JP2014528837A - 膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法 - Google Patents
膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法 Download PDFInfo
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- JP2014528837A JP2014528837A JP2014525286A JP2014525286A JP2014528837A JP 2014528837 A JP2014528837 A JP 2014528837A JP 2014525286 A JP2014525286 A JP 2014525286A JP 2014525286 A JP2014525286 A JP 2014525286A JP 2014528837 A JP2014528837 A JP 2014528837A
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- diaphragm
- pressure
- membrane
- welding
- substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
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Abstract
Description
本実施例は膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法を提供する。図1のように、それは本実施例の溶接方法を採用する溶接機構の図面である。溶接の前、基板100を固定し、隔膜200で基板100の表面に被覆し、圧力を掛けることにより隔膜200を基板100の表面に押し、本実施例において、透明な圧力板300で隔膜に圧力を掛ける。
本実施例は膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法を提供する。図2のように、それは本実施例の溶接方法を採用する溶接機構の図面である。溶接の工程は実施例1とほとんど同じであるが、その相違点は隔膜100に対して圧力を掛ける方式である。本実施例では気圧―圧膜という方式で隔膜100に圧力を掛ける。溶接の前に、基板100を固定し、隔膜200を基板100の表面に被覆し、さらに、引張装置600で隔膜200をピンと張ってからそれを基板100の表面に被覆することが好ましい。気圧室800及び圧膜900を隔膜200の表面に置き、予め圧膜900で気圧室800を密封し、気圧室800の本体に圧力センサー801及び制御弁802が配置されている。圧力を掛ける時、制御弁802にて気圧室800に気体を注入する。気圧は隔膜200の表面に気圧面を形成することにより、隔膜200に対して圧力を掛ける。
図3に示されたように、本実施例に提供された膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法は、実施例2とほとんど同じであるが、その相違点は圧膜で気圧室800を密封することではなく、基板100及び隔膜200をちゃんと置いてから気圧室800と合うシールホルダー803にて隔膜200を気圧室800の周りにしっかり押すことにより気圧室800を密封することである。さらに、密封の前に、引張装置600で隔膜200に引っ張り力を掛けることにより、それをピンと張らせる。圧力を掛ける方式は実施例2と同じである。
本実施例は膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法を提供する。図4に示されたように、実施例3と比べて、異なる圧力掛け方法を採用した。即ち、気圧室800と基板100は同じ側に配置され、気体を抽出することにより圧力を掛ける。具体的に下記の通りである。
本実施例は膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法を提供する。溶接の工程は実施例2、3、4とほとんど同じであるが、その相違点は二つの気圧室で圧力を掛けることである。図5に示されたように、第一気圧室800aと隔膜200の側に配置され、第二気圧室800bと基板100は同じ側に配置される。具体的に下記の通りである。
図6に示されたように、本実施例は膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法を提供する。実施例5と比べて、圧膜900を省き、第一気圧室800aも隔膜200で密封されている。具体的に下記の通りである。
Claims (21)
- 溶接の前、基板を固定し、隔膜を平らに前記基板の表面に被覆する工程と、
圧力を掛けることにより、隔膜を前記基板の表面に押し、溶接の時、レーザーで前記隔膜を透過し前記基板の溶接区域を照射し、前記溶接区域は熱を受け融解された後、前記基板と隔膜とを一体に溶接させる工程と、
を備えることを特徴とする膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。 - 前記隔膜に引っ張り力を掛けて、隔膜をピンと引っ張り前記基板の表面に被覆することを特徴とする請求項1に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 圧力を掛ける時、前記隔膜の弾性パラメータ及び圧力の大きさに応じて、前記引っ張り力を調整することを特徴とする請求項2に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 溶接する前、マスキングで前記基板の非溶接区域を遮ることにより、レーザーをマスキングの光透過区域に透過させ、前記基板の溶接区域に照射させることを特徴とする請求項1〜3のいずれかに記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 透明な圧力板で圧力を掛けて隔膜を前記基板の表面に押すことを特徴とする請求項4に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 透明な圧力板で圧力を掛ける前に、前記隔膜と前記圧力板との間に透明な弾性クッションを配置することを特徴とする請求項5に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 気圧室にて掛けられた圧力で、隔膜を前記基板の表面に押し、前記気圧室の気圧または外部気圧、または気圧室の気圧及び外部気圧を同時に前記隔膜と基板との溶接表面に掛け、且つ気圧を掛ける時、気圧室は密閉の状態であることを特徴とする請求項4に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 前記気圧室は前記隔膜の側に配置され、前記隔膜で前記気圧室を密封し、前記気圧室に気体を注入し、注入された気体は前記隔膜の表面に気圧面を形成することにより前記隔膜に圧力を掛け、前記気圧室の本体は透明な材料で作られたものであることを特徴とする請求項7に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 