JP2014528164A5 - - Google Patents

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Publication number
JP2014528164A5
JP2014528164A5 JP2014529637A JP2014529637A JP2014528164A5 JP 2014528164 A5 JP2014528164 A5 JP 2014528164A5 JP 2014529637 A JP2014529637 A JP 2014529637A JP 2014529637 A JP2014529637 A JP 2014529637A JP 2014528164 A5 JP2014528164 A5 JP 2014528164A5
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JP
Japan
Prior art keywords
target
bearing
processing tool
target processing
guide surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014529637A
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English (en)
Japanese (ja)
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JP2014528164A (ja
JP5955964B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/NL2012/050630 external-priority patent/WO2013039387A1/en
Publication of JP2014528164A publication Critical patent/JP2014528164A/ja
Publication of JP2014528164A5 publication Critical patent/JP2014528164A5/ja
Application granted granted Critical
Publication of JP5955964B2 publication Critical patent/JP5955964B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014529637A 2011-09-12 2012-09-07 ターゲット処理ツールのためのガイダンス Active JP5955964B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161533339P 2011-09-12 2011-09-12
US61/533,339 2011-09-12
PCT/NL2012/050630 WO2013039387A1 (en) 2011-09-12 2012-09-07 Guidance for target processing tool

Publications (3)

Publication Number Publication Date
JP2014528164A JP2014528164A (ja) 2014-10-23
JP2014528164A5 true JP2014528164A5 (enExample) 2015-10-29
JP5955964B2 JP5955964B2 (ja) 2016-07-20

Family

ID=47003170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014529637A Active JP5955964B2 (ja) 2011-09-12 2012-09-07 ターゲット処理ツールのためのガイダンス

Country Status (5)

Country Link
US (1) US9163664B2 (enExample)
EP (1) EP2756354B1 (enExample)
JP (1) JP5955964B2 (enExample)
TW (1) TW201314382A (enExample)
WO (1) WO2013039387A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2756354B1 (en) 2011-09-12 2018-12-19 Mapper Lithography IP B.V. Target processing tool
KR101608625B1 (ko) * 2015-07-30 2016-04-11 주식회사 재원 위치 결정 장치
CN112658691A (zh) * 2020-12-16 2021-04-16 惠州城市职业学院(惠州商贸旅游高级职业技术学校) 一种冲浪板切割打磨一体装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4637738A (en) * 1985-07-31 1987-01-20 Vincent Barkley Alignment compensator for linear bearings
US4802774A (en) * 1987-10-14 1989-02-07 Brown & Sharpe Manfacturing Co. Gas bearing for guiding relative movement of precision machine parts
JPH01240246A (ja) * 1988-03-22 1989-09-25 Kazuya Hirose テーブルの縦横移動機構
US5180230A (en) * 1991-06-12 1993-01-19 Etec Systems, Inc. Rolling element cage constraint
JP3353941B2 (ja) * 1993-05-11 2002-12-09 オリンパス光学工業株式会社 直線移動部材の支持装置
US5760564A (en) 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
US6114799A (en) * 1997-02-10 2000-09-05 Minolta Co., Ltd. Driving mechanism
JP4073512B2 (ja) * 1997-02-10 2008-04-09 コニカミノルタホールディングス株式会社 駆動装置
DE60032568T2 (de) 1999-12-01 2007-10-04 Asml Netherlands B.V. Positionierungsapparat und damit versehener lithographischer Apparat
US6570155B1 (en) * 2000-04-11 2003-05-27 Applied Materials, Inc. Bi-directional electron beam scanning apparatus
DE10140174B4 (de) 2001-08-22 2005-11-10 Leica Microsystems Semiconductor Gmbh Koordinaten-Messtisch und Koordinaten-Messgerät
SG126732A1 (en) * 2002-09-30 2006-11-29 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
TWI472884B (zh) 2008-08-18 2015-02-11 Mapper Lithography Ip Bv 帶電粒子射束微影系統以及目標物定位裝置
NL2003846A (en) * 2008-12-19 2010-06-22 Asml Netherlands Bv Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless.
EP2756354B1 (en) 2011-09-12 2018-12-19 Mapper Lithography IP B.V. Target processing tool

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