JP2014217983A - Break device and break method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a functional area from fragmenting when the functional area is parted from a brittle material substrate along a scribe line for contour.SOLUTION: A scribe line 51 for contour is formed on a surface of a brittle material substrate 17, and auxiliary scribe lines 52a-52d are formed outside the scribe line for contour. For parting, an underlay sheet 53 is inserted up to a position where the underlay sheet 53 is close to one auxiliary scribe line and the scribe line 51 for contour, and then moved in parallel with the surface of the brittle material substrate 17 to leave the auxiliary scribe line while pressing a periphery on a side where the sheet 53 is not inserted across the auxiliary scribe line 52a. Consequently, a product substrate can be parted from the brittle material substrate 17 without any damage.

Description

  The present invention relates to a break device and a break method for dividing a region surrounded by a closed curve of a brittle material substrate.

  In the case of scribing a brittle material substrate, it is mainly performed along a straight line, and a break is caused by applying a bending moment along the scribe line. However, when the shape to be cut is circular or elliptical, it is necessary to form a closed curved surface along the shape to be cut, and in this case, it is difficult to break along the scribe line. It was.

  In Patent Document 1, as shown in FIG. 1A, a scribe line 101 formed with a track-like closed curve is formed to cut out a product substrate from the substrate 100, and further, from the periphery of the substrate 100 without contacting the scribe line 101. It is shown that auxiliary scribe lines 102 a to 102 d are formed toward the scribe line 101.

JP-A-6-40734

  When the auxiliary scribe line is formed in this way, if the substrate 100 is thick, normal division can be performed along the scribe line 101 using the auxiliary scribe line. However, when the thickness of the substrate is as thin as 0.3 mm or less, for example, when the substrate 100 is broken so as to be separated from both sides of the auxiliary scribe line 102a as indicated by arrows A and B, as shown in FIG. The break 103 sometimes reached the inside of the scribe line 101.

  This is because when one breaks along the auxiliary scribe line, it is separated from one auxiliary scribe line, for example, both sides of 102a in the same plane, as shown by arrows A and B in the opposite directions in the conventional division. This is probably due to the fact that it does not stay at the position of the scribe line for contour. Therefore, in such a case, there is a problem that a substrate having a required shape cannot be obtained, and the yield is lowered. Such a tendency becomes more prominent as the scribe and break substrate becomes thinner.

  An object of the present invention is to solve such a conventional defect, and an object of the present invention is to enable a product substrate to be divided without damage at the time of division using an auxiliary scribe line even for a thin brittle material substrate.

  In order to solve this problem, a breaking method of the present invention is a breaking method for dividing a brittle material substrate, which is a contour scribe line comprising a closed curve including a functional region of the brittle material substrate on a table, A brittle material substrate having an auxiliary scribe line formed from the periphery of the brittle material substrate to a position close to the contour scribe line is placed outside the scribe line, and one auxiliary of the auxiliary scribe lines is placed. An underlay sheet is inserted from below the brittle material substrate to a position close to the scribe line and the contour scribe line, and no underlay sheet is inserted between the auxiliary scribe line and the auxiliary scribe line. The area of the brittle material substrate is pressed with a pressing member, and the compensation is made from the position pressed with the pressing member. By moving parallel to the plane of the brittle material substrate away from the scribe line, it is to divide the product substrate from the brittle material substrate.

  In order to solve this problem, a breaking device of the present invention is a breaking device that divides a product substrate including a functional region from a brittle material substrate, the contour scribe line including a closed curve including the functional region, and the contour A table on which a brittle material substrate having an auxiliary scribe line formed from the periphery of the brittle material substrate to a position close to the contour scribe line is installed outside the scribe line, and a pressing member at the tip, A separation arm that moves in parallel with the surface of the brittle material substrate while pressing a part of the brittle material substrate on the table, and the auxiliary arm while pressing the vicinity of the auxiliary scribe line of the brittle material substrate with the separation arm. And a controller that moves away from the scribe line.

  According to the present invention having such characteristics, a closed-curve contour scribe line is formed on a brittle material substrate, and an auxiliary scribe line is formed around the scribe line. Then, insert the underlay sheet until it approaches the contour scribe line and one auxiliary scribe line, and move while pressing the vicinity of the side where the sheet is not inserted across the auxiliary scribe line and surrounded by a closed curve When the substrate is cut out, there is an effect that the product substrate can be divided into a desired shape without causing a crack or the like.

FIG. 1A is a diagram showing a scribe line formed on a brittle material substrate to divide a product substrate surrounded by a conventional closed curve. FIG. 1B is a diagram showing a state of cutting along an auxiliary scribe line formed on a conventional brittle material substrate. FIG. 2 is a perspective view showing a breaking device according to an embodiment of the present invention. FIG. 3 is a block diagram showing a controller of the break device according to the present embodiment. FIG. 4 is a diagram showing an example of scribing of the break device according to the present embodiment. FIG. 5A is a diagram showing a state in which the substrate on which the scribe line is formed is broken. FIG. 5B is a side view showing a state of breaking according to the present embodiment. FIG. 6A is a diagram showing another example of a scribe line according to the present embodiment. FIG. 6B is a diagram showing a state in which the substrate on which this scribe line is formed is broken.