気体を注入する時、さらに前記気圧室の気圧を調節する工程を備えることを特徴とする請求項8に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 前記気圧室は前記隔膜の側に配置され、前記隔膜の表面に圧膜を被覆し、前記圧膜で前記気圧室を密封し、前記気圧室に気体を注入し、注入された気体は前記圧膜の表面に気圧面を形成することにより、前記隔膜に圧力を掛け、前記気圧室の本体は透明な材料で作られるものであることを特徴とする請求項7に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 前記圧膜を前記隔膜の表面に被覆した後、前記圧膜に対して引っ張り力を掛けて、気体を注入する時、気圧の大きさに応じて引っ張り力を調節することを特徴とする請求項10に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 前記圧膜の材料特性は前記隔膜の材料特性と同じであることを特徴とする請求項10に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 気体を注入する時、さらに前記気圧室の気圧を調節する工程を備えることを特徴とする請求項9に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 前記気圧室は前記基板の側に配置され、前記隔膜で前記気圧室を密封し、気圧室の気体を抽出し、外部気圧は前記隔膜の表面に気圧面を形成することにより前記隔膜に圧力を掛けることを特徴とする請求項7に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 気圧室の気体を抽出する時、さらに前記気圧室の気圧を調節する工程を備えることを特徴とする請求項14に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 隔膜の側に配置されている第一気圧室と、基板の側に配置されている第二気圧室とを備え、
前記隔膜で前記第一気圧室及び前記第二気圧室を密封し、前記第一気圧室に気体を注入するとともに、第二気圧室から気体を抽出し、二つの気圧室の気体圧力差は前記隔膜の表面に気圧面を形成することにより前記隔膜に圧力を掛け、前記第一気圧室の本体は透明な材料で作られたものであることを特徴とする請求項7に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。 - 気体を注入する時及び気体を抽出する時、さらに前記第一気圧室及び前記第二気圧室の気圧を調節する工程を備えることを特徴とする請求項16に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 隔膜の側に配置されている第一気圧室と、基板の側に配置されている第二気圧室とを備え、
前記隔膜の表面に圧膜を被覆し、前記圧膜で前記第一気圧室を密封し、前記隔膜で前記第二気圧室を密封し、第一気圧室に気体を注入するとともに第二気圧室から気体を抽出し、前記第一気圧室の気圧で圧膜の表面に形成された気圧面は外部気圧で前記隔膜の表面に形成された気圧面とともに、前記隔膜に圧力を掛け、前記第一気圧室の本体は透明な材料で作られたものであることを特徴とする請求項7に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。 - 前記圧膜を前記隔膜の表面に被覆した後、前記圧膜に対して引っ張り力を掛けて、気体を注入する時、気圧の大きさに応じて引っ張り力を調節することを特徴とする請求項18に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 前記圧膜の材料特性は前記隔膜の材料特性と同じであることを特徴とする請求項18に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
- 気体を注入する時及び気体を抽出する時、さらに前記第一気圧室及び第二気圧室の気圧を調節する工程を備えることを特徴とする請求項18に記載の膜動ポリマーマイクロフルイディクチップの基板と隔膜とを溶接する方法。
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Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013207683A1 (de) * | 2013-04-26 | 2014-11-13 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Herstellen einer mikrofluidischen Analysekartusche |
KR101392426B1 (ko) * | 2013-07-08 | 2014-05-07 | 한국기계연구원 | 마이크로 채널 소자 및 마이크로 채널 소자의 제작방법 |
US9440424B2 (en) * | 2014-05-05 | 2016-09-13 | Picosys Inc | Methods to form and to dismantle hermetically sealed chambers |
GB2533386B (en) | 2014-12-18 | 2019-09-11 | Smiths Detection Watford Ltd | A detection apparatus with pneumatic interface |
WO2017120475A1 (en) | 2016-01-06 | 2017-07-13 | University Of Utah Research Foundation | Low-power large aperture adaptive lenses for smart eyeglasses |
EP3649387A1 (en) * | 2017-07-07 | 2020-05-13 | University of Utah Research Foundation | Low-voltage microfluidic actuator driven by tension modification |
DE102018210706A1 (de) * | 2018-06-29 | 2020-01-02 | Robert Bosch Gmbh | Adaptive Maske für ein Verfahren zum Laserdurchstrahlschweißen |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01501032A (ja) * | 1986-09-26 | 1989-04-06 | ゼネラル・エレクトリック・カンパニイ | 少なくとも1つの半導体チップ装置の表面に重合体フィルムを結合する方法 |
JP2000218698A (ja) * | 1999-01-28 | 2000-08-08 | Leister Process Technologies | レ―ザ―による樹脂の接合方法及びその装置 |
JP2003001455A (ja) * | 2001-06-15 | 2003-01-08 | Matsushita Electric Ind Co Ltd | 金属と樹脂との接合方法及び装置、制振鋼板の製造方法 |
