JP2015044722A - Parting mechanism - Google Patents

Parting mechanism Download PDF

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Publication number
JP2015044722A
JP2015044722A JP2013178357A JP2013178357A JP2015044722A JP 2015044722 A JP2015044722 A JP 2015044722A JP 2013178357 A JP2013178357 A JP 2013178357A JP 2013178357 A JP2013178357 A JP 2013178357A JP 2015044722 A JP2015044722 A JP 2015044722A
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Prior art keywords
substrate
pair
scribe line
posture
clamping
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JP2013178357A
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JP6217245B2 (en
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康智 岡島
Yasutomo Okajima
康智 岡島
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to JP2013178357A priority Critical patent/JP6217245B2/en
Priority to KR20140042572A priority patent/KR20150026763A/en
Priority to TW103113578A priority patent/TWI620633B/en
Priority to CN201410171697.9A priority patent/CN104418493B/en
Publication of JP2015044722A publication Critical patent/JP2015044722A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Abstract

PROBLEM TO BE SOLVED: To provide a parting mechanism capable of parting the side end of a fragile material substrate satisfactorily.SOLUTION: A mechanism 1 for parting the end edge part of a substrate W having a scribe line SL formed in advance, along the scribe line SL comprises: a pair of clamping bodies 2 and 3 for clamping the end edge part; and an attitude changing mechanism 4 for changing the attitudes of the paired clamping bodies 2 and 3. The attitude changing mechanism 4 changes the attitudes of the paired clamping bodies 2 and 3 clamping the end edge part, thereby to apply a torque to the end edge part so that the end edge part can be parted. Moreover, one of the paired clamping bodies 2 and 3 has a protrusion part 5 at a longitudinally central part along the end edge part so that the paired clamping bodies 2 and 3 bring the protrusion part 5 into contact with the end edge part when the clamping bodies 2 and 3 clamp the end edge part for the parting operation.

Description

本発明は、液晶パネル用の貼り合わせガラス基板その他の脆性材料基板を分断する機構に関し、特に脆性材料基板の端縁部を分断する機構に関する。   The present invention relates to a mechanism for cutting a laminated glass substrate or other brittle material substrate for a liquid crystal panel, and more particularly to a mechanism for cutting an edge portion of a brittle material substrate.

液晶パネルは、概略、2枚の矩形状のガラス基板の間に液晶を封入した構成の大面積の貼り合わせ基板(母基板)を所定のサイズに分断することにより作製される。液晶パネルの一方のガラス基板上には、それぞれが液晶素子を構成する複数のトランジスタがあらかじめ形成されてなる。ただし、それらのトランジスタは、静電気での絶縁破壊を防止すべく、母基板の段階では、外部接続用に該トランジスタより引き出した電極端子を介して、母基板の側端部(突き出し部)に設けられた短絡電極によって相互に短絡されてなる。液晶パネルの製造プロセスにおいて短絡電極が備わる母基板の側端部を分断除去する技術がすでに公知である(例えば、特許文献1参照)。   The liquid crystal panel is generally manufactured by dividing a large-area bonded substrate (mother substrate) having a configuration in which liquid crystal is sealed between two rectangular glass substrates into a predetermined size. On one glass substrate of the liquid crystal panel, a plurality of transistors each forming a liquid crystal element are formed in advance. However, in order to prevent dielectric breakdown due to static electricity, these transistors are provided at the side edge (protruding part) of the mother board through electrode terminals drawn out from the transistor for external connection at the stage of the mother board. The short-circuited electrodes are short-circuited to each other. A technique for dividing and removing a side end portion of a mother substrate provided with a short-circuit electrode in a manufacturing process of a liquid crystal panel is already known (for example, see Patent Document 1).

具体的には、特許文献1には、矩形状の母基板の一のエッジから所定距離の分断位置に該エッジに平行にスクライブラインを形成した後、形成したスクライブラインに沿った分断を行うことで短絡電極が設けられていた側端部を除去し、さらに、分断後の母基板の端面を研磨するというプロセスが開示されている。   Specifically, in Patent Document 1, a scribe line is formed in parallel to the edge at a dividing position at a predetermined distance from one edge of a rectangular mother substrate, and then cut along the formed scribe line. The process of removing the side edge part provided with the short-circuit electrode and further polishing the end surface of the mother substrate after the division is disclosed.

また、セラミック基板を挟持した挟持手段を回転軸周りで回転させることで、セラミック基板を分割する装置も既に公知である(例えば、特許文献2参照)。   An apparatus that divides a ceramic substrate by rotating a clamping means that sandwiches the ceramic substrate around a rotation axis is already known (for example, see Patent Document 2).

特開平8−197402号公報JP-A-8-197402 特開平9−19918号公報Japanese Patent Laid-Open No. 9-19918

特許文献1に開示されている態様の場合、分断除去される部分に所定のトルクを与えることで分断を実現することとなる。ただし、分断除去される部分は、長手方向がスクライブラインの延在方向である一方、短手方向がスクライブラインの長さに比して幅狭である短冊状をなしているため、つまりは、スクライブラインと母基板のエッジとの間の距離がスクライブラインの長さに比して相対的に短いものであるため、分断に際しては距離でトルクを稼ぐことができない。それゆえ、分断を実現するには、スクライブラインとエッジの距離の短さをカバーするに十分な大きさの力を作用させる必要が生じる。しかしながら、作用させる力が大きいほど、分断位置において母基板の割れや欠け(ハマ欠けなど)が生じやすいという問題がある。また、そのような力を分断位置全般にわたって均一にかつ瞬時に与えることは難しいことから、作用する力の大きさに局所的な不均一があることが原因となって、母基板に割れやカケが生じる可能性もある。   In the case of the mode disclosed in Patent Document 1, the division is realized by applying a predetermined torque to the part to be divided and removed. However, the part to be divided and removed has a strip shape in which the longitudinal direction is the extending direction of the scribe line, while the short direction is narrower than the length of the scribe line, that is, Since the distance between the scribe line and the edge of the mother substrate is relatively shorter than the length of the scribe line, torque cannot be gained by the distance when dividing. Therefore, in order to realize the division, it is necessary to apply a force large enough to cover the short distance between the scribe line and the edge. However, there is a problem that the larger the force to be applied, the more easily the mother substrate is cracked or chipped (eg, chipped) at the dividing position. In addition, since it is difficult to apply such force uniformly and instantaneously over the entire cutting position, there is a local non-uniformity in the magnitude of the applied force, which causes cracks and cracks in the mother board. May occur.

