JP2014217982A - Scribe device and scribe method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a functional area from fragmenting when a product substrate including the functional area is parted from a brittle material substrate along a scribe line for contour.SOLUTION: A scribe line 51 for contour is formed on a surface of a brittle material substrate 17, and auxiliary scribe lines 52a-52d for assisting in parting in a direction obliquely to the nearest scribe line 51 for contour are formed not in contact with the scribe line. A product substrate when parted is parted from the auxiliary scribe line to be parted from the brittle material substrate 17 without any damage.

Description

  The present invention relates to a scribing apparatus and a scribing method used for scribing a brittle material substrate for dividing a region surrounded by a closed curve.

  In the case of scribing a brittle material substrate, it is mainly performed along a straight line, and a break is caused by applying a bending moment along the scribe line. However, when the shape to be cut is circular or elliptical, it is necessary to form a closed curved surface along the shape to be cut, and in this case, it is difficult to break along the scribe line. It was.

  In Patent Document 1, as shown in FIG. 1A, a scribe line 101 formed with a track-like closed curve is formed to cut out a product substrate from the substrate 100, and further, from the periphery of the substrate 100 without contacting the scribe line 101. It is shown that auxiliary scribe lines 102 a to 102 d are formed toward the scribe line 101.

JP-A-6-40734

  When the auxiliary scribe line is formed in this way, if the substrate 100 is thick, normal division can be performed along the scribe line 101 using the auxiliary scribe line. However, when the thickness of the substrate is as thin as 0.3 mm or less, for example, when the substrate 100 is broken so as to be separated from both sides of the auxiliary scribe line 102a as indicated by arrows A and B, as shown in FIG. The break 103 sometimes reached the inside of the scribe line 101.

  This is because the conventional auxiliary scribe lines 102a to 102d are formed in a direction substantially orthogonal to the outline scribe line 101, and therefore, when breaking along the auxiliary scribe line 101, the position does not remain at the position of the outline scribe line. It is considered a thing. Therefore, in such a case, there is a problem that a substrate having a required shape cannot be obtained, and the yield is lowered. Such a tendency becomes more prominent as the scribe and break substrate becomes thinner.

  An object of the present invention is to solve such a conventional defect, and an object of the present invention is to enable a product substrate to be divided without damage at the time of division using an auxiliary scribe line even for a thin brittle material substrate.

  In order to solve this problem, a scribing method of the present invention is a scribing method for scribing a product substrate including a functional region from a brittle material substrate, and for scribing a contour having a closed curve on the brittle material substrate. A scribe line and an auxiliary scribe line extending obliquely with respect to the nearest contour scribe line without contacting the contour scribe line are formed on the brittle material substrate outside the contour scribe line. It is.

  In order to solve this problem, a scribing apparatus of the present invention is a scribing apparatus for scribing a product substrate including a functional region from a brittle material substrate, and the scribing device is provided with the brittle material substrate. A table, a scribe head that is provided so as to be able to move up and down so as to face the brittle material substrate on the table, and holds a scribing wheel at the tip thereof, and the scribing wheel is pressed against the surface of the brittle material substrate A moving means for relatively moving the scribe head and the brittle material substrate, a contour scribe line having a closed curve on the brittle material substrate, and outside the contour scribe line without contacting the contour scribe line Complement extending diagonally with respect to the nearest contour scribe line A controller for forming a scribe line on the brittle material substrate, those having a.

  According to the present invention having such a feature, a closed-curve contour scribe line is formed on a brittle material substrate, and an auxiliary scribe line is formed around the contour scribe line obliquely to the periphery. Therefore, when cutting is started from the auxiliary scribe line and the product substrate surrounded by the closed curve is cut out, the product substrate can be divided into a desired shape without causing cracks or the like.

FIG. 1A is a diagram showing a scribe line formed on a brittle material substrate to divide a product substrate surrounded by a conventional closed curve. FIG. 1B is a diagram showing a state of cutting along an auxiliary scribe line formed on a conventional brittle material substrate. FIG. 2 is a perspective view showing a scribing apparatus according to an embodiment of the present invention. FIG. 3 is a block diagram showing a controller according to this embodiment. FIG. 4A is a diagram showing a first example of scribe according to the present embodiment. FIG. 4B is a diagram showing a second example of scribe according to the present embodiment. FIG. 4C is a diagram showing a third example of the scribe according to the present embodiment. FIG. 4D is a diagram showing a fourth example of scribe according to the present embodiment.

