JP2015103662A5 - - Google Patents

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Publication number
JP2015103662A5
JP2015103662A5 JP2013243124A JP2013243124A JP2015103662A5 JP 2015103662 A5 JP2015103662 A5 JP 2015103662A5 JP 2013243124 A JP2013243124 A JP 2013243124A JP 2013243124 A JP2013243124 A JP 2013243124A JP 2015103662 A5 JP2015103662 A5 JP 2015103662A5
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JP
Japan
Prior art keywords
tank
liquid
filter
circulation line
flushing liquid
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Application number
JP2013243124A
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English (en)
Japanese (ja)
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JP2015103662A (ja
JP6159651B2 (ja
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Priority to JP2013243124A priority Critical patent/JP6159651B2/ja
Priority claimed from JP2013243124A external-priority patent/JP6159651B2/ja
Priority to TW103139780A priority patent/TWI568485B/zh
Priority to KR1020140162505A priority patent/KR102314052B1/ko
Publication of JP2015103662A publication Critical patent/JP2015103662A/ja
Publication of JP2015103662A5 publication Critical patent/JP2015103662A5/ja
Application granted granted Critical
Publication of JP6159651B2 publication Critical patent/JP6159651B2/ja
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JP2013243124A 2013-11-25 2013-11-25 フィルタ洗浄方法、液処理装置及び記憶媒体 Active JP6159651B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013243124A JP6159651B2 (ja) 2013-11-25 2013-11-25 フィルタ洗浄方法、液処理装置及び記憶媒体
TW103139780A TWI568485B (zh) 2013-11-25 2014-11-17 Filter cleaning method, liquid treatment device and memory media
KR1020140162505A KR102314052B1 (ko) 2013-11-25 2014-11-20 필터 세정 방법, 액처리 장치 및 기억 매체

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013243124A JP6159651B2 (ja) 2013-11-25 2013-11-25 フィルタ洗浄方法、液処理装置及び記憶媒体

Publications (3)

Publication Number Publication Date
JP2015103662A JP2015103662A (ja) 2015-06-04
JP2015103662A5 true JP2015103662A5 (fr) 2015-12-24
JP6159651B2 JP6159651B2 (ja) 2017-07-05

Family

ID=53379138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013243124A Active JP6159651B2 (ja) 2013-11-25 2013-11-25 フィルタ洗浄方法、液処理装置及び記憶媒体

Country Status (3)

Country Link
JP (1) JP6159651B2 (fr)
KR (1) KR102314052B1 (fr)
TW (1) TWI568485B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202135914A (zh) * 2020-02-05 2021-10-01 日商東京威力科創股份有限公司 過濾器洗淨系統及過濾器洗淨方法
KR102583556B1 (ko) * 2021-01-07 2023-10-10 세메스 주식회사 처리액 공급 장치 및 처리액 공급 장치의 고형 제거 방법
JP2022148186A (ja) 2021-03-24 2022-10-06 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および配管着脱パーツ洗浄方法
KR102504552B1 (ko) 2021-09-10 2023-03-02 (주)디바이스이엔지 반도체 제조 부품의 플러싱 조건 결정 장치 및 플러싱 조건 결정 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04162627A (ja) * 1990-10-26 1992-06-08 Matsushita Electric Ind Co Ltd 薬液処理装置
JPH0516114U (ja) * 1991-08-14 1993-03-02 三菱重工業株式会社 潤滑油タンク及びラインフイルターのフラツシング回路
KR960025332U (ko) * 1994-12-26 1996-07-22 약액처리조용 여과필터
US5753135A (en) * 1995-10-23 1998-05-19 Jablonsky; Julius James Apparatus and method for recovering photoresist developers and strippers
JP4692997B2 (ja) * 1998-07-07 2011-06-01 東京エレクトロン株式会社 処理装置及び処理方法
TW514561B (en) * 2000-08-28 2002-12-21 Henkel Corp Antiplugging method and apparatus for separating multivalent metal ions from autodeposition compositions, and for regenerating ion exchange resins useful therewith
JP2003251290A (ja) * 2002-03-05 2003-09-09 Dainippon Screen Mfg Co Ltd 洗浄装置及びこれを備えた基板処理装置
JP5503602B2 (ja) * 2011-07-29 2014-05-28 東京エレクトロン株式会社 処理液供給装置、処理液供給方法、プログラム及びコンピュータ記憶媒体

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