JP2015105831A5 - - Google Patents

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JP2015105831A5
JP2015105831A5 JP2013246533A JP2013246533A JP2015105831A5 JP 2015105831 A5 JP2015105831 A5 JP 2015105831A5 JP 2013246533 A JP2013246533 A JP 2013246533A JP 2013246533 A JP2013246533 A JP 2013246533A JP 2015105831 A5 JP2015105831 A5 JP 2015105831A5
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Japan
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noise
multiple exposure
usually
ratio
necessary
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JP2013246533A
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Japanese (ja)
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JP6025211B2 (ja
JP2015105831A (ja
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Priority to JP2013246533A priority Critical patent/JP6025211B2/ja
Priority claimed from JP2013246533A external-priority patent/JP6025211B2/ja
Priority to GB1419384.1A priority patent/GB2521907B/en
Priority to US14/538,837 priority patent/US9658174B2/en
Priority to DE102014117251.5A priority patent/DE102014117251A1/de
Publication of JP2015105831A publication Critical patent/JP2015105831A/ja
Publication of JP2015105831A5 publication Critical patent/JP2015105831A5/ja
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JP2013246533A 2013-11-28 2013-11-28 X線トポグラフィ装置 Active JP6025211B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013246533A JP6025211B2 (ja) 2013-11-28 2013-11-28 X線トポグラフィ装置
GB1419384.1A GB2521907B (en) 2013-11-28 2014-10-31 X-ray topography apparatus
US14/538,837 US9658174B2 (en) 2013-11-28 2014-11-12 X-ray topography apparatus
DE102014117251.5A DE102014117251A1 (de) 2013-11-28 2014-11-25 Röntgentopographievorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013246533A JP6025211B2 (ja) 2013-11-28 2013-11-28 X線トポグラフィ装置

Publications (3)

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JP2015105831A JP2015105831A (ja) 2015-06-08
JP2015105831A5 true JP2015105831A5 (enExample) 2016-01-14
JP6025211B2 JP6025211B2 (ja) 2016-11-16

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JP2013246533A Active JP6025211B2 (ja) 2013-11-28 2013-11-28 X線トポグラフィ装置

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US (1) US9658174B2 (enExample)
JP (1) JP6025211B2 (enExample)
DE (1) DE102014117251A1 (enExample)
GB (1) GB2521907B (enExample)

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DE112019004433B4 (de) 2018-09-04 2024-09-12 Sigray, Inc. System und verfahren für röntgenstrahlfluoreszenz mit filterung
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis
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JP7476039B2 (ja) 2020-09-02 2024-04-30 キオクシア株式会社 半導体装置の検査装置、及び、半導体装置の検査方法
JP2023132352A (ja) * 2022-03-10 2023-09-22 キオクシア株式会社 評価装置
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