本発明は、上記課題に鑑みてなされたものであり、脆性材料基板の側端部を良好に分断することができる分断機構を提供することを目的とする。   This invention is made | formed in view of the said subject, and it aims at providing the cutting mechanism which can cut off the side edge part of a brittle material board | substrate favorably.

上記課題を解決するため、請求項1の発明は、あらかじめスクライブラインが形成されてなる基板の端縁部を前記スクライブラインに沿って分断する機構であって、前記端縁部を挟持する1対の挟持体と、前記1対の挟持体の姿勢を変更する姿勢変更機構と、を備え、前記姿勢変更機構が前記端縁部を挟持してなる前記1対の挟持体の姿勢を変更することによって前記端縁部の分断が行えるようになっており、かつ、前記1対の挟持体の一方が、前記端縁部に沿った長手方向の中央部分に突起部を有してなり、前記分断のために前記1対の挟持体が前記端縁部を挟持する際に、前記突起部を前記端縁部に接触させる、ことを特徴とする。   In order to solve the above-mentioned problem, the invention of claim 1 is a mechanism for dividing an edge portion of a substrate, on which a scribe line is formed in advance, along the scribe line, and a pair of holding the edge portion. And a posture changing mechanism for changing the posture of the pair of holding members, and the posture changing mechanism changes the posture of the pair of holding members formed by holding the edge portions. The end edge portion can be divided by one of the pair of holding members, and a protrusion is provided at a longitudinal center portion along the end edge portion. Therefore, when the pair of sandwiching bodies sandwich the end edge portion, the projecting portion is brought into contact with the end edge portion.

請求項2の発明は、請求項1に記載の分断機構であって、前記1対の挟持体によって前記端縁部を挟持する際には、前記突起部を、前記端縁部のうち、前記スクライブラインが設けられてなる側の面に接触させる、ことを特徴とする。   Invention of Claim 2 is the dividing mechanism of Claim 1, Comprising: When clamping the said edge part by the said one pair of clamping body, the said protrusion part is the said edge part among said edge part. It is made to contact the surface by which a scribe line is provided.

請求項3の発明は、請求項1または請求項2に記載の分断機構であって、前記突起部は、平面視において前記スクライブラインに近い位置ほど先細な台形状に設けられる、ことを特徴とする。   The invention according to claim 3 is the dividing mechanism according to claim 1 or 2, wherein the protrusion is provided in a trapezoidal shape that is tapered toward a position closer to the scribe line in a plan view. To do.

請求項4の発明は、請求項1ないし請求項3のいずれかに記載の分断機構であって、前記姿勢変更機構においては、前記1対の挟持体を保持する保持部が所定の回動軸周りで回動自在とされてなり、所定の昇降手段に昇降動作をさせることによって前記回動軸を円弧状の軌跡に沿って移動させることにより、前記1対の挟持体の姿勢を変更する、ことを特徴とする。   A fourth aspect of the present invention is the dividing mechanism according to any one of the first to third aspects, wherein in the posture changing mechanism, the holding portion that holds the pair of sandwiching bodies has a predetermined rotation axis. It is made rotatable around, and the posture of the pair of sandwiching bodies is changed by moving the rotation shaft along an arcuate locus by causing a predetermined lifting means to move up and down. It is characterized by that.

請求項1ないし請求項4の発明によれば、突起部が備わる側の挟持体において、分断すべき基板の端縁部に作用させる力を該突起部に集中させるようにすることで、割れやハマ欠けなどの生じない端縁部の分断を、安定的かつ確実に実現することが出来る。   According to the first to fourth aspects of the present invention, in the holding body on the side provided with the protruding portion, the force acting on the edge portion of the substrate to be divided is concentrated on the protruding portion. It is possible to stably and surely realize the division of the edge portion where no chipping occurs.

分断機構1の概略構成を示す一側面図である。1 is a side view showing a schematic configuration of a cutting mechanism 1. FIG. 分断機構1の上面図である。3 is a top view of the cutting mechanism 1. FIG. 分断機構1をY軸方向正側からみた側面図である。It is the side view which looked at the parting mechanism 1 from the Y-axis direction positive side. 第1挟持体2をZ軸方向負側からみた平面図である。It is the top view which looked at the 1st clamping body 2 from the Z-axis direction negative side. 基板Wを挟持した状態の分断機構1をY軸方向正側からみた側面図である。It is the side view which looked at the dividing mechanism 1 of the state which clamped the board | substrate W from the Y-axis direction positive side. 分断機構1による基板Wの分断開始時の様子を示す透過平面図である。It is a permeation | transmission top view which shows the mode at the time of the division | segmentation start of the board | substrate W by the division | segmentation mechanism 1. FIG. 分断機構1による基板Wの分断途中の様子を示す透過平面図である。It is a permeation | transmission top view which shows the mode in the middle of the division | segmentation of the board | substrate W by the division | segmentation mechanism 1. FIG. 姿勢変更機構4の一の例示的態様と、当該態様における挟持部4aの回動動作を説明するための概要図である。It is the schematic for demonstrating one illustrative aspect of the attitude | position change mechanism 4, and rotation operation | movement of the clamping part 4a in the said aspect. 姿勢変更機構4の一の例示的態様と、当該態様における挟持部4aの回動動作を説明するための概要図である。It is the schematic for demonstrating one illustrative aspect of the attitude | position change mechanism 4, and rotation operation | movement of the clamping part 4a in the said aspect. 分断処理装置100の要部を示す斜視図である。FIG. 3 is a perspective view showing a main part of the cutting apparatus 100. 分断処理装置100の要部を示す側面図である。FIG. 3 is a side view showing a main part of the cutting apparatus 100.