  FIG. 2 is a schematic perspective view showing an example of the breaking device according to the embodiment of the present invention. The break device 10 is a device for executing scribing and breaking. In this apparatus, a movable table 11 is held along a pair of guide rails 12a and 12b so as to be movable in the y-axis direction. The ball screw 13 is screwed with the movable table 11. The motor 14 rotates the ball screw 13 to move the moving base 11 in the y-axis direction along the guide rails 12a and 12b. A motor 15 is provided on the upper surface of the movable table 11. The motor 15 rotates the table 16 on the xy plane and positions it at a predetermined angle. A brittle material substrate 17 is placed on the table 16 and held by a vacuum suction means (not shown). Two CCD cameras 18a and 18b for imaging the alignment mark of the brittle material substrate 17 are provided on the upper part of the break device.

  In the break device 10, a bridge 20 is installed by struts 21 a and 21 b along the x-axis direction so as to straddle the movable table 11 and the table 16 on the upper side. The bridge 20 is provided with a linear motor 23 that holds the scribe head 22 movably. The linear motor 23 linearly drives the scribe head 22 along the x-axis direction. A scribing wheel 25 is attached to the tip of the scribe head 22 via a holder 24. The scribe head 22 rolls the scribing wheel 25 while pressing it on the surface of the brittle material substrate with an appropriate load to form a scribe line.

  A separation arm 26 is provided at a position adjacent to the table 16. As will be described later, the separation arm 26 shifts the substrate from the vicinity of the auxiliary scribe line while pressing the substrate. A pressing member 26 a that presses the brittle material substrate 17 is provided at the tip of the separation arm 26. The pressing member 26a is preferably an elastic member having a large friction coefficient such as rubber.

  Here, the movable table 11, the guide rails 12a and 12b, the table 16, the motors 14 and 15 for driving them, and the linear motor 23 for moving the scribe head 22 are used to move the scribe head and the brittle material substrate relative to each other in the plane of the substrate. The moving means to move to is comprised.

  Next, the configuration of the controller of break device 10 according to the present embodiment will be described using a block diagram. FIG. 3 is a block diagram of the controller 30 of the break device 10. In this figure, the outputs from the two CCD cameras 18 a and 18 b are given to the control unit 32 via the image processing unit 31 of the controller 30. The input unit 33 is used to input data about the scribe of the brittle material substrate. Connected to the control unit 32 are a Y motor drive unit 35, a rotation motor drive unit 36, a linear motor drive unit 37, a scribe head drive unit 38, and a separation arm drive unit 39. The Y motor drive unit 35 drives the motor 14, and the rotation motor drive unit 36 drives the motor 15. The linear motor drive unit 37 drives the linear motor 23. The control unit 32 controls the position of the table 16 in the x-axis and y-axis directions based on the scribe data, and controls the rotation of the table 16. The scribing head driving unit 38 drives the scribing head in the z-axis direction and drives the scribing wheel 25 so as to press the surface of the brittle material substrate with an appropriate load when the scribing wheel 25 rolls. The separation arm driving unit 39 controls the separation arm 26 and performs an operation of moving a part of the brittle material substrate in parallel with the surface of the brittle material substrate while pressing a part of the brittle material substrate. Further, a monitor 40 and a scribe data holding unit 41 are connected to the control unit 32. The scribe data holding unit 41 holds data for scribe described later.

  Next, a breaking method using the breaking device according to this embodiment will be described with reference to FIG. First, the brittle material substrate 17 is placed on the table 16. Then, the scribe data is read from the scribe data holding unit 41 of the controller 30, and the motors 14 and 15 and the linear motor 23 are driven based on the scribe data, and the scribe head is lowered while the scribe head 22 is moved to perform the scribe. . Here, as shown in FIG. 4, the scribe line 51 is first formed in the brittle material substrate 17 in order to cut out a substantially rectangular functional region having, for example, four corners in an arc shape. Next, auxiliary scribe lines 52 a to 52 d are formed around the substrate 17 in order to divide this region. These auxiliary scribe lines 52 a to 52 d are formed in contact with the contour scribe line 51 and to positions close to each side of the contour scribe line 51 that is closer to the periphery of the brittle material substrate 17.

  Next, as shown in FIGS. 5A and 5B, one of the auxiliary scribe lines, for example 52a, is selected, and the contour scribe line 51 and the scribe line 52a are formed from the lower surface of the brittle material substrate 17 outside the contour scribe line 51. The underlay sheet 53 is inserted up to the adjacent position. The underlay sheet 53 is a thin sheet having a thickness substantially equal to or less than the thickness of the brittle material substrate 17. This sheet is preferably a porous sheet as disclosed in, for example, Japanese Patent No. 3502959. By placing the porous sheet on the table 16 having the air inlet and bringing the brittle material substrate into close contact with the upper surface, the brittle material substrate 17 can be vacuum-adsorbed via the sheet 53.

