学部材及びその製造方法

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JP2004176081A (ja) * 2002-11-25 2004-06-24 Matsushita Electric Works Ltd 原子層堆積法による光学多層膜の製造方法
CN101479777B (zh) * 2006-05-31 2011-07-06 株式会社半导体能源研究所 显示设备和电子装置
US8202582B2 (en) * 2006-06-30 2012-06-19 Oji Paper Co., Ltd. Single particle film etching mask and production method of single particle film etching mask, production method of micro structure with use of single particle film etching mask and micro structure produced by micro structure production method
JP5279344B2 (ja) * 2007-06-06 2013-09-04 キヤノン株式会社 光学素子の製造方法
WO2011065429A1 (ja) * 2009-11-27 2011-06-03 シャープ株式会社 モスアイ用型、ならびに、モスアイ用型およびモスアイ構造の作製方法
US20120207973A1 (en) * 2011-02-15 2012-08-16 Canon Kabushiki Kaisha Optical member, method of manufacturing the same, and optical system using the same
CN102560419A (zh) * 2011-11-29 2012-07-11 华东师范大学 一种氧化铝超薄薄膜的制备方法
EP2645136B1 (en) * 2012-03-29 2017-01-18 Canon Kabushiki Kaisha Optical member having textured structure and method of producing same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002343790A (ja) * 2001-05-21 2002-11-29 Nec Corp 金属化合物薄膜の気相堆積方法及び半導体装置の製造方法
JP2011523444A (ja) * 2008-05-27 2011-08-11 ピコサン オーワイ 堆積反応炉のための方法および装置
JP2011251890A (ja) * 2010-05-07 2011-12-15 Canon Inc 酸化アルミニウム前駆体ゾル、光学用部材および光学用部材の製造方法
JP2011241421A (ja) * 2010-05-17 2011-12-01 Toppan Printing Co Ltd ガスバリア性積層体の製造方法およびガスバリア性積層体
JP2012198330A (ja) * 2011-03-18 2012-10-18 Fujifilm Corp 光学部材及びその製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019043006A (ja) * 2017-08-31 2019-03-22 富士フイルム株式会社 導電性基材、導電性基材の製造方法、積層体およびタッチパネル
JP2020537188A (ja) * 2017-10-11 2020-12-17 アールト ユニバーシティ ファンデーション エスアール 物体の被膜
WO2019225518A1 (ja) * 2018-05-22 2019-11-28 富士フイルム株式会社 凹凸構造付き基体の製造方法
US11714212B1 (en) * 2020-09-14 2023-08-01 Apple Inc. Conformal optical coatings for non-planar substrates
CN113985504A (zh) * 2021-12-27 2022-01-28 诚瑞光学(苏州)有限公司 光学镜片
US12619015B2 (en) 2022-08-18 2026-05-05 Nichia Corporation Method of manufacturing optical member
US12460789B2 (en) 2023-09-20 2025-11-04 Nichia Corporation Light transmissive member, light source device, method of producing light transmissive member, and method of producing light source device

Also Published As

Publication number Publication date
TW201534956A (zh) 2015-09-16
TWI632392B (zh) 2018-08-11
CN104698512A (zh) 2015-06-10
CN104698512B (zh) 2017-09-01
KR20150067057A (ko) 2015-06-17
KR101833586B1 (ko) 2018-02-28

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