<分断機構の概要>
図1は、本発明の実施の形態に係る分断機構1の概略構成を示す一側面図である。図2は、分断機構1の上面図である。本発明の実施の形態に係る分断機構1は、矩形状の(脆性材料基板(以下、単に基板)Wの端縁部を分断除去するものである。基板Wは、例えばガラス基板であり、液晶パネルの母基板である、2枚の矩形状のガラス基板の間に液晶を封入した構成の大面積の貼り合わせ基板などであってもよい。
<Outline of the cutting mechanism>
FIG. 1 is a side view showing a schematic configuration of a cutting mechanism 1 according to an embodiment of the present invention. FIG. 2 is a top view of the cutting mechanism 1. The cutting mechanism 1 according to the embodiment of the present invention cuts and removes an edge portion of a rectangular (brittle material substrate (hereinafter simply referred to as a substrate) W. The substrate W is a glass substrate, for example, and is a liquid crystal. A large-area bonded substrate having a configuration in which liquid crystal is sealed between two rectangular glass substrates, which is a mother substrate of a panel, may be used.

分断機構1は、1対の挟持体をなすともに短冊状の第1挟持体2と第2挟持体3と、第1挟持体2と第2挟持体3とによる基板Wの挟持動作を実現する挟持部4aと、挟持部4aが回動動作する際の回動軸4bを主として備える。挟持部4aと回動軸4bとは、基板Wを挟持してなる状態の第1挟持体2と第2挟持体3の姿勢を一体的に変更する姿勢変更機構4を構成する。   The dividing mechanism 1 forms a pair of sandwiching bodies and realizes a sandwiching operation of the substrate W by the strip-shaped first sandwiching body 2 and the second sandwiching body 3, and the first sandwiching body 2 and the second sandwiching body 3. It mainly includes a clamping portion 4a and a rotation shaft 4b when the clamping portion 4a rotates. The sandwiching portion 4a and the rotating shaft 4b constitute a posture changing mechanism 4 that integrally changes the postures of the first sandwiching body 2 and the second sandwiching body 3 in a state in which the substrate W is sandwiched.

分断機構1においては、概略、図示しない保持手段によって基板Wを保持した状態で、該基板Wの端縁部が、ともに平面視で短冊状であり、かつ水平姿勢である第1挟持体2と第2挟持体3との間で挟持される。そして、係る挟持状態において姿勢変更機構4が駆動されることによって第1挟持体2と第2挟持体3の姿勢が変更されることで、該端縁部に対しトルクが与えられる。係るトルクが作用した結果として、該端縁部が基板Wから分断されるようになっている。   In the cutting mechanism 1, the first sandwiching body 2 that is roughly strip-shaped in a plan view and in a horizontal posture with the substrate W held by a holding means (not shown) in outline. It is clamped between the second clamping bodies 3. Then, when the posture changing mechanism 4 is driven in the sandwiched state, the postures of the first sandwiching body 2 and the second sandwiching body 3 are changed, whereby torque is applied to the edge portion. As a result of such torque acting, the edge portion is separated from the substrate W.

なお、図1および図2においては、水平面内における第1挟持体2および第2挟持体3の延在方向(つまりは除去対象たる基板Wの端縁部の延在方向)をX軸方向とし、水平面内においてX軸方向と直交する方向をY軸方向とし、垂直方向をZ軸方向とする右手系のXYZ座標を付している(以降の図においても同様)。ちなみに、図1は、分断機構1をX軸方向正側からみた側面図ということになる。また、図2においては、姿勢変更機構4が3箇所で第1挟持体2と第2挟持体3と接続された態様が示されているが、これはあくまで例示であって、姿勢変更機構4による第1挟持体2と第2挟持体3の支持態様はこれに限られない。   In FIGS. 1 and 2, the extending direction of the first sandwiching body 2 and the second sandwiching body 3 in the horizontal plane (that is, the extending direction of the edge of the substrate W to be removed) is the X-axis direction. In the horizontal plane, a right-handed XYZ coordinate is attached in which the direction perpendicular to the X-axis direction is the Y-axis direction and the vertical direction is the Z-axis direction (the same applies to the following drawings). Incidentally, FIG. 1 is a side view of the dividing mechanism 1 as seen from the X axis direction positive side. Further, FIG. 2 shows a mode in which the posture changing mechanism 4 is connected to the first sandwiching body 2 and the second sandwiching body 3 at three locations, but this is merely an example, and the posture changing mechanism 4 The support mode of the first sandwiching body 2 and the second sandwiching body 3 is not limited to this.

<分断機構の詳細および分断態様>
続いて、本実施の形態に係る分断機構1の詳細構成および分断機構1による基板Wの分断態様について説明する。
<Details of cutting mechanism and cutting mode>
Subsequently, a detailed configuration of the cutting mechanism 1 according to the present embodiment and a cutting mode of the substrate W by the cutting mechanism 1 will be described.

図3は、分断機構1をY軸方向正側からみた側面図である。図4は、第1挟持体2をZ軸方向負側からみた平面図である。図5は、基板Wを挟持した状態の分断機構1をY軸方向正側からみた側面図である。図6は、分断機構1による基板Wの分断開始時の様子を示す透過平面図である。図7は、分断機構1による基板Wの分断途中の様子を示す透過平面図である。   FIG. 3 is a side view of the cutting mechanism 1 as seen from the Y axis direction positive side. FIG. 4 is a plan view of the first clamping body 2 as seen from the negative side in the Z-axis direction. FIG. 5 is a side view of the dividing mechanism 1 in a state where the substrate W is sandwiched, as viewed from the Y axis direction positive side. FIG. 6 is a transmission plan view showing a state at the start of the cutting of the substrate W by the cutting mechanism 1. FIG. 7 is a transmission plan view showing a state in the middle of dividing the substrate W by the dividing mechanism 1.

まず、図1および図6に示すように、基板Wの除去対象たる端縁部には、分断に先立ってあらかじめ、エッジより所定距離の位置にスクライブラインSLが形成されてなる。係るスクライブラインSLの形成は、ダイヤモンドポイントやカッターホイール等の公知のスクライブライン形成手段によって実現される。   First, as shown in FIG. 1 and FIG. 6, a scribe line SL is formed in advance at a predetermined distance from the edge on the edge portion to be removed of the substrate W prior to division. Formation of the scribe line SL is realized by known scribe line forming means such as a diamond point or a cutter wheel.

