JP4948033B2 - マイクロ流体回路の製造方法およびその方法により製造したマイクロ流体回路 - Google Patents
マイクロ流体回路の製造方法およびその方法により製造したマイクロ流体回路 Download PDFInfo
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- JP4948033B2 JP4948033B2 JP2006136783A JP2006136783A JP4948033B2 JP 4948033 B2 JP4948033 B2 JP 4948033B2 JP 2006136783 A JP2006136783 A JP 2006136783A JP 2006136783 A JP2006136783 A JP 2006136783A JP 4948033 B2 JP4948033 B2 JP 4948033B2
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- plastic substrate
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- microfluidic circuit
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Description
本実施の形態では、上プラスチック基板の光減衰領域の表面粗さと、マイクロチャネルにおける光の透過量との関係について検討する。本発明のマイクロ流体回路の製造方法を図5に示す。まず、シリコン基板51上にSiO2膜52を形成し(図5(a))、SiO2膜52上にレジスト53を形成する(図5(b))。レジストには、ポリメタクリル酸メチル(PMMA)を使用する。その後、レジスト53上にマスク54を配置し、マスク54を介してUV55を照射し(図5(c))、現像する(図5(d))。つぎに、プラズマエッチングを行ない(図5(e))、レジスト53aを除去し(図5(f))、蒸着により金属膜を形成する(図5(g))。つづいて、シリコン基板51およびSiO2膜52aをウェットエッチングにより除去し、金型56aを得る(図5(h))。
本実施の形態では、上プラスチック基板の光減衰領域が、照射光が垂直に入射しない面を有する例として、光減衰領域の断面が三角形である空孔部を有する例について検討する。実施の形態1と同様にして、金型56aを製造した(図5(h))。つぎに、金型56aに対向する金型であって、上プラスチック基板の光減衰領域の断面が三角形となるように凸形状に加工した金型を用いて、実施の形態1と同様に射出成形をする。得られる上プラスチック基板の断面図を図6に示す。この上プラスチック基板は、厚さd、屈折率nであり、天面に光減衰領域64を有し、底面に幅wのマイクロチャネル61を有する。
(w/2)×(1.00−0.50)=w/4
に照射する光が、マイクロチャネルに到達しないため、
tan(θ1−θ2)≒(w/4)/d=w/4d
一方、スネルの法則により、
sinθ1/sinθ2=n/1
であるから、両式より、
tan〔θ1−sin-1{(sinθ1)/n}〕=w/4d
θ1=90−θより、
tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧w/4d
(d/w)tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧0.25
であるとき、マイクロチャネル61における光の透過量が、光減衰領域64により、上プラスチック基板への光の照射量の50%以下に減衰する。したがって、上プラスチック基板の光減衰領域が、照射光が垂直に入射しない面を備える空孔部を有することにより、光減衰領域によりマイクロチャネルへの光の透過量を減衰することができる。
(w/2)×(1.00−0.80)=w/10
に照射する光が、マイクロチャネルに到達しないため、
tan(θ1−θ2)≒(w/10)/d=w/10d
tan〔θ1−sin-1{(sinθ1)/n}〕=w/10d
tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧w/10d
(d/w)tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧0.1
であるとき、マイクロチャネルにおける光の透過量が、光減衰領域により、上プラスチック基板への光の照射量の80%以下に減衰する。
本実施の形態では、上プラスチック基板の光減衰領域が、照射光が垂直に入射しない面を有する例として、光減衰領域の断面が半円である空孔部を有する場合について検討する。実施の形態1と同様にして、金型56aを製造する(図5(h))。つぎに、金型56aに対向する金型であって、上プラスチック基板の光減衰領域の断面が半円となるように凸形状に加工した金型を用いて、実施の形態1と同様に射出成形をする。得られる上プラスチック基板の断面図を図7に示す。図7に示すように、この上プラスチック基板は、厚さd、屈折率nであり、天面に光減衰領域74を有し、底面に幅wのマイクロチャネル71を有する。
tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧w/4d
(d/w)tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧0.25
である。
(d/w)tan{30−sin-1(1/2n)}≧0.25
であるとき、マイクロチャネル71における光の透過量が、光減衰領域74により、上プラスチック基板への光の照射量の50%以下に減衰する。
である。
(d/w)tan{53−sin-1(4/5n)}≧0.1
であるとき、マイクロチャネル71における光の透過量が、光減衰領域74により、上プラスチック基板への光の照射量の50%以下に減衰する。
本実施の形態では、上プラスチック基板の光減衰領域が、照射光が垂直に入射しない面を有する例として、光減衰領域の断面が円弧である空孔部を有する場合について検討する。実施の形態1と同様にして、金型56aを製造した(図5(h))。つぎに、金型56aに対向する金型であって、上プラスチック基板の光減衰領域の断面が円弧となるように凸形状に加工した金型を用いて、実施の形態1と同様に射出成形をする。得られる上プラスチック基板の断面図を図8に示す。図8に示すように、この上プラスチック基板は、厚さd、屈折率nであり、天面に光減衰領域84を有し、底面に幅wのマイクロチャネル81を有する。
tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧w/4d
(d/w)tan〔90−θ−sin-1{(sin(90−θ))/n}〕≧0.25
である。
である。
本実施の形態では、上プラスチック基板の光減衰領域が、遮光性材料を含有する場合について検討する。このような上プラスチック基板を図9に示すような方法で製造する。まず、図9(a)に示すような金型96aを、実施の形態1と同様に製造する。つぎに、金型96aに対向する金型96bを組合わせて、実施の形態1と同様に射出成形をする。この金型には、内部に可動式金型96cを備えており、図9(b)に示すように、射出成形後、可動式金型96cを移動し、空間97を形成することができる。つぎに、図9(c)に示すように、カーボンブラックなどの遮光性材料を含有する樹脂材料95を、空間97に射出成形する。このような2色成形法により、図9(d)に示すような上プラスチック基板98が得られる。この上プラスチック基板98の光減衰領域99は、遮光性材料を含有しているため、レーザ光94などを照射すると、マイクロチャネル93への光の透過量を減衰することができる。たとえば、粒径30nm〜50nmのカーボンブラックを5質量%含有する樹脂材料95を厚さTが100μmとなるように形成すると、マイクロチャネル93における光の透過量は0%にまで減衰する。
Claims (6)
- 透明な上プラスチック基板を、光吸収性の下プラスチック基板に積層し、上プラスチック基板を通して光を照射することにより上プラスチック基板と下プラスチック基板とを溶着して接合するマイクロ流体回路の製造方法であって、
上プラスチック基板の底面に、マイクロチャネルを有し、
上プラスチック基板を通して光を照射するとき、マイクロチャネルへの光の透過量が減衰する光減衰領域を上プラスチック基板に形成する工程を備え、
前記マイクロチャネルと前記光減衰領域とが一体化しており、
上プラスチック基板の前記光減衰領域は、照射光が垂直に入射しない面を備える空孔部を有する、マイクロ流体回路の製造方法。 - マイクロチャネルにおける光の透過量が、前記光減衰領域により、上プラスチック基板への光の照射量の80%以下に減衰する請求項1に記載のマイクロ流体回路の製造方法。
- 前記上プラスチック基板は、厚さd、屈折率nであり、底面に幅wのマイクロチャネルを有し、マイクロチャネルへ透過する照射光の入射角をθとすると、(d/w)tan〔90−θ−sin-1{(sin(90−θ))/n}〕の値が0.1以上である請求項1に記載のマイクロ流体回路の製造方法。
- 透明な上プラスチック基板と、該上プラスチック基板に接合する光吸収性の下プラスチック基板とを備えるマイクロ流体回路であって、
上プラスチック基板の底面に、マイクロチャネルを備えると共に、上プラスチック基板は前記マイクロチャネルと一体化された光減衰領域を有し、
上プラスチック基板の前記光減衰領域は、照射光が垂直に入射しない面を備える空孔部を有し、
上プラスチック基板を通して光を照射するとき、光減衰領域によりマイクロチャネルへの光の透過量が減衰するマイクロ流体回路。 - マイクロチャネルにおける光の透過量が、前記光減衰領域により、上プラスチック基板への光の照射量の80%以下に減衰する請求項4に記載のマイクロ流体回路。
- 前記上プラスチック基板は、厚さd、屈折率nであり、底面に幅wのマイクロチャネルを有し、マイクロチャネルへ透過する照射光の入射角をθとすると、(d/w)tan〔90−θ−sin-1{(sin(90−θ))/n}〕の値が0.1以上である請求項4に記載のマイクロ流体回路。
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