  FIG. 2 is a schematic perspective view showing an example of a scribing apparatus according to the embodiment of the present invention. In the scribing device 10, a movable table 11 is held so as to be movable in the y-axis direction along a pair of guide rails 12 a and 12 b. The ball screw 13 is screwed with the movable table 11. The motor 14 rotates the ball screw 13 to move the moving base 11 in the y-axis direction along the guide rails 12a and 12b. A motor 15 is provided on the upper surface of the movable table 11. The motor 15 rotates the table 16 on the xy plane and positions it at a predetermined angle. A brittle material substrate 17 is placed on the table 16 and held by a vacuum suction means (not shown). Two CCD cameras 18 a and 18 b that image the alignment marks on the brittle material substrate 17 are provided on the scriber.

  In the scribe device 10, a bridge 20 is installed by struts 21a and 21b along the x-axis direction so as to straddle the movable table 11 and the table 16 on the upper side thereof. The bridge 20 is provided with a linear motor 23 that holds a scribe head 22. The linear motor 23 linearly drives the scribe head 22 along the x-axis direction. A scribing wheel 25 is attached to the tip of the scribe head 22 via a holder 24. The scribe head 22 rolls the scribing wheel 25 while pressing it on the surface of the brittle material substrate with an appropriate load to form a scribe line.

  Here, the movable table 11, the guide rails 12a and 12b, the table 16, the motors 14 and 15 for driving them, and the linear motor 23 for moving the scribe head 22 are used to move the scribe head and the brittle material substrate relative to each other in the plane of the substrate. The moving means to move to is comprised.

  Next, the configuration of the controller of the scribing apparatus 10 according to the present embodiment will be described using a block diagram. FIG. 3 is a block diagram of the controller 30 of the scribe device 10. In this figure, the outputs from the two CCD cameras 18 a and 18 b are given to the control unit 32 via the image processing unit 31 of the controller 30. The input unit 33 is used to input data about the scribe of the brittle material substrate. A Y motor driving unit 35, a rotation motor driving unit 36, a linear motor driving unit 37, and a scribe head driving unit 38 are connected to the control unit 32. The Y motor drive unit 35 drives the motor 14, and the rotation motor drive unit 36 drives the motor 15. The linear motor drive unit 37 drives the linear motor 23. The control unit 32 controls the position of the table 16 in the x-axis and y-axis directions based on the scribe data, and controls the rotation of the table 16. The control unit 32 drives the scribing head in the z-axis direction via the scribing head driving unit 38 and drives the scribing wheel 25 so as to press the surface of the brittle material substrate with an appropriate load when the scribing wheel 25 rolls. It is. Further, a monitor 39 and a scribe data holding unit 40 are connected to the control unit 32. The scribe data holding unit 40 holds data for scribe described later.

  Next, a scribing method using the scribing apparatus according to this embodiment will be described with reference to FIG. First, the brittle material substrate 17 is placed on the table 16. Then, the scribe data is read from the scribe data holding unit 40 of the controller 30, and the motors 14 and 15 and the linear motor 23 are driven based on the scribe data, and the scribe head is moved down to perform the scribe. Here, as shown in FIG. 4A, first, a scribe line 51 for contour is formed in order to cut out a substantially rectangular product substrate including a functional region having, for example, four corners in an arc shape from the brittle material substrate 17. Next, auxiliary scribe lines 52 a to 52 d are formed around the substrate 17 in order to divide this region.

  FIG. 4A shows a first example of the auxiliary scribe line. These auxiliary scribe lines 52a are not in contact with the outline scribe lines 51, and are inclined from the perpendicular to the adjacent outline scribe lines 51, for example, at an angle of 45 °, from the periphery of the brittle material substrate 17 to the scribe lines 51. A scribe line is formed up to a position close to one side. In this case, scribing is performed by moving the scribe head 22 relative to the substrate 17 simultaneously in the x-axis direction and the y-axis direction of FIG. Similarly, the other auxiliary scribe lines 52b to 52d are inclined with respect to the adjacent contour scribe line 51 from the vertical to form scribe lines. Although this angle is not limited to 45 °, if this angle is too small, the length of the auxiliary scribe line becomes long, and the tact time increases when the scribe is formed. If the angle is too large, the break may progress to the inside of the contour scribe line. Therefore, it is preferable to set it as 30 degrees-60 degrees, for example.