係るスクライブラインSL形成済みの基板Wは、スクライブラインSLの形成された側を上面側(Z軸方向正側)とした状態で、姿勢変更機構4と反対の側から(Y軸方向正側から)第1挟持体2と第2挟持体3の間に介挿される。基板Wが介挿されると、姿勢変更機構4の挟持部4aは、係る基板WのエッジとスクライブラインSLの形成位置との間の部分を、第1挟持体2と第2挟持体3とによって挟持させる。係る挟持状態においては、第1挟持体2と第2挟持体3のそれぞれから、基板Wに対し所定の大きさの力(押圧力)が作用する。   The substrate W on which the scribe line SL has been formed is viewed from the side opposite to the posture changing mechanism 4 (from the Y axis direction positive side) with the side on which the scribe line SL is formed being the upper surface side (Z axis direction positive side). ) It is inserted between the first clamping body 2 and the second clamping body 3. When the substrate W is inserted, the sandwiching portion 4a of the posture changing mechanism 4 causes the first sandwiching body 2 and the second sandwiching body 3 to move the portion between the edge of the substrate W and the formation position of the scribe line SL. Hold it. In such a clamping state, a force (pressing force) of a predetermined magnitude acts on the substrate W from each of the first clamping body 2 and the second clamping body 3.

なお、挟持部4aにおける挟持動作、すなわち、第1挟持体2と第2挟持体3の接近および離隔は、双方が同時に変位することで実現されていてもよいし、例えばZ軸方向正側に位置する一方のみ(図1の場合であれば第1挟持体2)が動作可能とされてなり、他方(図1の場合であれば第2挟持体3)は挟持部4aに対して固定的に設けられる構成によって実現されていてもよい。換言すれば、挟持部4aは、第1挟持体2と第2挟持体3とを、両者の間隙部分を開閉可能に保持する部位であるともいえる。   Note that the clamping operation in the clamping unit 4a, that is, the approach and separation of the first clamping body 2 and the second clamping body 3 may be realized by simultaneously displacing them, for example, on the positive side in the Z-axis direction Only one positioned (the first holding body 2 in the case of FIG. 1) is operable, and the other (the second holding body 3 in the case of FIG. 1) is fixed to the holding portion 4a. It may be realized by the configuration provided in. In other words, it can be said that the clamping part 4a is a part which hold | maintains the 1st clamping body 2 and the 2nd clamping body 3 so that both clearance gaps can be opened and closed.

ただし、図3および図4に示すように、あるいはさらに図1および図2においても破線にて示すように、第1挟持体2においては、第2挟持体3との対向面であって、X軸方向(長手方向)の中央部分かつY軸方向の正側の端縁部に、突起部5が設けられてなる。突起部5は、例えばゴムなどの弾性体によって形成されてなる。また、その厚み(Z軸方向のサイズ)は一様であればよいが、その平面形状(水平姿勢において平面視した場合の形状)は、矩形状であるよりはむしろ、Y軸方向の正側に向かう先端部が、スクライブラインSLに近い位置ほど先細となる台形状に設けられてなるのが好ましい。   However, as shown in FIG. 3 and FIG. 4, or as further indicated by a broken line in FIG. 1 and FIG. 2, the first sandwiching body 2 is a surface facing the second sandwiching body 3, and X A protrusion 5 is provided at the central portion in the axial direction (longitudinal direction) and at the edge on the positive side in the Y-axis direction. The protrusion 5 is formed by an elastic body such as rubber. Further, the thickness (size in the Z-axis direction) may be uniform, but the planar shape (the shape when viewed in plan in a horizontal posture) is a positive side in the Y-axis direction rather than a rectangular shape. It is preferable that the tip end toward the side is provided in a trapezoidal shape that tapers toward a position closer to the scribe line SL.

一方、第2挟持体3においては、図1および図3に示すように、第1挟持体2との対向面の略全面に、樹脂シート6が付設されてなる。   On the other hand, in the 2nd clamping body 3, as shown in FIG.1 and FIG.3, the resin sheet 6 is attached to the substantially whole surface facing the 1st clamping body 2. As shown in FIG.

それゆえ、厳密にいえば、本実施の形態に係る分断機構1における基板Wの挟持は、図5に示すように、第1挟持体2に設けられた突起部5と、第2挟持体3に設けられた樹脂シート6との間でなされている。   Therefore, strictly speaking, clamping of the substrate W in the cutting mechanism 1 according to the present embodiment is performed as shown in FIG. It is made between the resin sheet 6 provided in the.

このとき、第2挟持体3の側から基板Wに作用する力、具体的には、樹脂シート6から基板Wに作用する押圧力は、樹脂シート6がX軸方向において一様に設けられてなることから、X軸方向において均一である。これに対して、第1挟持体2の側においては、基板Wに接触しているのは突起部5のみであるので、基板Wに対しては、突起部5のみから押圧力が作用することになる。このとき、第1挟持体2の側から基板Wに作用する押圧力は、突起部5のところに集中するので、図6に示すように、基板Wの、突起部5の先端側に近い領域REに、応力が集中した状態となっている。   At this time, the force acting on the substrate W from the second sandwiching body 3 side, specifically, the pressing force acting on the substrate W from the resin sheet 6 is such that the resin sheet 6 is uniformly provided in the X-axis direction. Therefore, it is uniform in the X-axis direction. On the other hand, on the first sandwiching body 2 side, since only the protrusions 5 are in contact with the substrate W, a pressing force acts on the substrate W only from the protrusions 5. become. At this time, the pressing force acting on the substrate W from the side of the first sandwiching body 2 is concentrated on the projection 5, so that the region of the substrate W close to the tip end side of the projection 5 as shown in FIG. Stress is concentrated on the RE.

