JP2015029092A - Euv波長帯斜入射用反射光学素子 - Google Patents
Euv波長帯斜入射用反射光学素子 Download PDFInfo
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- JP2015029092A JP2015029092A JP2014140047A JP2014140047A JP2015029092A JP 2015029092 A JP2015029092 A JP 2015029092A JP 2014140047 A JP2014140047 A JP 2014140047A JP 2014140047 A JP2014140047 A JP 2014140047A JP 2015029092 A JP2015029092 A JP 2015029092A
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- optical element
- reflective
- reflective coating
- reflective optical
- boron
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- 230000003287 optical effect Effects 0.000 title claims abstract description 51
- 238000009304 pastoral farming Methods 0.000 title abstract description 3
- 238000000576 coating method Methods 0.000 claims abstract description 87
- 239000011248 coating agent Substances 0.000 claims abstract description 78
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052796 boron Inorganic materials 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 39
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 11
- 230000001737 promoting effect Effects 0.000 claims description 11
- 229910052707 ruthenium Inorganic materials 0.000 claims description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 239000010955 niobium Substances 0.000 claims description 7
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 239000002241 glass-ceramic Substances 0.000 claims description 4
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052703 rhodium Inorganic materials 0.000 claims description 4
- 239000010948 rhodium Substances 0.000 claims description 4
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052791 calcium Inorganic materials 0.000 claims description 3
- 239000011575 calcium Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 239000011777 magnesium Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052762 osmium Inorganic materials 0.000 claims description 3
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052712 strontium Inorganic materials 0.000 claims description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000002310 reflectometry Methods 0.000 description 39
- 239000010410 layer Substances 0.000 description 38
- 230000005855 radiation Effects 0.000 description 17
- 238000010586 diagram Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- LGLOITKZTDVGOE-UHFFFAOYSA-N boranylidynemolybdenum Chemical compound [Mo]#B LGLOITKZTDVGOE-UHFFFAOYSA-N 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- VDZMENNHPJNJPP-UHFFFAOYSA-N boranylidyneniobium Chemical compound [Nb]#B VDZMENNHPJNJPP-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000001994 activation Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002186 photoactivation Effects 0.000 description 2
- 238000000678 plasma activation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- -1 B y. Here Chemical class 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Optical Elements Other Than Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
12 EUV放射源
13 コレクタミラー
14 照明システム
15 第1ミラー
16 第2ミラー
17 マスク
18 第3ミラー
19 第4ミラー
20 投影システム
21 ウェーハ
100 ミラー
110 基板
120 反射コーティング
130 接着促進層
Claims (14)
- 基板(110)上に反射コーティング(120)を備える極端紫外波長帯斜入射用反射光学素子(100)であって、前記反射コーティング(120)は、厚さ(D)が50nmより大きく、ホウ素を含有することを特徴とする、反射光学素子。
