JP2015080738A5 - - Google Patents

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Publication number
JP2015080738A5
JP2015080738A5 JP2013218718A JP2013218718A JP2015080738A5 JP 2015080738 A5 JP2015080738 A5 JP 2015080738A5 JP 2013218718 A JP2013218718 A JP 2013218718A JP 2013218718 A JP2013218718 A JP 2013218718A JP 2015080738 A5 JP2015080738 A5 JP 2015080738A5
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JP
Japan
Prior art keywords
trap
downstream
upstream
opening
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2013218718A
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English (en)
Japanese (ja)
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JP6289859B2 (ja
JP2015080738A (ja
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Priority to JP2013218718A priority Critical patent/JP6289859B2/ja
Priority claimed from JP2013218718A external-priority patent/JP6289859B2/ja
Priority to TW103135921A priority patent/TWI659123B/zh
Priority to US14/518,079 priority patent/US20150107771A1/en
Priority to KR1020140142632A priority patent/KR102301024B1/ko
Publication of JP2015080738A publication Critical patent/JP2015080738A/ja
Publication of JP2015080738A5 publication Critical patent/JP2015080738A5/ja
Application granted granted Critical
Publication of JP6289859B2 publication Critical patent/JP6289859B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013218718A 2013-10-21 2013-10-21 トラップ装置及び基板処理装置 Expired - Fee Related JP6289859B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013218718A JP6289859B2 (ja) 2013-10-21 2013-10-21 トラップ装置及び基板処理装置
TW103135921A TWI659123B (zh) 2013-10-21 2014-10-17 補集裝置及基板處理裝置
US14/518,079 US20150107771A1 (en) 2013-10-21 2014-10-20 Trap apparatus and substrate processing apparatus
KR1020140142632A KR102301024B1 (ko) 2013-10-21 2014-10-21 트랩 장치 및 기판 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013218718A JP6289859B2 (ja) 2013-10-21 2013-10-21 トラップ装置及び基板処理装置

Publications (3)

Publication Number Publication Date
JP2015080738A JP2015080738A (ja) 2015-04-27
JP2015080738A5 true JP2015080738A5 (enExample) 2016-11-04
JP6289859B2 JP6289859B2 (ja) 2018-03-07

Family

ID=52825133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013218718A Expired - Fee Related JP6289859B2 (ja) 2013-10-21 2013-10-21 トラップ装置及び基板処理装置

Country Status (4)

Country Link
US (1) US20150107771A1 (enExample)
JP (1) JP6289859B2 (enExample)
KR (1) KR102301024B1 (enExample)
TW (1) TWI659123B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106191812B (zh) * 2015-05-05 2019-01-22 中微半导体设备(上海)有限公司 化学气相沉积装置及清洁其排气口的方法
DE102015219925A1 (de) * 2015-10-14 2017-04-20 Wacker Chemie Ag Reaktor zur Abscheidung von polykristallinem Silicium
JP6628653B2 (ja) * 2016-03-17 2020-01-15 東京エレクトロン株式会社 トラップ装置及びこれを用いた排気系、並びに基板処理装置
JP6642259B2 (ja) * 2016-05-13 2020-02-05 株式会社Ihi トラップ装置
CN109097755A (zh) * 2017-06-20 2018-12-28 华邦电子股份有限公司 工艺腔室气体检测系统及其操作方法
KR101957054B1 (ko) * 2017-10-31 2019-03-11 안호상 승화정제기용 ｌｎ２ 트랩 장치
KR101957055B1 (ko) * 2017-10-31 2019-03-11 안호상 승화정제기
KR102036273B1 (ko) * 2017-12-27 2019-10-24 주식회사 미래보 반도체 공정 부산물 포집장치
KR102209205B1 (ko) * 2019-08-21 2021-02-01 주식회사 미래보 반도체 공정용 유로방향 전환식 반응부산물 포집장치
US11583793B2 (en) 2019-10-08 2023-02-21 Utica Leaseco, Llc Gas trap system having a conical inlet condensation region
JP2021186785A (ja) 2020-06-03 2021-12-13 東京エレクトロン株式会社 トラップ装置及び基板処理装置
CN113990730B (zh) * 2020-07-27 2023-10-31 中微半导体设备(上海)股份有限公司 等离子体处理装置及其中的气流调节盖和气流调节方法
US12060637B2 (en) * 2020-12-01 2024-08-13 Applied Materials, Inc. Actively cooled foreline trap to reduce throttle valve drift

Family Cites Families (15)

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JPS4944331B1 (enExample) 1971-05-31 1974-11-27
US4487618A (en) * 1982-08-19 1984-12-11 La-Man Corporation Airline vapor trap
JP2544655Y2 (ja) * 1990-11-30 1997-08-20 アマノ株式会社 ミストコレクタ
JPH0775713A (ja) * 1993-09-07 1995-03-20 Teijin Ltd 液滴除去装置
US5593479A (en) * 1995-02-02 1997-01-14 Hmi Industries, Inc. Filter system
US5669949A (en) * 1995-04-21 1997-09-23 Donaldson Company, Inc. Air filtration arrangement
US5820641A (en) * 1996-02-09 1998-10-13 Mks Instruments, Inc. Fluid cooled trap
US6093228A (en) * 1998-11-18 2000-07-25 Winbond Electronics Corp. Method and device for collecting by-products individually
US6197119B1 (en) * 1999-02-18 2001-03-06 Mks Instruments, Inc. Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
US6238514B1 (en) * 1999-02-18 2001-05-29 Mks Instruments, Inc. Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent
JP2000256856A (ja) * 1999-03-11 2000-09-19 Tokyo Electron Ltd 処理装置及び処理装置用真空排気システム及び減圧ｃｖｄ装置及び減圧ｃｖｄ装置用真空排気システム及びトラップ装置
US7857883B2 (en) * 2007-10-17 2010-12-28 Cummins Filtration Ip, Inc. Inertial gas-liquid separator with constrictable and expansible nozzle valve sidewall
DE112009003819T5 (de) * 2008-12-23 2012-06-06 Mks Instruments, Inc. Containment- bzw. Sicherheitsbehältersystem für reaktive Chemikalien
KR101024504B1 (ko) * 2009-04-01 2011-03-31 주식회사 미래보 입자 관성을 이용한 반도체 공정에서의 잔류 케미칼 및 부산물 포집장치
KR101362439B1 (ko) * 2012-03-30 2014-02-13 (주)아인스 반도체 제조용 트랩장치

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