分断機構1においては、係る態様にて押圧力が加えられた状態で基板Wを分断する。具体的には、姿勢変更機構4においては挟持部4aが回動軸4bの周りを回動可能に設けられてなり、図1に示す場合であれば矢印AR1にて示す方向に回動軸4bを移動させることによって挟持部4aを回動軸4b周りで回動させ、第1挟持体2および第2挟持体3の姿勢を水平姿勢から挟持部4aの存在するY軸方向負側ほど低くなる姿勢へと変化させる。これにより、基板Wの端縁部に対し、矢印AR1の向きにトルクが作用する。すると、該回動動作の開始とともに、応力が集中している領域REに存在する、スクライブラインSLの長手方向中央部分を起点に、スクライブラインSLに沿って亀裂が伸展し始める。同時に、当該起点部分から順次に、厚み方向に対しても亀裂が伸展する。これにより、図7に示すように、X軸正負両方向に向けて、スクライブラインSLに沿った基板Wの分断が進行する。   In the dividing mechanism 1, the substrate W is divided in a state where a pressing force is applied in this manner. Specifically, in the posture changing mechanism 4, the holding portion 4a is provided so as to be rotatable around the rotation shaft 4b, and in the case shown in FIG. 1, the rotation shaft 4b in the direction indicated by the arrow AR1. Is moved around the rotation shaft 4b, and the postures of the first sandwiching body 2 and the second sandwiching body 3 are lowered from the horizontal posture toward the Y axis direction negative side where the sandwiching portion 4a exists. Change to posture. As a result, torque acts on the edge of the substrate W in the direction of the arrow AR1. Then, along with the start of the rotation operation, cracks start to extend along the scribe line SL, starting from the central portion in the longitudinal direction of the scribe line SL existing in the region RE where the stress is concentrated. At the same time, cracks extend in the thickness direction sequentially from the starting point. As a result, as shown in FIG. 7, the division of the substrate W along the scribe line SL proceeds in both the X-axis positive and negative directions.

また、上述のように突起部5のY軸方向正側の先端部分が台形状であるのが好ましいのは、領域REに作用する応力をより強め、かつ、スクライブラインSLに沿った亀裂の進展を、より生じやすくさせるためである。   In addition, it is preferable that the tip portion on the positive side in the Y-axis direction of the protrusion 5 is trapezoidal as described above, because the stress acting on the region RE is further strengthened and the crack progresses along the scribe line SL. This is to make it more likely to occur.

厚み方向における亀裂の進展が、スクライブラインSLの長手方向中央部分から両端部分までの全ての範囲でなされると、第1挟持体2と第2挟持体3とによって挟持された基板Wの端縁部が完全に基板Wから分断されたことになる。   When the progress of the crack in the thickness direction is made in the entire range from the longitudinal center portion of the scribe line SL to both end portions, the edge of the substrate W sandwiched between the first sandwiching body 2 and the second sandwiching body 3 The part is completely separated from the substrate W.

係る態様による分断の場合、基板Wの端縁部に加えられたトルクが、突起部5に集中して作用することにより、スクライブラインSLからの亀裂伸展が、該突起部の近傍から順次に生じる。それゆえ、突起部5を設けず第1挟持体2の側にも第2挟持体3と同様に樹脂シートを均一に付設し、第1挟持体2の側からも端縁部全体にわたって均等に力を作用させる場合では分断が実現されないような、小さなトルクを作用させるのみであっても、基板Wに割れやハマ欠け等の生じることのない、確実な分断が実現される。これは、挟持に際して与える力の大きさが同じであれば、突起部5を設ける場合の方が、力が作用している箇所における圧力が大きくなるので、逆に、突起部5が備わっていれば、与える力が小さくとも、分断の実現に十分な圧力を作用させることができるからである。   In the case of the division according to this aspect, the torque applied to the edge portion of the substrate W acts on the projection portion 5 so that crack extension from the scribe line SL sequentially occurs from the vicinity of the projection portion. . Therefore, the resin sheet is uniformly provided on the first sandwiching body 2 side as well as the second sandwiching body 3 without providing the protrusions 5, and evenly from the first sandwiching body 2 side over the entire edge portion. Even if only a small torque is applied so that the division is not realized when a force is applied, the substrate W can be surely divided without causing cracks or cracks. This is because, if the magnitude of the force applied during clamping is the same, the pressure at the location where the force is applied increases when the projection 5 is provided. This is because even if the force applied is small, a pressure sufficient to realize the division can be applied.

また、中央部分から順次に亀裂を伸展させれば良いことから、基板Wの端縁部全体にわたって一度に強いエネルギーを作用させる必要がないので、上述の樹脂シートを設ける場合に比して、挟持部4aを回動軸4b周りで回動させる速度を遅くしたとしても、基板Wに割れやハマ欠け等の生じることのない、確実な分断が実現される。   Further, since it is only necessary to extend the cracks sequentially from the central portion, it is not necessary to apply strong energy to the entire edge portion of the substrate W at once. Even if the speed at which the portion 4a is rotated around the rotation axis 4b is slowed down, the substrate W can be surely divided without causing cracks or chipping.

なお、ここまでの説明は、スクライブラインSLの形成面を上面側とし、第1挟持体2が上方から基板Wに接近し、第2挟持体3が下方から基板Wに接近する態様にて、基板Wを挟持することを前提としているが、これは必須の態様ではない。本実施の形態においては、突起部5が備わる第1挟持体2が、スクライブラインSLの形成面の側に配置されていればよい。それゆえ、図1などとは反対に、分断機構1を、第1挟持体2を下側に、第2挟持体3を上側に有するように構成し、基板Wを、スクライブラインSLの形成面を下面側とした状態で、第1挟持体2と第2挟持体3の間に介挿して、分断を行う態様であってもよい。係る場合は、図1において矢印AR2にて示す方向に、回動軸4bを移動させるようにすればよい。   In the description so far, the formation surface of the scribe line SL is the upper surface side, the first sandwiching body 2 approaches the substrate W from above, and the second sandwiching body 3 approaches the substrate W from below. Although it is assumed that the substrate W is sandwiched, this is not an essential aspect. In the present embodiment, it is only necessary that the first sandwiching body 2 provided with the protrusions 5 is disposed on the side of the formation surface of the scribe line SL. Therefore, contrary to FIG. 1 and the like, the dividing mechanism 1 is configured to have the first sandwiching body 2 on the lower side and the second sandwiching body 3 on the upper side, and the substrate W is formed on the surface on which the scribe line SL is formed. It may be an aspect in which the cutting is performed by being inserted between the first sandwiching body 2 and the second sandwiching body 3 in a state in which is set as the lower surface side. In such a case, the rotation shaft 4b may be moved in the direction indicated by the arrow AR2 in FIG.