  If scribing is performed in this way, when the periphery of the substrate 17 is moved in different directions when dividing from the auxiliary scribe line, the substrate 17 is divided along the auxiliary scribe line and reaches the scribe line 51 for contour. However, at that time, the breaking can be advanced along the contour without running inside the scribe line for contour, and the functional region can be divided without damage. In this case, if the break is not completed, the functional region can be divided without damage by breaking similarly from other auxiliary scribe lines.

  Next, a second example of the auxiliary scribe line will be described with reference to FIG. 4B. In FIG. 4B, the scribe line 51 is scribed in the center of the brittle material substrate 17, and the auxiliary scribe line is inclined at 45 ° with respect to the scribe line of the outline as in the example described above. In this case, instead of the scribe lines 52b and 52d, the scribe lines 52e and 52f are scribed in substantially the same direction as the 52a and 52c. Also in this case, by dividing along the auxiliary scribe line, the functional area can be divided along the contour scribe line without the crack reaching the inside of the contour scribe line.

  Next, a third example of the auxiliary scribe line will be described with reference to FIG. 4C. In FIG. 4C, only one auxiliary scribe line 52a is formed to be inclined with respect to the outline scribe line 51, and the other auxiliary scribe lines are formed as auxiliary scribe lines 52g, 52h, and 52i perpendicular to the opposing outline scribe lines. Yes. In this case, the functional region can be divided without damage by performing a break from the auxiliary scribe line 52a.

  Next, a fourth example of the auxiliary scribe line will be described with reference to FIG. 4D. In FIG. 4D, only the auxiliary scribe lines 52 a and 52 c are formed to be inclined with respect to the contour scribe line 51, and the auxiliary scribe lines 52 g and 52 i are formed perpendicular to the contour scribe line 51. Also in this case, the functional region can be divided without damage by dividing from the auxiliary scribe line 52a or 52c.

  Here, one auxiliary scribe line is formed on each side of the contour scribe line as an auxiliary scribe line, but the division is started from any one of the auxiliary scribe lines, and the functional area is completely divided by this division. One auxiliary scribe line is sufficient if possible. Other auxiliary scribe lines can be used to divide again from the auxiliary scribe line when the division is not completed.

  In this embodiment, the contour scribe line 51 is formed and then auxiliary scribe lines are formed. However, each auxiliary scribe line is formed first and then the contour scribe line is formed. Needless to say, it may be.

  In the present invention, a scribe line having a closed curve as an outline is formed, and when a necessary region is cut out, the functional region can be divided without damage, and can be widely used for dividing the substrate.

DESCRIPTION OF SYMBOLS 10 Scribing device 11 Moving table 12a, 12b Guide rail 13 Ball screw 14, 15 Motor 16 Table 17 Brittle material substrate 18a, 18b CCD camera 20 Bridge 21a, 21b Post 22 Scribing head 23 Linear motor 24 Holder 25 Scribing wheel 30 Controller 31 Image Processing unit 32 Control unit 33 Input unit 34 Y motor drive unit 36 Motor drive unit for rotation 37 Linear motor drive unit 38 Scribe head drive unit 39 Monitor 40 Scribe data holding unit 51 Contour scribe line 52a to 52i Auxiliary scribe line

Claims (2)

A scribing method for scribing to divide a product substrate including a functional region from a brittle material substrate,
A contour scribe line having a closed curve on the brittle material substrate and an auxiliary scribe extending obliquely with respect to the contour scribe line closest to the contour scribe line on the outside of the contour scribe line without contacting the contour scribe line A scribing method to form a line. A scribing device for scribing a product substrate including a functional region from a brittle material substrate,
The scribing device is
A table on which the brittle material substrate is installed;
A scribing head provided so as to be movable up and down so as to face the brittle material substrate on the table, and holding a scribing wheel at its tip;
Moving means for relatively moving the scribe head and the brittle material substrate in a state where the scribing wheel is pressed against the surface of the brittle material substrate;
A contour scribe line having a closed curve on the brittle material substrate and an auxiliary scribe extending obliquely with respect to the contour scribe line closest to the contour scribe line on the outside of the contour scribe line without contacting the contour scribe line And a controller for forming a line.