CN104698512B - 具有防反射功能的部件及其制造方法 - Google Patents
具有防反射功能的部件及其制造方法 Download PDFInfo
- Publication number
- CN104698512B CN104698512B CN201410743609.8A CN201410743609A CN104698512B CN 104698512 B CN104698512 B CN 104698512B CN 201410743609 A CN201410743609 A CN 201410743609A CN 104698512 B CN104698512 B CN 104698512B
- Authority
- CN
- China
- Prior art keywords
- film
- substrate
- aluminum oxide
- convex
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 49
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 230000003667 anti-reflective effect Effects 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 97
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 57
- 238000010335 hydrothermal treatment Methods 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 26
- 238000001312 dry etching Methods 0.000 claims description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000009835 boiling Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000001027 hydrothermal synthesis Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 136
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 65
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 239000007800 oxidant agent Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000002438 flame photometric detection Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 210000000170 cell membrane Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-254257 | 2013-12-09 | ||
| JP2013254257A JP2015114381A (ja) | 2013-12-09 | 2013-12-09 | 反射防止機能を有する部材およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104698512A CN104698512A (zh) | 2015-06-10 |
| CN104698512B true CN104698512B (zh) | 2017-09-01 |
Family
ID=53345830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410743609.8A Expired - Fee Related CN104698512B (zh) | 2013-12-09 | 2014-12-08 | 具有防反射功能的部件及其制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2015114381A (enExample) |
| KR (1) | KR101833586B1 (enExample) |
| CN (1) | CN104698512B (enExample) |
| TW (1) | TWI632392B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102388422B1 (ko) * | 2017-08-30 | 2022-04-20 | 현대자동차주식회사 | 차량용 투명 기판 및 그 제조방법 |
| JP6794325B2 (ja) * | 2017-08-31 | 2020-12-02 | 富士フイルム株式会社 | 導電性基材、導電性基材の製造方法、積層体およびタッチパネル |
| CN107793041A (zh) * | 2017-09-29 | 2018-03-13 | 广东星弛光电科技有限公司 | 具有耐磨氧化铝镀膜层的钢化玻璃的制备方法 |
| JP2020537188A (ja) * | 2017-10-11 | 2020-12-17 | アールト ユニバーシティ ファンデーション エスアール | 物体の被膜 |
| JP7074849B2 (ja) * | 2018-05-22 | 2022-05-24 | 富士フイルム株式会社 | 凹凸構造付き基体の製造方法 |
| CN110600567A (zh) * | 2018-05-25 | 2019-12-20 | 中国电子科技集团公司第十八研究所 | 一种空间太阳电池用全反射玻璃盖片及其制备方法 |
| EP3951445A4 (en) * | 2019-03-27 | 2022-12-21 | Kuraray Co., Ltd. | FINE UNEVEN SAMPLE FOIL AND HEAD-UP DISPLAY DEVICE |
| US11714212B1 (en) * | 2020-09-14 | 2023-08-01 | Apple Inc. | Conformal optical coatings for non-planar substrates |
| CN114578462A (zh) * | 2021-03-22 | 2022-06-03 | 浙江舜宇光学有限公司 | 光学成像镜头 |
| CN113985504B (zh) * | 2021-12-27 | 2022-04-26 | 诚瑞光学(苏州)有限公司 | 光学镜片 |
| US12460789B2 (en) | 2023-09-20 | 2025-11-04 | Nichia Corporation | Light transmissive member, light source device, method of producing light transmissive member, and method of producing light source device |
| FI20245571A1 (en) * | 2024-05-08 | 2025-11-09 | Beneq Oy | An anti-reflective coating on a surface of a substrate |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560419A (zh) * | 2011-11-29 | 2012-07-11 | 华东师范大学 | 一种氧化铝超薄薄膜的制备方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002343790A (ja) * | 2001-05-21 | 2002-11-29 | Nec Corp | 金属化合物薄膜の気相堆積方法及び半導体装置の製造方法 |
| JP2004176081A (ja) * | 2002-11-25 | 2004-06-24 | Matsushita Electric Works Ltd | 原子層堆積法による光学多層膜の製造方法 |
| WO2007139209A1 (en) * | 2006-05-31 | 2007-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
| CN101479031B (zh) * | 2006-06-30 | 2012-11-14 | 王子制纸株式会社 | 单粒子膜蚀刻掩模及其制造方法、使用该单粒子膜蚀刻掩模的微细结构体的制造方法及通过该制造方法得到的微细结构体 |
| JP5279344B2 (ja) * | 2007-06-06 | 2013-09-04 | キヤノン株式会社 | 光学素子の製造方法 |
| US10041169B2 (en) * | 2008-05-27 | 2018-08-07 | Picosun Oy | System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor |
| US8747683B2 (en) * | 2009-11-27 | 2014-06-10 | Sharp Kabushiki Kaisha | Die for moth-eye, and method for producing die for moth-eye and moth-eye structure |
| JP5279858B2 (ja) * | 2010-05-07 | 2013-09-04 | キヤノン株式会社 | 酸化アルミニウム前駆体ゾル、および光学用部材の製造方法 |
| JP5912228B2 (ja) * | 2010-05-17 | 2016-04-27 | 凸版印刷株式会社 | ガスバリア性積層体の製造方法 |
| US20120207973A1 (en) * | 2011-02-15 | 2012-08-16 | Canon Kabushiki Kaisha | Optical member, method of manufacturing the same, and optical system using the same |
| JP5647924B2 (ja) * | 2011-03-18 | 2015-01-07 | 富士フイルム株式会社 | 光学部材の製造方法 |
| EP2645136B1 (en) * | 2012-03-29 | 2017-01-18 | Canon Kabushiki Kaisha | Optical member having textured structure and method of producing same |
-
2013
- 2013-12-09 JP JP2013254257A patent/JP2015114381A/ja active Pending
-
2014
- 2014-12-01 TW TW103141593A patent/TWI632392B/zh not_active IP Right Cessation
- 2014-12-08 KR KR1020140174955A patent/KR101833586B1/ko not_active Expired - Fee Related
- 2014-12-08 CN CN201410743609.8A patent/CN104698512B/zh not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560419A (zh) * | 2011-11-29 | 2012-07-11 | 华东师范大学 | 一种氧化铝超薄薄膜的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015114381A (ja) | 2015-06-22 |
| KR20150067057A (ko) | 2015-06-17 |
| TWI632392B (zh) | 2018-08-11 |
| CN104698512A (zh) | 2015-06-10 |
| TW201534956A (zh) | 2015-09-16 |
| KR101833586B1 (ko) | 2018-02-28 |
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| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170901 |
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| CF01 | Termination of patent right due to non-payment of annual fee |