JP2015076521A5 - - Google Patents

Download PDF

Info

Publication number
JP2015076521A5
JP2015076521A5 JP2013212021A JP2013212021A JP2015076521A5 JP 2015076521 A5 JP2015076521 A5 JP 2015076521A5 JP 2013212021 A JP2013212021 A JP 2013212021A JP 2013212021 A JP2013212021 A JP 2013212021A JP 2015076521 A5 JP2015076521 A5 JP 2015076521A5
Authority
JP
Japan
Prior art keywords
movable member
appendix
substrate
moving
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013212021A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015076521A (ja
JP6318534B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013212021A priority Critical patent/JP6318534B2/ja
Priority claimed from JP2013212021A external-priority patent/JP6318534B2/ja
Publication of JP2015076521A publication Critical patent/JP2015076521A/ja
Publication of JP2015076521A5 publication Critical patent/JP2015076521A5/ja
Application granted granted Critical
Publication of JP6318534B2 publication Critical patent/JP6318534B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013212021A 2013-10-09 2013-10-09 露光装置及び露光方法、並びにデバイス製造方法 Active JP6318534B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013212021A JP6318534B2 (ja) 2013-10-09 2013-10-09 露光装置及び露光方法、並びにデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013212021A JP6318534B2 (ja) 2013-10-09 2013-10-09 露光装置及び露光方法、並びにデバイス製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018072471A Division JP6575629B2 (ja) 2018-04-04 2018-04-04 露光装置及び露光方法、並びにデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2015076521A JP2015076521A (ja) 2015-04-20
JP2015076521A5 true JP2015076521A5 (enExample) 2016-11-10
JP6318534B2 JP6318534B2 (ja) 2018-05-09

Family

ID=53001144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013212021A Active JP6318534B2 (ja) 2013-10-09 2013-10-09 露光装置及び露光方法、並びにデバイス製造方法

Country Status (1)

Country Link
JP (1) JP6318534B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3184250B2 (ja) 1991-06-26 2001-07-09 竹原 芳子 停止表示器及び停止表示器用停止表示板
NL2009692A (en) 2011-12-07 2013-06-10 Asml Netherlands Bv A lithographic apparatus and a device manufacturing method.
CN105116688B (zh) * 2015-09-01 2017-06-23 浙江大学 一种用于浸没式光刻机的浸没液体控制装置
KR102215539B1 (ko) 2015-11-20 2021-02-16 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 리소그래피 장치를 작동시키는 방법
CN109690413B (zh) 2016-09-12 2021-04-13 Asml荷兰有限公司 用于光刻设备的流体处理结构
US11156921B2 (en) 2017-12-15 2021-10-26 Asml Netherlands B.V. Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007287824A (ja) * 2006-04-14 2007-11-01 Nikon Corp 露光装置及びデバイス製造方法
US20070273856A1 (en) * 2006-05-25 2007-11-29 Nikon Corporation Apparatus and methods for inhibiting immersion liquid from flowing below a substrate
JP2010267656A (ja) * 2009-05-12 2010-11-25 Nikon Corp 露光装置、露光方法、及びデバイス製造方法
JP2013102029A (ja) * 2011-11-08 2013-05-23 Nikon Corp 露光装置、露光方法、デバイス製造方法、プログラム、及び記録媒体

Similar Documents

Publication Publication Date Title
JP2015076521A5 (enExample)
JP2012142605A5 (ja) 液浸部材、液浸露光装置、及びデバイス製造方法。
JP2011049607A5 (enExample)
MY177486A (en) Device for inspecting shape of road travel surface
JP2011109147A5 (ja) 露光方法、露光装置、及びデバイス製造方法
EP3470779A4 (en) PICTURE CONTROL DEVICE AND METHOD AND VEHICLE
JP2011097114A5 (ja) 露光装置及び液体供給方法
PT1866144T (pt) Aparelho para a conformação de um filme plano numa lente ótica, processo para a funcionalização de uma lente ótica por meio do referido aparelho e a lente ótica obtida deste modo
EP2875940A3 (en) Methods for formation of an ophthalmic lens with an insert utilizing voxel-based lithography techniques
EP3496386A4 (en) GUIDANCE METHOD AND DEVICE FOR PHOTOGRAPHIC COMPOSITION
EA201591209A1 (ru) Устройство и способ для изготовления объемного объекта посредством литографии с повышенным пространственным разрешением
GB201218242D0 (en) Security devices and methods of manufacture thereof
EP3492971A4 (en) PHOTOCHROMIC SYSTEM, METHOD FOR DRIVING A PHOTOCHROMIC FILM AND VEHICLE
JP2017111554A5 (enExample)
JP2015528132A5 (enExample)
JP2009239286A5 (enExample)
JP2016006490A5 (enExample)
JP2015036832A5 (enExample)
JP2013257409A5 (enExample)
EP3868124A4 (en) ELECTRONIC DEVICE WITH EARPHONE AND METHOD FOR CONTROLLING THE ELECTRONIC DEVICE
JP2018068578A5 (enExample)
WO2007096094A3 (de) Belichtungsanlage
JP2014142339A5 (enExample)
JP2015228463A5 (enExample)
WO2013127608A3 (en) Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithography