JP2015103662A5

JP2015103662A5 -

Info

Publication number: JP2015103662A5
Application number: JP2013243124A
Authority: JP
Filing date: 2013-11-25
Publication date: 2015-12-24
Anticipated expiration: 2033-11-25

Description

液処理装置は、タンク１０２に、処理液または処理液構成成分を補充するタンク液補充部１１６を有している。タンク１０２には、タンク１０２内の処理液を廃棄するためのドレンライン１１８が設けられている。 The liquid processing apparatus includes a tank liquid replenishing unit 116 that replenishes the tank 102 with a processing liquid or a processing liquid constituent component. The tank 102 is provided with a drain line 118 for discarding the processing liquid in the tank 102.

図３の実施形態では、図１及び図２の実施形態と比較すると、第１フラッシング液充填工程においてパーティクルが拡散する範囲が広くなる。それでも、排液ライン１２０の接続点よりも下流側の循環ライン１０４と、タンクの上部領域がパーティクルにより汚染されずに済む。このため、フィルタ１０８の交換後直ちにフラッシング液をタンク１０２及び循環ライン１０４を含む循環系に循環させた場合と比較すれば、パーティクルレベルを許容範囲内に低減するために必要な時間を短縮することができる。 In the embodiment of FIG. 3, compared with the embodiment of FIGS. 1 and 2, the range in which particles diffuse in the first flushing liquid filling step is widened. Nevertheless, a circulation line 104 downstream of the connection point of the drain line 120, the upper region of the tank need not be contaminated by particles. Therefore, as compared with the case where the flushing liquid is circulated through the circulation system including the tank 102 and the circulation line 104 immediately after the replacement of the filter 108, the time required for reducing the particle level within the allowable range can be shortened. Can do.

１６処理ユニット（処理部）
１０２タンク
１０４循環ライン
１０６ポンプ
１０８フィルタ
１１８ドレンライン
１２０排液ライン 16 processing units ( processing section )
102 Tank 104 Circulation line 106 Pump 108 Filter 118 Drain line 120 Drain line

Claims

A tank for storing processing liquid; a circulation line connected to the tank; a pump for forming a flow of processing liquid from the tank to the tank and returning to the tank; and a filter interposed in the circulation line And a processing unit that performs liquid processing on the substrate using the processing liquid flowing through the circulation line. In the filter cleaning method for cleaning the filter, the filter is installed at a predetermined position of the circulation line. In this state, a flushing liquid filling step of filling the inside of the filter with the flushing liquid by supplying only a part of the circulation line and the flushing liquid to the tank,
Flushing for removing the flushing liquid from the filter by discharging the part of the circulation line and the flushing liquid supplied to the tank from the part of the circulation line or a drain line connected to the tank. A liquid discharge process;
A filter cleaning method.

In the flushing liquid filling step, filling the inside of the filter with the flushing liquid means that the flushing liquid is filled in the tank until the liquid level of the flushing liquid in the tank becomes equal to or higher than the height of the top of the internal space of the filter. The filter cleaning method according to claim 1, wherein the method is performed by supplying

In the flushing liquid filling step, filling the inside of the filter with the flushing liquid is performed while discharging the flushing liquid from the circulation line via a drain line connected to the circulation line on the downstream side of the filter. The filter cleaning method according to claim 1, wherein the flushing liquid in the tank is supplied to the filter through the circulation line by the pump.

The filter cleaning method according to any one of claims 1 to 3, wherein the flushing liquid filling step and the flushing liquid discharge step are alternately and repeatedly executed.

After performing the flushing liquid filling step and the flushing liquid discharge step at least once, storing the flushing liquid in the tank and operating the pump to circulate the flushing liquid in the circulation line;
Thereafter, stopping the circulation of the flushing liquid and discharging the flushing liquid from the drain line;
Then, a second flushing liquid filling step of filling the inside of the filter with the other flushing liquid by supplying only another flushing liquid to the tank and the tank, and
Thereafter, the separate flushing liquid supplied to the part of the circulation line and the tank is discharged from the filter by discharging the part of the circulation line or the drain line connected to the tank. A second flushing liquid discharging step of removing the flushing liquid of
The filter cleaning method according to any one of claims 1 to 4, further comprising:

A tank for storing the processing liquid;
A circulation line connected to the tank;
A pump for forming a flow of processing liquid that exits the tank and returns to the tank in the circulation line; a filter interposed in the circulation line;
A processing unit for performing liquid processing on the substrate using the processing liquid flowing through the circulation line;
A liquid processing apparatus comprising:
A control device for controlling the operation of the liquid processing apparatus;
The controller is
A flushing liquid filling step of filling the inside of the filter with the flushing liquid by supplying the flushing liquid to only a part of the circulation line and the tank while the filter is installed at a predetermined position of the circulation line; ,
Flushing for removing the flushing liquid from the filter by discharging the part of the circulation line and the flushing liquid supplied to the tank from the part of the circulation line or a drain line connected to the tank. A storage unit that stores a program for performing the filter cleaning method including a liquid discharge step, and the filter cleaning method is performed by the controller executing the program. Liquid processing equipment.

A tank for storing processing liquid; a circulation line connected to the tank; a pump for forming a flow of processing liquid from the tank to the tank and returning to the tank; and a filter interposed in the circulation line A storage medium storing a computer program for causing a liquid processing apparatus to perform a filter cleaning method with a processing unit that performs liquid processing on a substrate using processing liquid flowing in the circulation line,
The filter cleaning method comprises:
A flushing liquid filling step of filling the inside of the filter with the flushing liquid by supplying the flushing liquid to only a part of the circulation line and the tank while the filter is installed at a predetermined position of the circulation line; ,
Flushing for removing the flushing liquid from the filter by discharging the part of the circulation line and the flushing liquid supplied to the tank from the part of the circulation line or a drain line connected to the tank. A storage medium comprising a liquid discharge step.