なお、図1等においては、第1挟持体2の、第2挟持体3との対向面であって、突起部5以外の部分にも、樹脂シート7が付設されてなる。これは、第1挟持体2の突起部5以外の箇所が基板Wと接触するなどして基板Wを傷つけることなどを避けるためであり、上述した態様での分断にとって必須の態様ではない。ただし、係る態様にて樹脂シート7を設ける場合は、突起部5の構成材料よりも軟らかい材料を使用し、突起部5よりも小さな厚みで設けるようにする。これは、突起部5の厚みが弾性によって小さくなり、結果として樹脂シート7もが基板Wと接触し得る状態となったとしても、基板Wを分断する際に基板Wに第1挟持体2の側から基板Wに加わる力を、突起部5に集中させるためである。   In addition, in FIG. 1 etc., the resin sheet 7 is attached also to parts other than the projection part 5 which are the opposing surfaces of the 1st clamping body 2 with the 2nd clamping body 3. FIG. This is to avoid damaging the substrate W by touching the substrate W with portions other than the protrusions 5 of the first sandwiching body 2, and is not an essential aspect for the division in the above-described manner. However, when the resin sheet 7 is provided in such a manner, a material that is softer than the constituent material of the protrusion 5 is used and is provided with a thickness smaller than that of the protrusion 5. This is because even when the thickness of the protrusion 5 is reduced by elasticity and the resin sheet 7 can come into contact with the substrate W as a result, the substrate W is divided into the first sandwiching body 2 when the substrate W is divided. This is because the force applied to the substrate W from the side is concentrated on the protrusion 5.

<姿勢変更機構>
上述した第1挟持体2と第2挟持体3の姿勢変更を担う姿勢変更機構4の具体的構成には、種々のものが考えられる。図8および図9は、姿勢変更機構4の一の例示的態様と、当該態様における挟持部4aの回動動作を説明するための概要図である。なお、図8および図9においては、第1挟持体2と第2挟持体3、挟持部4aなどの形状を図1等とは適宜変更しているが、これらの部位の機能はすべてこれまで説明したものと同様である。また、突起部5や樹脂シート6、7については、姿勢変更機構4の動作そのものとは無関係であるので、図示は省略している。
<Attitude change mechanism>
Various configurations of the posture changing mechanism 4 responsible for changing the postures of the first sandwiching body 2 and the second sandwiching body 3 described above are conceivable. FIG. 8 and FIG. 9 are schematic diagrams for explaining one exemplary aspect of the posture changing mechanism 4 and the rotation operation of the holding portion 4a in the aspect. 8 and 9, the shapes of the first sandwiching body 2, the second sandwiching body 3, the sandwiching portion 4 a and the like are appropriately changed from those in FIG. 1 and the like. The same as described. Further, the projections 5 and the resin sheets 6 and 7 are not shown because they are irrelevant to the operation of the posture changing mechanism 4 itself.

図8(a)に示す姿勢変更機構4は、上述した挟持部4aと回動軸4bとに加えて、動作変換部4cと、昇降部4dとを備える。昇降部4dは、たとえばエアシリンダーなど、鉛直方向(Z軸方向)において昇降自在とされた構成要素であり、動作変換部4cは、回動軸4bと昇降部4dの間を連結する構成要素であって、回動軸4bと昇降部4dに備わる図示しない回動軸のそれぞれに対して回動可能に設けられてなる。   The posture changing mechanism 4 shown in FIG. 8A includes an operation converting unit 4c and an elevating unit 4d in addition to the clamping unit 4a and the rotating shaft 4b described above. The elevating part 4d is a component that can be raised and lowered in the vertical direction (Z-axis direction), such as an air cylinder, for example, and the operation converting part 4c is a component that connects the rotating shaft 4b and the elevating part 4d. Thus, the rotary shaft 4b and the rotary shaft (not shown) provided in the elevating part 4d are provided so as to be rotatable.

係る構成を有する姿勢変更機構4においては、昇降部4dの鉛直方向における移動に伴い、動作変換部4cの姿勢が変化することで、回動軸4bが図8(b)に示す円弧A1上を移動するようになっている。すなわち、動作変換部4cは、昇降部4dの昇降動作を回動軸4bの円弧上の移動動作へと変換する役割を果たしている。上述のように、回動軸4bの移動はそのまま、挟持部4aと第1挟持体2および第2挟持体3の姿勢変化につながる。   In the posture changing mechanism 4 having such a configuration, the rotation shaft 4b moves on the arc A1 shown in FIG. 8B by changing the posture of the motion converting unit 4c as the elevating unit 4d moves in the vertical direction. It is supposed to move. That is, the motion conversion unit 4c plays a role of converting the lifting / lowering operation of the lifting / lowering unit 4d into a moving operation on the arc of the rotating shaft 4b. As described above, the movement of the rotating shaft 4b leads to the posture change of the clamping part 4a, the first clamping body 2 and the second clamping body 3 as it is.

そして、姿勢変更機構4における基板Wの分断は、姿勢変更機構4を図8(a)および図8(b)において実線にて示す状態から図8(b)において一点鎖線で示す状態へと変化させることで実現される。すなわち、第1挟持体2と第2挟持体3とによって基板Wを挟持した状態で昇降部4dを矢印AR3に示すように下降させると、動作変換部4cの姿勢変化とこれに伴う回動軸4bの円弧A1上における移動が生じ、第1挟持体2と第2挟持体3が、水平姿勢から挟持部4aの存在する側ほど低くなる姿勢へと変化する。これにより第1挟持体2と第2挟持体3とによって挟持されていた部分が分断される。   The division of the substrate W in the posture changing mechanism 4 changes the posture changing mechanism 4 from the state shown by the solid line in FIGS. 8A and 8B to the state shown by the one-dot chain line in FIG. 8B. It is realized by letting. That is, when the elevating part 4d is lowered as indicated by the arrow AR3 in a state where the substrate W is sandwiched between the first sandwiching body 2 and the second sandwiching body 3, the posture change of the motion converting section 4c and the rotation axis associated therewith 4b moves on the arc A1, and the first sandwiching body 2 and the second sandwiching body 3 change from a horizontal posture to a posture that becomes lower toward the side where the sandwiching portion 4a exists. Thereby, the part clamped by the 1st clamping body 2 and the 2nd clamping body 3 is parted.