- 前記反射コーティング(120)は、任意のストイキオメトリのホウ化物の形態で少なくとも前記ホウ素の一部を含有することを特徴とする、請求項1に記載の反射光学素子。
- 前記反射コーティング(120)は、任意のストイキオメトリの金属ホウ化物の形態で少なくとも前記ホウ素の一部を含有することを特徴とする、請求項1又は2に記載の反射光学素子。
- 前記反射コーティング(120)は、ホウ化物の混合物、特に、任意のストイキオメトリの二元系又は三元系の金属ホウ化物の形態で少なくとも前記ホウ素の一部を含有することを特徴とする、請求項1〜3のいずれか一項に記載の反射光学素子。
- 前記反射コーティング(120)は、モリブデン、ルテニウム、ニオブ、ジルコニウム、ロジウム、レニウム、パラジウム、金、プラチナ、ニッケル、タンタル、タングステン、オスミウム、イリジウム、チタン、ハフニウム、マグネシウム、カルシウム、及びストロンチウムを含む金属群のうちの1種又は複数種の任意のストイキオメトリのホウ化物の形態で前記ホウ素の少なくとも一部を含有することを特徴とする、請求項1〜4のいずれか一項に記載の反射光学素子。
- 前記反射コーティング(120)は、該反射コーティング(120)の厚さ(D)方向で異なるストイキオメトリのホウ化物を含有することを特徴とする、請求項1〜5のいずれか一項に記載の反射光学素子。
- 前記基板(110)は、金属、金属合金、ガラス、ガラスセラミック、セラミック、半導体の単結晶もしくは多結晶、又は複合材料からなることを特徴とする、請求項1〜6のいずれか一項に記載の反射光学素子。
- 接着促進層(130)が前記基板(110)及び前記反射コーティング(120)の間に配置されていることを特徴とする、請求項1〜7のいずれか一項に記載の反射光学素子。
- 前記反射コーティング(120)は、任意のストイキオメトリの金属ホウ化物又は混合金属ホウ化物の形態で少なくとも前記ホウ素の一部を含有し、前記基板(110)及び前記反射コーティング(120)の間に配置された、前記金属ホウ化物の金属又は前記混合金属ホウ化物のうちの一種の金属を含有する接着促進層(130)を有することを特徴とする、請求項1〜8のいずれか一項に記載の反射光学素子。
- 前記反射コーティング(120)は、厚さ(D)が100nm以上、好ましくは1000nm以上であることを特徴とする、請求項1〜9のいずれか一項に記載の反射光学素子。
- 前記反射コーティングは、1つのホウ素含有層(120)からなることを特徴とする、請求項1〜10のいずれか一項に記載の反射光学素子。
- コレクタミラー(13)として実装されることを特徴とする、請求項1〜11のいずれか一項に記載の反射光学素子。
- 請求項1〜12のいずれか一項に記載の反射光学素子を備えるEUVリソグラフィー用光学システム。
- 請求項1〜12のいずれか一項に記載の反射光学素子を備える、EUVリソグラフィー装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013107192.9A DE102013107192A1 (de) | 2013-07-08 | 2013-07-08 | Reflektives optisches Element für streifenden Einfall im EUV-Wellenlängenbereich |
DE102013107192.9 | 2013-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015029092A true JP2015029092A (ja) | 2015-02-12 |
JP6489769B2 JP6489769B2 (ja) | 2019-03-27 |
Family
ID=50980224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014140047A Active JP6489769B2 (ja) | 2013-07-08 | 2014-07-07 | Euv波長帯斜入射用反射光学素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9703209B2 (ja) |
EP (1) | EP2824487B1 (ja) |
JP (1) | JP6489769B2 (ja) |
DE (1) | DE102013107192A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190102272A (ko) * | 2017-01-17 | 2019-09-03 | 칼 짜이스 에스엠테 게엠베하 | 특히 마이크로리소그래픽 투영 노광 장치 또는 검사 시스템을 위한 거울 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015224238A1 (de) | 2015-12-03 | 2016-12-15 | Carl Zeiss Smt Gmbh | Optisches Element, Projektionssystem und EUV-Lithographiesystem damit und Verfahren zur Korrektur einer Oberflächenform |
DE102016201850A1 (de) * | 2016-02-08 | 2017-08-10 | Carl Zeiss Smt Gmbh | Optisches Element |
US11971605B2 (en) | 2018-05-09 | 2024-04-30 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Mirror support for a composite optical mirror and method for its production |
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KR20190102272A (ko) * | 2017-01-17 | 2019-09-03 | 칼 짜이스 에스엠테 게엠베하 | 특히 마이크로리소그래픽 투영 노광 장치 또는 검사 시스템을 위한 거울 |
KR102528150B1 (ko) | 2017-01-17 | 2023-05-03 | 칼 짜이스 에스엠테 게엠베하 | 특히 마이크로리소그래픽 투영 노광 장치 또는 검사 시스템을 위한 거울 |
Also Published As
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US20150009480A1 (en) | 2015-01-08 |
US9703209B2 (en) | 2017-07-11 |
JP6489769B2 (ja) | 2019-03-27 |
DE102013107192A1 (de) | 2015-01-08 |
EP2824487B1 (de) | 2022-01-19 |
EP2824487A1 (de) | 2015-01-14 |
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