  Next, after the sheet 53 is inserted, the vicinity of the side where the sheet 53 is not inserted is pressed by the pressing member 26a provided at the tip of the separation arm 26 as shown in the figure with the auxiliary scribe line 52a interposed therebetween. Then, the substrate is rotated in the direction of arrow C parallel to the surface of the substrate 17 while pressing the substrate by the separating arm 26. By so doing, the cutting can proceed along the scribe line 52 a as shown in FIG. 5B, and further the cutting can proceed along the adjacent contour scribe line 51.

  Normally, the product substrate including the functional area can be separated by this, but there are cases where the break can be divided only to the position of the auxiliary scribe line, for example, 52b. In this case, the break can be advanced by inserting an underlay sheet in the same manner with respect to the auxiliary scribe line 52c, and pressing and rotating at a position adjacent to the auxiliary scribe line 52c.

  The auxiliary scribe line is not limited to that shown in FIG. 4 and may be formed by inclining the auxiliary scribe line with respect to the side of the adjacent contour scribe line 51. In that case, all the auxiliary scribe lines may be inclined, or only one auxiliary scribe line may be inclined. FIG. 6A shows an example in which the auxiliary scribe lines 52e and 52f are inclined. In this case, an underlay sheet 54 having one end cut out in a triangular shape so as to correspond to the shape of the auxiliary scribe line 52e is inserted. Next, separation can be performed by pressing the vicinity of the side where the sheet 54 is not inserted with the auxiliary scribe line 52 e sandwiched by the separating arm 26 and rotating as indicated by an arrow D.

  In this embodiment, the contour scribe line 51 is formed and then the auxiliary scribe lines 52a to 52d are formed. However, each auxiliary scribe line is formed first, and then the contour scribe line is formed. Needless to say, it may be formed.

  In this embodiment, the underlay sheets 53 and 54 are air permeable sheets, but a sheet having a high friction coefficient is sufficient. Even if such a sheet is used, the separation can be advanced by shifting a part of the substrate in the lateral direction while pressing with the separating arm.

  Furthermore, in this embodiment, a break device that performs scribing and breaking has been described, but the scribing function is not necessarily required. The present invention is realized as an apparatus that breaks by adsorbing a substrate on which a scribe line has already been formed on a table, inserting an underlay sheet, and pressing and rotating a pressing member in the vicinity of the auxiliary scribe line. It may be.

  In the present invention, a scribe line having a closed curve as an outline is formed, and when a necessary region is cut out, the functional region can be divided without damage, and can be widely used for dividing the substrate.

DESCRIPTION OF SYMBOLS 10 Break apparatus 11 Moving stand 12a, 12b Guide rail 13 Ball screw 14, 15 Motor 16 Table 17 Brittle material board 18a, 18b CCD camera 20 Bridge 21a, 21b Post 22 Scribing head 23 Linear motor 24 Holder 25 Scribing wheel 26 Separation arm 26a Pressure member 30 Controller 31 Image processing unit 32 Control unit 33 Input unit 34 Y motor drive unit 36 Motor drive unit for rotation 37 Linear motor drive unit 38 Scribe head drive unit 39 Separation arm drive unit 40 Monitor 41 Scribe data holding unit 51 Contour scribe line 52a to 52f Auxiliary scribe line 53, 54 Sheet for underlay

Claims (2)

A breaking method for dividing a brittle material substrate,
A contour scribe line comprising a closed curve including a functional region of the brittle material substrate on the table, and an auxiliary formed outside the contour scribe line from the periphery of the brittle material substrate to a position close to the contour scribe line. Place a brittle material substrate with a scribe line,
Inserting an underlay sheet from below the brittle material substrate to a position close to one of the auxiliary scribe lines and the contour scribe line,
Press the area of the brittle material substrate where the sheet for underlay is not inserted across the auxiliary scribe line in the vicinity of the auxiliary scribe line with a pressing member,
A breaking method in which a product substrate is separated from the brittle material substrate by moving parallel to the surface of the brittle material substrate away from the auxiliary scribe line from a position pressed by the pressing member. A break device for separating a product substrate including a functional region from a brittle material substrate,
A brittle material having a contour scribe line including a closed curve including a functional region, and an auxiliary scribe line formed on the outside of the contour scribe line from the periphery of the brittle material substrate to a position close to the contour scribe line. A table on which the substrate is installed;
A separation arm having a pressing member at the tip and moving in parallel to the surface of the brittle material substrate while pressing a portion of the brittle material substrate on the table;
And a controller that moves the vicinity of the auxiliary scribe line of the brittle material substrate away from the auxiliary scribe line while pressing the vicinity of the auxiliary scribe line with the separating arm.