なお、姿勢変更機構4の各部の配置関係は、図8に示すものに限られない。例えば、図8(b)においては動作変換部4cが水平姿勢となっているが、これは必須の態様ではなく、回動軸4bが所定の円弧A1上を移動する構成であれば、必ずしも、第1挟持体2と第2挟持体3の姿勢変化の範囲内において動作変換部4cが水平姿勢を取らなくともよい。   In addition, the arrangement | positioning relationship of each part of the attitude | position change mechanism 4 is not restricted to what is shown in FIG. For example, in FIG. 8B, the motion conversion unit 4c is in a horizontal posture, but this is not an essential aspect, and is not necessarily required as long as the rotation shaft 4b moves on the predetermined arc A1. The motion conversion unit 4 c does not have to take a horizontal posture within the range of the posture change between the first sandwiching body 2 and the second sandwiching body 3.

また、図9は、図8に示す場合とは第1挟持体2と第2挟持体3との配置位置が逆転している場合の様子を示している。係る場合も、昇降部4dが昇降することで、回動軸4bは円弧A2上を移動可能となっている点は同様である。そして、姿勢変更機構4における基板Wの分断は、姿勢変更機構4を図9(a)および図9(b)において実線にて示す状態から図9(b)において一点鎖線で示す状態へと変化させることで実現される。すなわち、第1挟持体2と第2挟持体3とによって基板Wを挟持した状態で昇降部4dを矢印AR4に示すように上昇させると、動作変換部4cの姿勢変化とこれに伴う回動軸4bの円弧A2上における移動が生じ、第1挟持体2と第2挟持体3が、水平姿勢から挟持部4aの存在する側ほど高くなる姿勢へと変化する。これにより第1挟持体2と第2挟持体3とによって挟持されていた部分が分断される。   Moreover, FIG. 9 has shown the mode in the case where the arrangement position of the 1st clamping body 2 and the 2nd clamping body 3 is reverse from the case shown in FIG. This also applies to the fact that the rotating shaft 4b can move on the arc A2 by moving the lifting unit 4d up and down. Then, the division of the substrate W in the posture changing mechanism 4 changes the posture changing mechanism 4 from the state indicated by the solid line in FIGS. 9A and 9B to the state indicated by the alternate long and short dash line in FIG. 9B. It is realized by letting. That is, when the elevating part 4d is lifted as indicated by the arrow AR4 in a state where the substrate W is sandwiched between the first sandwiching body 2 and the second sandwiching body 3, the posture change of the motion converting section 4c and the rotation axis associated therewith 4b moves on the arc A2, and the first sandwiching body 2 and the second sandwiching body 3 change from a horizontal posture to a posture that becomes higher toward the side where the sandwiching portion 4a exists. Thereby, the part clamped by the 1st clamping body 2 and the 2nd clamping body 3 is parted.

<分断処理装置の構成例>
図10および図11はそれぞれ、上述のような原理で基板Wの端縁部の分断を行う分断機構1を備えた分断処理装置100の要部を示す斜視図と側面図である。図10および図11においては、第1挟持体2が下側に、第2挟持体3が上側に備わるように構成された分断機構1を有する分断処理装置100を例示している。特に、図11は、姿勢変更機構4が分断実行時の状態にあるときの様子を例示している(ただし、基板Wは省略している)。
<Configuration example of the cutting processing device>
FIGS. 10 and 11 are a perspective view and a side view, respectively, showing a main part of the cutting processing apparatus 100 provided with the cutting mechanism 1 for cutting the edge of the substrate W according to the principle described above. 10 and 11 illustrate a cutting processing apparatus 100 having a cutting mechanism 1 configured such that the first holding body 2 is provided on the lower side and the second holding body 3 is provided on the upper side. In particular, FIG. 11 exemplifies a state when the posture changing mechanism 4 is in a state of performing the cutting (however, the substrate W is omitted).

分断処理装置100は、分断機構1に加えて、基板Wを保持する基板保持部10と、分断された基板Wの端縁部を排出するための排出経路11とを備える。基板保持部10と排出経路11とはいずれも、分断機構1の延在方向に沿って設けられてなる。また、排出経路11は、分断後、第1挟持体2と第2挟持体3の間に挟持されたままの基板Wの端縁部が、係る挟持状態を解除されて排出される際に、使用される経路である。   In addition to the cutting mechanism 1, the cutting apparatus 100 includes a substrate holding unit 10 that holds the substrate W, and a discharge path 11 that discharges the edge of the cut substrate W. Both the substrate holding part 10 and the discharge path 11 are provided along the extending direction of the cutting mechanism 1. In addition, the discharge path 11 is separated when the edge portion of the substrate W that has been sandwiched between the first sandwiching body 2 and the second sandwiching body 3 after being divided is released after the sandwiched state is released. The route used.

また、図10においては図示の都合、分断機構1とその付随物である基板保持部10および排出経路11について、1組のみ示しているが、実際の分断処理装置100においては、2組(1対)の分断機構1が所定の間隔で対向配置されてなる。すなわち、分断処理装置100においては、互いに離間する2つの基板保持部10において基板Wを2箇所で支持した状態で、基板Wの対向する2箇所の端縁部を同時並行的に分断することが可能となっている。あるいはさらに、分断処理装置100は、水平面内で基板Wを90°回転させる機構を備え、矩形状の基板Wに2組存在する、対向する端縁部の組について順次に、分断する態様とされていてもよい。   In FIG. 10, only one set is shown for the cutting mechanism 1 and its accompanying substrate holding part 10 and discharge path 11 for convenience of illustration, but in the actual cutting processing apparatus 100, two sets (1 A pair of splitting mechanisms 1 are arranged to face each other at a predetermined interval. That is, in the separation processing apparatus 100, the two opposite edge portions of the substrate W can be simultaneously divided in a state where the two substrate holding units 10 that are separated from each other support the substrate W at two locations. It is possible. Alternatively, the separation processing apparatus 100 includes a mechanism that rotates the substrate W by 90 ° in a horizontal plane, and is configured to sequentially divide two sets of opposing edge portions that exist in the rectangular substrate W. It may be.

分断処理装置100にはさらに、姿勢変更機構4の長手方向の端部近傍に、分断動作の際に姿勢変更機構4を案内するためのガイド板8が設けられてなる(ただし、図11においては図示省略)。より詳細には、ガイド板8には、円弧状の貫通孔が設けられてなる一方、姿勢変更機構4の長手方向端部には、2つのガイド体9が、該貫通孔から突出する態様にて設けられてなる。ガイド体9は、姿勢変更機構4が分断動作を行う際に、図11に矢印AR5にて示す円弧状の軌跡を描いて移動する。ガイド板8の貫通孔は、係るガイド体9の軌跡に合致するように形成されている。それゆえ、分断の際の姿勢変更機構4の動作範囲は、貫通孔におけるガイド体9の移動可能範囲に制限されてなる。これにより、分断処理装置100においては、安定的かつ再現性のある分断動作が実現される。   Further, the dividing processing device 100 is provided with a guide plate 8 for guiding the posture changing mechanism 4 during the cutting operation in the vicinity of the longitudinal end portion of the posture changing mechanism 4 (however, in FIG. 11). (Not shown). More specifically, the guide plate 8 is provided with an arc-shaped through-hole, and two guide bodies 9 protrude from the through-hole at the end in the longitudinal direction of the posture changing mechanism 4. It is provided. When the posture changing mechanism 4 performs the dividing operation, the guide body 9 moves while drawing an arcuate locus indicated by an arrow AR5 in FIG. The through hole of the guide plate 8 is formed so as to match the locus of the guide body 9. Therefore, the operation range of the posture changing mechanism 4 at the time of dividing is limited to the movable range of the guide body 9 in the through hole. Thereby, in the dividing processing apparatus 100, a stable and reproducible dividing operation is realized.

以上、説明したように、本実施の形態によれば、あらかじめスクライブラインが形成されてなる基板の、スクライブラインよりもエッジ側の端縁部を挟持した状態で、該端縁部にトルクを作用させることによって該端縁部をスクライブラインに沿って基板から分断する機構において、1対の挟持体の一方の基板との接触部分に平面視台形状の突起部を設け、当該挟持体の側から基板に作用させる力を該突起部に集中させるようにすることで、割れやハマ欠けなどの生じない分断を、安定的かつ確実に実現することが出来る。   As described above, according to the present embodiment, torque is applied to the edge of the substrate on which the scribe line is formed in advance in a state where the edge on the edge side of the scribe line is sandwiched. In the mechanism for separating the edge portion from the substrate along the scribe line, a pair of holding members provided with a trapezoidal projection in a plan view at the contact portion with one substrate, and from the holding member side By concentrating the force acting on the substrate on the protrusions, it is possible to stably and reliably realize the division that does not cause cracks or chipping.

1 分断機構
2 第1挟持体
3 第2挟持体
4 姿勢変更機構
4a 挟持部
4b 回動軸
4c 動作変換部
4d 昇降部
5 突起部
6、7 樹脂シート
8 ガイド板
9 ガイド体
10 基板保持部
11 排出経路
100 分断処理装置
SL スクライブライン
W 基板
DESCRIPTION OF SYMBOLS 1 Dividing mechanism 2 1st clamping body 3 2nd clamping body 4 Posture change mechanism 4a Clamping part 4b Rotating shaft 4c Motion conversion part 4d Lifting part 5 Projection part 6, 7 Resin sheet 8 Guide plate 9 Guide body 10 Substrate holding part 11 Discharge path 100 Dividing device SL Scribe line W Substrate

Claims (4)

あらかじめスクライブラインが形成されてなる基板の端縁部を前記スクライブラインに沿って分断する機構であって、
前記端縁部を挟持する1対の挟持体と、
前記1対の挟持体の姿勢を変更する姿勢変更機構と、
を備え、
前記姿勢変更機構が前記端縁部を挟持してなる前記1対の挟持体の姿勢を変更することによって前記端縁部にトルクを作用させることにより前記端縁部の分断が行えるようになっており、
かつ、
前記1対の挟持体の一方が、前記端縁部に沿った長手方向の中央部分に突起部を有してなり、
前記分断のために前記1対の挟持体が前記端縁部を挟持する際に、前記突起部を前記端縁部に接触させる、
ことを特徴とする分断機構。
A mechanism for dividing an edge portion of a substrate on which a scribe line is formed in advance along the scribe line,
A pair of clamping bodies for clamping the edge portions;
A posture changing mechanism for changing the posture of the pair of sandwiching bodies;
With
The posture changing mechanism changes the posture of the pair of holding members formed by holding the edge portions, and the edge portions can be divided by applying torque to the edge portions. And
And,
One of the pair of sandwiching bodies has a protrusion at a central portion in the longitudinal direction along the edge,
When the pair of sandwiching bodies sandwich the end edge portion for the division, the projecting portion is brought into contact with the end edge portion.
A cutting mechanism characterized by that.
請求項1に記載の分断機構であって、
前記1対の挟持体によって前記端縁部を挟持する際には、前記突起部を、前記端縁部のうち、前記スクライブラインが設けられてなる側の面に接触させる、
ことを特徴とする分断機構。
The cutting mechanism according to claim 1,
When the end edge is sandwiched by the pair of sandwiching bodies, the protrusion is brought into contact with the surface of the end edge where the scribe line is provided.
A cutting mechanism characterized by that.
請求項1または請求項2に記載の分断機構であって、
前記突起部は、平面視において前記スクライブラインに近い位置ほど先細な台形状に設けられる、
ことを特徴とする分断機構。
The cutting mechanism according to claim 1 or 2,
The protrusion is provided in a trapezoidal shape that is tapered toward a position closer to the scribe line in plan view.
A cutting mechanism characterized by that.
請求項1ないし請求項3のいずれかに記載の分断機構であって、
前記姿勢変更機構においては、前記1対の挟持体を保持する保持部が所定の回動軸周りで回動自在とされてなり、所定の昇降手段に昇降動作をさせることによって前記回動軸を円弧状の軌跡に沿って移動させることにより、前記1対の挟持体の姿勢を変更する、
ことを特徴とする分断機構。
The cutting mechanism according to any one of claims 1 to 3,
In the posture changing mechanism, a holding portion that holds the pair of sandwiching bodies is rotatable around a predetermined rotation shaft, and the rotation shaft is moved by causing a predetermined lifting means to move up and down. Changing the posture of the pair of sandwiching bodies by moving along an arcuate trajectory;
A cutting mechanism characterized by that.
JP2013178357A 2013-08-29 2013-08-29 Splitting mechanism Expired - Fee Related JP6217245B2 (en)

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