JP2009524170A (ja) * | 2006-01-24 | 2009-06-25 | マイクロラボ ピーティーワイ エルティーディー | 複雑な層状材料及びデバイスを低コストで製造する方法 |
JP2010140738A (ja) * | 2008-12-11 | 2010-06-24 | Nitto Denko Corp | 通気構造および通気構造の製造方法 |
US20110036817A1 (en) * | 2009-08-13 | 2011-02-17 | Multivac Sepp Haggenmuller Gmbh & Co. Kg | Laser sealing of packages |
JP2011143596A (ja) * | 2010-01-14 | 2011-07-28 | Nitto Denko Corp | シート接合体作製方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5094709A (en) * | 1986-09-26 | 1992-03-10 | General Electric Company | Apparatus for packaging integrated circuit chips employing a polymer film overlay layer |
US4953287A (en) * | 1987-07-01 | 1990-09-04 | Hewlett-Packard Company | Thermal-bonding process and apparatus |
US5972780A (en) * | 1996-08-22 | 1999-10-26 | Nippon Telegraph Telephone Corporation | Thin film forming apparatus and method |
JP3683669B2 (ja) * | 1997-03-21 | 2005-08-17 | 株式会社リコー | 半導体発光素子 |
US20100236705A1 (en) * | 2000-07-18 | 2010-09-23 | Chou Stephen Y | Fluidic and Microdevice Apparatus and Methods For Bonding Components Thereof |
US6486433B2 (en) * | 2001-01-11 | 2002-11-26 | Branson Ultrasonics Corporation | Transparent pressure bladder |
DE50200675D1 (de) * | 2002-10-02 | 2004-08-26 | Leister Process Technologies S | Verfahren und Vorrichtung zum Bearbeiten von Werkstücken mittels eines Laserstrahls |
US7220245B2 (en) * | 2004-05-26 | 2007-05-22 | Kriesel Marshall S | Infusion apparatus |
US20070125489A1 (en) * | 2005-09-08 | 2007-06-07 | Oregon State University | Microfluidic welded devices or components thereof and method for their manufacture |
JP4514722B2 (ja) * | 2006-02-20 | 2010-07-28 | 富士通セミコンダクター株式会社 | フィルム貼り付け方法、フィルム貼り付け装置および半導体装置の製造方法 |
JP4948033B2 (ja) * | 2006-05-16 | 2012-06-06 | ローム株式会社 | マイクロ流体回路の製造方法およびその方法により製造したマイクロ流体回路 |
-
2011
- 2011-08-16 CN CN201110235234.0A patent/CN102319956B/zh active Active
-
2012
- 2012-02-29 WO PCT/CN2012/071781 patent/WO2013023449A1/zh active Application Filing
- 2012-02-29 EP EP12823344.2A patent/EP2745977B1/en active Active
- 2012-02-29 JP JP2014525286A patent/JP5966006B2/ja active Active
- 2012-02-29 US US14/238,848 patent/US9427735B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01501032A (ja) * | 1986-09-26 | 1989-04-06 | ゼネラル・エレクトリック・カンパニイ | 少なくとも1つの半導体チップ装置の表面に重合体フィルムを結合する方法 |
JP2000218698A (ja) * | 1999-01-28 | 2000-08-08 | Leister Process Technologies | レ―ザ―による樹脂の接合方法及びその装置 |
JP2003001455A (ja) * | 2001-06-15 | 2003-01-08 | Matsushita Electric Ind Co Ltd | 金属と樹脂との接合方法及び装置、制振鋼板の製造方法 |
JP2009524170A (ja) * | 2006-01-24 | 2009-06-25 | マイクロラボ ピーティーワイ エルティーディー | 複雑な層状材料及びデバイスを低コストで製造する方法 |
JP2010140738A (ja) * | 2008-12-11 | 2010-06-24 | Nitto Denko Corp | 通気構造および通気構造の製造方法 |
US20110036817A1 (en) * | 2009-08-13 | 2011-02-17 | Multivac Sepp Haggenmuller Gmbh & Co. Kg | Laser sealing of packages |
JP2011143596A (ja) * | 2010-01-14 | 2011-07-28 | Nitto Denko Corp | シート接合体作製方法 |
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US9427735B2 (en) | 2016-08-30 |
CN102319956A (zh) | 2012-01-18 |
US20140216647A1 (en) | 2014-08-07 |
EP2745977A1 (en) | 2014-06-25 |
JP5966006B2 (ja) | 2016-08-10 |
WO2013023449A1 (zh) | 2013-02-21 |
CN102319956B (zh) | 2015-04-22 |
EP2745977B1 (en) | 2018-11-21 |
EP2745977A4 (en) | 2016-03-09 |
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