JP2015079887A5 - - Google Patents

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Publication number
JP2015079887A5
JP2015079887A5 JP2013216754A JP2013216754A JP2015079887A5 JP 2015079887 A5 JP2015079887 A5 JP 2015079887A5 JP 2013216754 A JP2013216754 A JP 2013216754A JP 2013216754 A JP2013216754 A JP 2013216754A JP 2015079887 A5 JP2015079887 A5 JP 2015079887A5
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JP
Japan
Prior art keywords
region
imprint
substrate
area
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013216754A
Other languages
English (en)
Japanese (ja)
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JP6178694B2 (ja
JP2015079887A (ja
Filing date
Publication date
Priority claimed from JP2013216754A external-priority patent/JP6178694B2/ja
Priority to JP2013216754A priority Critical patent/JP6178694B2/ja
Application filed filed Critical
Priority to US14/515,927 priority patent/US10359696B2/en
Priority to KR1020140139682A priority patent/KR101777905B1/ko
Priority to CN201410551185.5A priority patent/CN104570594B/zh
Publication of JP2015079887A publication Critical patent/JP2015079887A/ja
Priority to KR1020160126650A priority patent/KR20160119024A/ko
Publication of JP2015079887A5 publication Critical patent/JP2015079887A5/ja
Publication of JP6178694B2 publication Critical patent/JP6178694B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013216754A 2013-10-17 2013-10-17 インプリント装置、および物品の製造方法 Expired - Fee Related JP6178694B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013216754A JP6178694B2 (ja) 2013-10-17 2013-10-17 インプリント装置、および物品の製造方法
US14/515,927 US10359696B2 (en) 2013-10-17 2014-10-16 Imprint apparatus, and method of manufacturing article
KR1020140139682A KR101777905B1 (ko) 2013-10-17 2014-10-16 임프린트 장치 그리고 물품을 제조하는 방법
CN201410551185.5A CN104570594B (zh) 2013-10-17 2014-10-17 压印设备和制造制品的方法
KR1020160126650A KR20160119024A (ko) 2013-10-17 2016-09-30 임프린트 장치 그리고 물품을 제조하는 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013216754A JP6178694B2 (ja) 2013-10-17 2013-10-17 インプリント装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2015079887A JP2015079887A (ja) 2015-04-23
JP2015079887A5 true JP2015079887A5 (enExample) 2016-12-01
JP6178694B2 JP6178694B2 (ja) 2017-08-09

Family

ID=53011075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013216754A Expired - Fee Related JP6178694B2 (ja) 2013-10-17 2013-10-17 インプリント装置、および物品の製造方法

Country Status (1)

Country Link
JP (1) JP6178694B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6282298B2 (ja) * 2015-06-10 2018-02-21 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6821387B2 (ja) * 2016-10-24 2021-01-27 キヤノン株式会社 インプリント方法、インプリント装置、および物品の製造方法
JP6993799B2 (ja) * 2017-06-27 2022-01-14 キヤノン株式会社 インプリント装置および物品製造方法
JP7617707B2 (ja) * 2020-01-16 2025-01-20 キヤノン株式会社 インプリント装置及び物品の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7854877B2 (en) * 2007-08-14 2010-12-21 Asml Netherlands B.V. Lithography meandering order
US8628712B2 (en) * 2008-10-27 2014-01-14 Molecular Imprints, Inc. Misalignment management
JP2010239118A (ja) * 2009-03-11 2010-10-21 Canon Inc インプリント装置および方法
JP5875250B2 (ja) * 2011-04-28 2016-03-02 キヤノン株式会社 インプリント装置、インプリント方法及びデバイス製造方法
JP5932286B2 (ja) * 2011-10-14 2016-06-08 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP6045363B2 (ja) * 2012-01-27 2016-12-14 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法

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