JP2015079887A5

JP2015079887A5 -

Info

Publication number: JP2015079887A5
Application number: JP2013216754A
Authority: JP
Filing date: 2013-10-17
Publication date: 2016-12-01
Anticipated expiration: 2033-10-17

Description

上記目的を達成するために、本発明の一側面としてのインプリント装置は、モールドを用いてインプリント材のパターンを基板上に形成するインプリント処理を行うインプリント装置であって、前記インプリント処理を行う対象の前記基板上の領域を加熱して当該領域を変形させる加熱部と、前記インプリント処理を行う対象の前記基板上の第１領域および第２領域のうち一方の領域を前記インプリント処理を先に行う領域として決定し、他方の領域を前記インプリント処理を後に行う領域として決定する処理部と、を含み、前記処理部は、前記基板上の領域を目標形状に近づくように前記一方の領域を前記加熱部で変形させた場合に前記他方の領域が受ける影響が、目標形状に近づくように前記他方の領域を前記加熱部で変形させた場合に前記一方の領域が受ける影響より小さくなるように前記一方の領域と前記他方の領域とを決定する、ことを特徴とする。 To achieve the above object, an imprint apparatus according to one aspect of the present invention is an imprint apparatus performs the imprint process that forms on the substrate a pattern of the imprint material using Mo Rudo, the in- A heating unit that heats an area on the substrate to be printed and deforms the area, and one of the first area and the second area on the substrate to be imprinted is the area . A processing unit that determines an area to be subjected to imprint processing first, and determines the other region as a region to be subjected to imprint processing later, and the processing unit approximates the region on the substrate to a target shape. when the said other region and the one of the regions to a modified version in said heating unit is influence received has the other area so as to approach the target shape is deformed by the heating unit to Determining the one region to the impact from small Kunar so that serial one region undergoes a and the other region, and wherein the.

Claims

A imprint apparatus performs the imprint process that forms on the substrate a pattern of the imprint material using Mo Rudo,
A heating unit that heats a region on the substrate to be subjected to the imprint process and deforms the region;
Region for determining the one region of the first region and the second region on the substrate target of the imprint process as an area for performing the previously said imprinting process, the other area after the imprint process A processing unit determined as:
Including
Wherein the processing unit, the other area will be affected regions on the substrate when the one region so as to approach the target shape is deformed by the heating unit, the other area so as to approach the target shape the determining and said one region the more smaller Kunar so influence one region is subjected to a modified version of the heating unit and of the other region, the imprint apparatus, characterized in that.

The imprint apparatus according to claim 1, wherein the first area and the second area are arranged so as to be adjacent to each other.

The processing unit includes a difference between the shape of the portion on the second region side in the first region and the corresponding target shape, the shape of the portion on the first region side in the second region, and the corresponding target shape. The imprint apparatus according to claim 2, wherein the one area and the other area are determined based on a difference between the imprint apparatus and the other area .

The processing unit is configured to perform the one region based on a heating amount given to the second region side portion in the first region and a heating amount given to the first region side portion in the second region. The imprint apparatus according to claim 2, wherein the first area and the other area are determined.

Wherein the processing unit is adjusted based on the heating amount for the other regions in the heating amount for the one area, it imprint apparatus according to claim 4, characterized in.

A imprint apparatus performs the imprint process that forms on the substrate a pattern of the imprint material using Mo Rudo,
A heating unit that heats a region on the substrate to be subjected to the imprint process and deforms the region;
Of the plurality of regions adjacent to the first region subjected to the imprint process, the region having the smallest influence of heating by the heating unit on the first region is selected, and the imprint process is performed next to the first region. A processing unit that determines the second region to be performed
An imprint apparatus comprising:

The imprint apparatus according to claim 6, wherein the processing unit determines the second region based on a heating distribution by the heating unit with respect to the first region.

The processing unit sets, as the second region, a region having the smallest deformation amount due to heating by the heating unit with respect to the first region among a plurality of regions adjacent to the first region subjected to the imprint process. The imprint apparatus according to claim 6, wherein the imprint apparatus is determined.

A imprint apparatus performs the imprint process that forms on the substrate a pattern of the imprint material using Mo Rudo,
A heating unit that heats a region on the substrate to be subjected to the imprint process and deforms the region;
For each region row on the substrate, the order in which the imprint process is performed is opposite to the order according to the first direction and the first direction based on the shape of each region to be subjected to the imprint process. A processing unit for determining one of the orders according to the second direction;
An imprint apparatus comprising:

The imprint apparatus according to claim 9 , wherein the processing unit evaluates the shape of each region using an evaluation function, and determines the order in which the imprint processing is performed based on the evaluation result.

When the region where the heating amount by the heating unit exceeds the threshold is included in one region row, the processing unit performs the imprint processing in the one region row so that the imprint processing for the region is performed last. to change the order in which the imprint apparatus according to claim 9 or 10, characterized in that.

The heating unit includes a light source, in the described light emitted from the light source to any one of claims 1 to 11 wherein heating the substrate by irradiating the substrate, and wherein Printing device.

Forming a pattern on a substrate using the imprint apparatus according to any one of claims 1 to 12 , and
Processing the substrate on which the pattern has been formed in the step;
A method for producing an article comprising: